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Patent applications and USPTO patent grants for Flaim; Tony.The latest application filed is for "method for making polymers with intrinsic light-absorbing properties".
Patent | Date |
---|---|
Method for making polymers with intrinsic light-absorbing properties Grant 5,578,676 - Flaim , et al. November 26, 1 | 1996-11-26 |
Base-soluble polyimide release layers for use in microlithographic processing Grant 5,281,690 - Flaim , et al. January 25, 1 | 1994-01-25 |
Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography Grant 5,234,990 - Flaim , et al. August 10, 1 | 1993-08-10 |
Method for making polyimide microlithographic compositions soluble in alkaline media Grant 5,057,399 - Flaim , et al. October 15, 1 | 1991-10-15 |
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