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Permanent Bonding And Patterning Material App 20210033975 - Sejoubsari; Reihaneh ;   et al. | 2021-02-04 |
Poly(cyanocinnamate)s For Structural And Optical Applications App 20200257202 - A1 | 2020-08-13 |
Polymer film stencil process for fan-out wafer-level packaging of semiconductor devices Grant 10,617,010 - Flaim | 2020-04-07 |
Laser ablative dielectric material Grant 10,304,720 - Matos-Perez , et al. | 2019-05-28 |
Dual-layer bonding material process for temporary bonding of microelectronic substrates to carrier substrates Grant 10,103,048 - Flaim , et al. October 16, 2 | 2018-10-16 |
Polymer Film Stencil Process For Fan-out Wafer-level Packaging Of Semiconductor Devices App 20180063963 - Flaim; Tony D. | 2018-03-01 |
Laser Ablative Dielectric Material App 20180019156 - Matos-Perez; Cristina R. ;   et al. | 2018-01-18 |
Methods of transferring device wafers or layers between carrier substrates and other surfaces Grant 9,827,757 - McCutcheon , et al. November 28, 2 | 2017-11-28 |
Polyimides as laser release materials for 3-D IC applications Grant 9,827,740 - Liu , et al. November 28, 2 | 2017-11-28 |
Multiple bonding layers for thin-wafer handling Grant 9,472,436 - Puligadda , et al. October 18, 2 | 2016-10-18 |
Multiple bonding layers for thin-wafer handling Grant 9,263,314 - Puligadda , et al. February 16, 2 | 2016-02-16 |
Polyimides As Laser Release Materials For 3-d Ic Applications App 20160023436 - Liu; Xiao ;   et al. | 2016-01-28 |
Multiple bonding layers for thin-wafer handling Grant 9,224,631 - Puligadda , et al. December 29, 2 | 2015-12-29 |
Development of high-viscosity bonding layer through in-situ polymer chain extension Grant 9,127,126 - Hong , et al. September 8, 2 | 2015-09-08 |
Method for reversibly mounting a device wafer to a carrier substrate Grant 9,111,981 - Flaim , et al. August 18, 2 | 2015-08-18 |
Article including a device wafer reversibly mountable to a carrier substrate Grant 9,099,512 - Flaim , et al. August 4, 2 | 2015-08-04 |
Multiple Bonding Layers For Thin-wafer Handling App 20150122426 - Puligadda; Rama ;   et al. | 2015-05-07 |
Dual-layer Bonding Material Process For Temporary Bonding Of Microelectronic Substrates To Carrier Substrates App 20150064385 - Flaim; Tony D. ;   et al. | 2015-03-05 |
Reversal lithography approach by selective deposition of nanoparticles Grant 8,836,082 - Lin , et al. September 16, 2 | 2014-09-16 |
Multiple Bonding Layers For Thin-wafer Handling App 20140239453 - Puligadda; Rama ;   et al. | 2014-08-28 |
Method of making radiation-sensitive sol-gel materials Grant 8,808,969 - Lin , et al. August 19, 2 | 2014-08-19 |
On-track Reverse Lithography To Thin Mask For Fabrication Of Dark-field Features App 20140225252 - Lin; Qin ;   et al. | 2014-08-14 |
Acid-etch resistant, protective coatings Grant 8,771,927 - Tang , et al. July 8, 2 | 2014-07-08 |
Cyclic olefin compositions for temporary wafer bonding Grant 8,771,442 - Hong , et al. July 8, 2 | 2014-07-08 |
Multiple Bonding Layers For Thin-wafer Handling App 20140174627 - Puligadda; Rama ;   et al. | 2014-06-26 |
Multiple Bonding Layers For Thin-wafer Handling App 20140162034 - Puligadda; Rama ;   et al. | 2014-06-12 |
Methods Of Transferring Device Wafers Or Layers Between Carrier Substrates And Other Surfaces App 20140130969 - McCutcheon; Jeremy ;   et al. | 2014-05-15 |
Development Of High-viscosity Bonding Layer Through In-situ Polymer Chain Extension App 20130288058 - Hong; Wenbin ;   et al. | 2013-10-31 |
Spin-on protective coatings for wet-etch processing of microelectronic substrates Grant 8,445,591 - Xu , et al. May 21, 2 | 2013-05-21 |
On-track process for patterning hardmask by multiple dark field exposures Grant 8,415,083 - Sun , et al. April 9, 2 | 2013-04-09 |
Scratch-resistant coatings for protecting front-side circuitry during backside processing Grant 8,399,346 - Yess , et al. March 19, 2 | 2013-03-19 |
Cyclic Olefin Compositions For Temporary Wafer Bonding App 20120291938 - Hong; Wenbin ;   et al. | 2012-11-22 |
Method Of Making Radiation-sensitive Sol-gel Materials App 20120264056 - Lin; Qin ;   et al. | 2012-10-18 |
Reversal Lithography Approach By Selective Deposition Of Nanoparticles App 20120193762 - Lin; Qin ;   et al. | 2012-08-02 |
Cyclic olefin compositions for temporary wafer bonding Grant 8,221,571 - Hong , et al. July 17, 2 | 2012-07-17 |
Spin-on protective coatings for wet-etch processing of microelectronic substrates Grant 8,202,442 - Li , et al. June 19, 2 | 2012-06-19 |
Spin-on protective coatings for wet-etch processing of microelectronic substrates Grant 8,192,642 - Xu , et al. June 5, 2 | 2012-06-05 |
Spin-on Protective Coatings For Wet-etch Processing Of Microelectronic Substrates App 20120130004 - Xu; Gu ;   et al. | 2012-05-24 |
On-track process for patterning hardmask by multiple dark field exposures Grant 8,133,659 - Sun , et al. March 13, 2 | 2012-03-13 |
Multiple Bonding Layers For Thin-wafer Handling App 20120034437 - Puligadda; Rama ;   et al. | 2012-02-09 |
Cyclic olefin compositions for temporary wafer bonding Grant 8,092,628 - Hong , et al. January 10, 2 | 2012-01-10 |
On-track Process For Patterning Hardmask By Multiple Dark Field Exposures App 20110223524 - Sun; Sam X. ;   et al. | 2011-09-15 |
Acid-etch Resistant, Protective Coatings App 20110171478 - Tang; Tingji ;   et al. | 2011-07-14 |
Cyclic Olefin Compositions For Temporary Wafer Bonding App 20110086955 - Hong; Wenbin ;   et al. | 2011-04-14 |
Method For Reversibly Mounting A Device Wafer To A Carrier Substrate App 20110069467 - Flaim; Tony D. ;   et al. | 2011-03-24 |
Scratch-resistant Coatings For Protecting Front-side Circuitry During Backside Processing App 20110062604 - Yess; Kimberly A. ;   et al. | 2011-03-17 |
Hybrid organic-inorganic polymer coatings with high refractive indices Grant 7,803,458 - Flaim , et al. September 28, 2 | 2010-09-28 |
Spin-on protective coatings for wet-etch processing of microelectronic substrates Grant 7,758,913 - Li , et al. July 20, 2 | 2010-07-20 |
Two-layer transparent electrostatic charge dissipating coating Grant 7,749,603 - Graham , et al. July 6, 2 | 2010-07-06 |
Cyclic Olefin Compositions For Temporary Wafer Bonding App 20100112305 - Hong; Wenbin ;   et al. | 2010-05-06 |
Alkaline-resistant negative photoresist for silicon wet-etch without silicon nitride Grant 7,709,178 - Zhong , et al. May 4, 2 | 2010-05-04 |
Method For Reversibly Mounting A Device Wafer To A Carrier Substrate App 20090218560 - Flaim; Tony D. ;   et al. | 2009-09-03 |
On-track Process For Patterning Hardmask By Multiple Dark Field Exposures App 20090191474 - Sun; Sam X. ;   et al. | 2009-07-30 |
Curable High Refractive Index Resins For Optoelectronic Applications App 20090087666 - Mercado; Ramil-Marcelo L. ;   et al. | 2009-04-02 |
Two-layer transparent electrostatic charge dissipating coating App 20090074973 - Graham; Charles R. ;   et al. | 2009-03-19 |
Spin-on Protective Coatings For Wet-etch Processing Of Microelectronic Substrates App 20090075087 - Xu; Gu ;   et al. | 2009-03-19 |
Alkaline-resistant Negative Photoresist For Silicon Wet-etch Without Silicon Nitride App 20080261145 - Zhong; Xing-Fu ;   et al. | 2008-10-23 |
Spin-on Protective Coatings For Wet-etch Processing Of Microelectronic Substrates App 20080041815 - Li; Chenghong ;   et al. | 2008-02-21 |
Spin-on protective coatings for wet-etch processing of microelectronic substrates Grant 7,316,844 - Li , et al. January 8, 2 | 2008-01-08 |
Non-aromatic chromophores for use in polymer anti-reflective coatings Grant 7,132,216 - Shao , et al. November 7, 2 | 2006-11-07 |
Spin-on Protective Coatings For Wet-etch Processing Of Microelectronic Substrates App 20060240181 - Li; Chenghong ;   et al. | 2006-10-26 |
Curable high refractive index resins for optoelectronic applications App 20060068207 - Mercado; Ramil-Marcelo L. ;   et al. | 2006-03-30 |
Hybrid organic-inorganic polymer coatings with high refractive indices App 20060030648 - Flaim; Tony D. ;   et al. | 2006-02-09 |
Spin-on protective coatings for wet-etch processing of microelectronic substrates App 20050158538 - Li, Chenghong ;   et al. | 2005-07-21 |
Anti-reflective coating compositions for use with low k dielectric materials Grant 6,893,684 - Puligadda , et al. May 17, 2 | 2005-05-17 |
Hybrid organic-inorganic polymer coatings with high refractive indices App 20040171743 - Flaim, Tony D. ;   et al. | 2004-09-02 |
Non-aromatic chromophores for use in polymer anti-reflective coatings App 20040067441 - Shao, Xie ;   et al. | 2004-04-08 |
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings Grant 6,670,425 - Puligadda , et al. December 30, 2 | 2003-12-30 |
Anti-reflective coating compositions for use with low k dielectric materials App 20030234387 - Puligadda, Rama ;   et al. | 2003-12-25 |
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings Grant 6,663,916 - Puligadda , et al. December 16, 2 | 2003-12-16 |
Anti-reflective coating compositions for use with low k dielectric materials App 20030004283 - Puligadda, Rama ;   et al. | 2003-01-02 |
Anti-reflective coating compositions for use with low k dielectric materials App 20020198333 - Puligadda, Rama ;   et al. | 2002-12-26 |
Non-aromatic chromophores for use in polymer anti-reflective coatings App 20020045125 - Shao, Xie ;   et al. | 2002-04-18 |
Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor Grant 6,303,270 - Flaim , et al. October 16, 2 | 2001-10-16 |
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes Grant 6,080,530 - Shao , et al. June 27, 2 | 2000-06-27 |
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes Grant 6,042,990 - Shao , et al. March 28, 2 | 2000-03-28 |
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes Grant 5,935,760 - Shao , et al. August 10, 1 | 1999-08-10 |
Method for making multilayer resist structures with thermosetting anti-reflective coatings Grant 5,919,598 - Flaim , et al. July 6, 1 | 1999-07-06 |
Thermosetting anti-reflective coatings compositions Grant 5,693,691 - Flaim , et al. December 2, 1 | 1997-12-02 |
Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility Grant 5,688,987 - Meador , et al. November 18, 1 | 1997-11-18 |
Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating Grant 5,368,989 - Flaim , et al. November 29, 1 | 1994-11-29 |
Microlithographic substrate cleaning and compositions therefor Grant 5,362,608 - Flaim , et al. November 8, 1 | 1994-11-08 |
Soluble conducting polymers and their use in manufacturing electronic devices Grant 5,262,195 - Moss , et al. November 16, 1 | 1993-11-16 |
Positive working polyamic acid/imide photoresist compositions and their use as dielectrics Grant 5,138,424 - Moss , et al. August 11, 1 | 1992-08-11 |
Positive working polyamic acid/imide and diazoquinone photoresist with high temperature pre-bake Grant 5,024,922 - Moss , et al. June 18, 1 | 1991-06-18 |
Adhesion promoting product and process for treating an integrated circuit substrate therewith Grant 4,950,583 - Brewer , et al. August 21, 1 | 1990-08-21 |
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