loadpatents
Patent applications and USPTO patent grants for Flagello; Donis George.The latest application filed is for "lithographic substrate and a device".
Patent | Date |
---|---|
Lithographic substrate and a device Grant 9,366,952 - Flagello June 14, 2 | 2016-06-14 |
Lithographic Substrate And A Device App 20150277222 - FLAGELLO; Donis George | 2015-10-01 |
Lithographic method Grant 9,086,633 - Flagello July 21, 2 | 2015-07-21 |
Device manufacturing method and mask for use therein Grant 8,252,487 - Dierichs , et al. August 28, 2 | 2012-08-28 |
Lithographic apparatus and device manufacturing method Grant 7,952,803 - Flagello May 31, 2 | 2011-05-31 |
Lithographic apparatus and device manufacturing method Grant 7,684,013 - Hansen , et al. March 23, 2 | 2010-03-23 |
Diffractive Optical Element, Lithographic Apparatus and Semiconductor Device Manufacturing Method App 20100041239 - FLAGELLO; Donis George | 2010-02-18 |
Lithographic Method App 20090286053 - FLAGELLO; Donis George | 2009-11-19 |
Lithographic System, Lithographic Apparatus and Device Manufacturing Method App 20090208878 - LOOPSTRA; Erik Roelof ;   et al. | 2009-08-20 |
Lithographic apparatus and device manufacturing method Grant 7,548,302 - Bleeker , et al. June 16, 2 | 2009-06-16 |
Lithographic apparatus and methods for use thereof Grant 7,538,875 - Van Dijk , et al. May 26, 2 | 2009-05-26 |
Device Manufacturing Method App 20080030708 - Hansen; Steven George ;   et al. | 2008-02-07 |
Variable illumination source Grant 7,317,506 - Flagello , et al. January 8, 2 | 2008-01-08 |
Lithographic apparatus and device manufacturing method App 20070273853 - Bleeker; Arno Jan ;   et al. | 2007-11-29 |
Lithographic apparatus and device manufacturing method App 20070263269 - Flagello; Donis George | 2007-11-15 |
Enhanced lithographic resolution through double exposure App 20070258073 - Finders; Jozef Maria ;   et al. | 2007-11-08 |
Enhanced lithographic resolution through double exposure Grant 7,256,873 - Finders , et al. August 14, 2 | 2007-08-14 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems Grant 7,206,059 - Flagello , et al. April 17, 2 | 2007-04-17 |
Variable illumination source App 20070013888 - Flagello; Donis George ;   et al. | 2007-01-18 |
Lithographic apparatus and device manufacturing method App 20070002300 - Hansen; Steven George ;   et al. | 2007-01-04 |
Lithographic apparatus and methods for use thereof App 20050206879 - Van Dijk, Remco Marcel ;   et al. | 2005-09-22 |
Enhanced lithographic resolution through double exposure App 20050162627 - Finders, Jozef Maria ;   et al. | 2005-07-28 |
Device manufacturing method and mask for use therein App 20050136334 - Dierichs, Marcel Mathijs Theodore Marie ;   et al. | 2005-06-23 |
Assist features for use in lithographic projection Grant 6,887,625 - Baselmans , et al. May 3, 2 | 2005-05-03 |
Device manufacturing method App 20050007573 - Hansen, Steven George ;   et al. | 2005-01-13 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems App 20040227923 - Flagello, Donis George ;   et al. | 2004-11-18 |
Assist features for use in lithographic projection App 20020045106 - Baselmans, Johannes Jacobus Matheus ;   et al. | 2002-04-18 |
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