| Patent | Date |
|---|
Illumination system with curved 1d-patterned mask for use in EUV-exposure tool
Grant 11,300,884 - Smith , et al. April 12, 2 | 2022-04-12 |
Euv lithography system for dense line patterning
Grant 11,099,483 - Flagello , et al. August 24, 2 | 2021-08-24 |
EUV lithography system for dense line patterning
Grant 10,890,849 - Flagello , et al. January 12, 2 | 2021-01-12 |
Illumination System With Curved 1d-patterned Mask For Use In Euv-exposure Tool
App 20200073251 - Smith; Daniel Gene ; et al. | 2020-03-05 |
Dynamic patterning method that removes phase conflicts and improves pattern fidelity and CDU on a two phase-pixelated digital scanner
Grant 10,310,387 - Palmer , et al. | 2019-06-04 |
Using customized lens pupil optimization to enhance lithographic imaging in a source-mask optimization scheme
Grant 10,133,184 - Flagello November 20, 2 | 2018-11-20 |
Euv Lithography System For Dense Line Patterning
App 20170336716 - Flagello; Donis G. ; et al. | 2017-11-23 |
Euv Lithography System For Dense Line Patterning
App 20170336715 - Flagello; Donis G. ; et al. | 2017-11-23 |
Dynamic Patterning Method That Removes Phase Conflicts And Improves Pattern Fidelity And Cdu On A Two Phase-pixelated Digital Scanner
App 20150234295 - Palmer; Shane R. ; et al. | 2015-08-20 |
Fast illumination simulator based on a calibrated flexible point-spread function
Grant 9,091,941 - Smith , et al. July 28, 2 | 2015-07-28 |
Fast photoresist model
Grant 8,910,093 - Flagello December 9, 2 | 2014-12-09 |
Method or matching high-numerical aperture scanners
Grant 8,588,508 - Palmer , et al. November 19, 2 | 2013-11-19 |
Using Customized Lens Pupil Optimization to Enhance Lithographic Imaging in a Source-Mask Optimization Scheme
App 20130286369 - Flagello; Donis G. | 2013-10-31 |
Scanning Lithography using point source imaging arrays
App 20130065185 - Flagello; Donis G. | 2013-03-14 |
Fast Illumination Simulator Based on a Calibrated Flexible Point Spread Function
App 20120212722 - Smith; Daniel Gene ; et al. | 2012-08-23 |
Fast photoresist model
App 20120079436 - Flagello; Donis G. | 2012-03-29 |
Method for matching high-numerical aperture scanners
App 20120039523 - Palmer; Shane Roy ; et al. | 2012-02-16 |
Lithographic method and apparatus
Grant 6,855,486 - Finders , et al. February 15, 2 | 2005-02-15 |
Lithography apparatus
App 20010001247 - Finders, Jozef M. ; et al. | 2001-05-17 |
Diamond-like carbon films from a hydrocarbon helium plasma
Grant 5,569,501 - Bailey , et al. October 29, 1 | 1996-10-29 |
High performance projection display with two light valves
Grant 5,517,340 - Doany , et al. May 14, 1 | 1996-05-14 |
Diamond-like carbon films from a hydrocarbon helium plasma
Grant 5,470,661 - Bailey , et al. November 28, 1 | 1995-11-28 |
Polymeric optical waveguides and methods of forming the same
Grant 5,054,872 - Fan , et al. October 8, 1 | 1991-10-08 |
Simultaneous multiple level interconnection process
Grant 4,840,923 - Flagello , et al. June 20, 1 | 1989-06-20 |
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