Firouzdor; Vahid

Patent Applications and Registrations

Patent applications and USPTO patent grants for Firouzdor; Vahid.The latest application filed is for "chamber components with polished internal apertures".

Company Profile

15.34.53

Firouzdor; Vahid - San Mateo CA
Firouzdor; Vahid - Hillsborough CA
FIROUZDOR; Vahid - Santa Clara CA
Firouzdor; Vahid - Madison WI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chamber Components With Polished Internal Apertures App 20220297256 - Sun; Jennifer Y. ; et al.	2022-09-22
Rare-earth oxide based coatings based on ion assisted deposition Grant 11,424,136 - Sun , et al. August 23, 2	2022-08-23
Chamber components with polished internal apertures Grant 11,370,078 - Sun , et al. June 28, 2	2022-06-28
Yttrium Oxide Based Coating And Bulk Compositions App 20210403337 - Beaudry; Christopher Laurent ; et al.	2021-12-30
Yttrium Oxide Based Coating Composition App 20210317564 - Firouzdor; Vahid ; et al.	2021-10-14
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20210317563 - Sun; Jennifer Y. ; et al.	2021-10-14
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 11,053,581 - Sun , et al. July 6, 2	2021-07-06
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition App 20210118703 - Sun; Jennifer Y. ; et al.	2021-04-22
Plasma resistant coating of porous body by atomic layer deposition Grant 10,975,469 - Firouzdor , et al. April 13, 2	2021-04-13
Rare-earth oxide based coatings based on ion assisted deposition Grant 10,930,526 - Sun , et al. February 23, 2	2021-02-23
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20210010126 - Firouzdor; Vahid ; et al.	2021-01-14
Smart device fabrication via precision patterning Grant 10,818,481 - Sun , et al. October 27, 2	2020-10-27
Plasma erosion resistant thin film coating for high temperature application Grant 10,815,562 - Firouzdor , et al. October 27, 2	2020-10-27
Slurry Plasma Spray Of Plasma Resistant Ceramic Coating App 20200325073 - Sun; Jennifer ; et al.	2020-10-15
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings Grant 10,796,888 - Sun , et al. October 6, 2	2020-10-06
Plasma resistant coating of porous body by atomic layer deposition Grant 10,745,805 - Firouzdor , et al. A	2020-08-18
Slurry plasma spray of plasma resistant ceramic coating Grant 10,730,798 - Sun , et al.	2020-08-04
Substrate Processing Chamber Component Assembly With Plasma Resistant Seal App 20200152425 - FIROUZDOR; Vahid ; et al.	2020-05-14
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20200087776 - Sun; Jennifer Y. ; et al.	2020-03-19
Ion assisted deposition top coat of rare-earth oxide Grant 10,563,297 - Sun , et al. Feb	2020-02-18
Ion assisted deposition top coat of rare-earth oxide Grant 10,544,500 - Sun , et al. Ja	2020-01-28
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 10,501,843 - Sun , et al. Dec	2019-12-10
High Purity Metallic Top Coat For Semiconductor Manufacturing Components App 20190194817 - Sun; Jennifer Y. ; et al.	2019-06-27
High purity metallic top coat for semiconductor manufacturing components Grant 10,260,160 - Sun , et al.	2019-04-16
Chamber Components With Polished Internal Apertures App 20190105751 - Sun; Jennifer Y. ; et al.	2019-04-11
Chamber components with polished internal apertures Grant 10,189,141 - Sun , et al. Ja	2019-01-29
Erosion Resistant Atomic Layer Deposition Coatings App 20180337026 - Firouzdor; Vahid ; et al.	2018-11-22
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 10,119,188 - Sun , et al. November 6, 2	2018-11-06
Plasma Resistant Coating Of Porous Body By Atomic Layer Deposition App 20180265972 - Firouzdor; Vahid ; et al.	2018-09-20
Plasma Resistant Coating Of Porous Body By Atomic Layer Deposition App 20180265973 - Firouzdor; Vahid ; et al.	2018-09-20
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20180230587 - Firouzdor; Vahid ; et al.	2018-08-16
Substrate Support Assembly Having A Plasma Resistant Protective Layer App 20180151401 - Sun; Jennifer Y. ; et al.	2018-05-31
Plasma erosion resistant thin film coating for high temperature application Grant 9,976,211 - Firouzdor , et al. May 22, 2	2018-05-22
Ion assisted deposition top coat of rare-earth oxide Grant 9,970,095 - Sun , et al. May 15, 2	2018-05-15
Endpoint Gas Line Filter For Substrate Processing Equipment App 20180122655 - FIROUZDOR; Vahid ; et al.	2018-05-03
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components App 20180105922 - Sun; Jennifer Y. ; et al.	2018-04-19
High Purity Metallic Top Coat For Semiconductor Manufacturing Components App 20180105938 - Sun; Jennifer Y. ; et al.	2018-04-19
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition App 20180100228 - Sun; Jennifer Y. ; et al.	2018-04-12
Process for friction stir welding dissimilar metals and workpiece assemblies formed thereby Grant 9,937,587 - Kou , et al. April 10, 2	2018-04-10
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings App 20180096825 - Sun; Jennifer Y. ; et al.	2018-04-05
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20180087144 - Sun; Jennifer Y. ; et al.	2018-03-29
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20180080116 - Sun; Jennifer Y. ; et al.	2018-03-22
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20180073125 - Sun; Jennifer Y. ; et al.	2018-03-15
Substrate support assembly having a plasma resistant protective layer Grant 9,916,998 - Sun , et al. March 13, 2	2018-03-13
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20180030589 - Sun; Jennifer Y. ; et al.	2018-02-01
High purity metallic top coat for semiconductor manufacturing components Grant 9,879,348 - Sun , et al. January 30, 2	2018-01-30
Substrate Processing Chamber Component Assembly With Plasma Resistant Seal App 20180019104 - FIROUZDOR; Vahid ; et al.	2018-01-18
Ion assisted deposition for rare-earth oxide based coatings Grant 9,869,012 - Sun , et al. January 16, 2	2018-01-16
Ion assisted deposition top coat of rare-earth oxide Grant 9,869,013 - Sun , et al. January 16, 2	2018-01-16
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components App 20180010235 - Sun; Jennifer Y. ; et al.	2018-01-11
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components App 20180010234 - Sun; Jennifer Y. ; et al.	2018-01-11
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 9,850,568 - Sun , et al. December 26, 2	2017-12-26
Rare-earth oxide based coatings based on ion assisted deposition Grant 9,812,341 - Sun , et al. November 7, 2	2017-11-07
Ion beam sputtering with ion assisted deposition for coatings on chamber components Grant 9,797,037 - Sun , et al. October 24, 2	2017-10-24
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings App 20170301522 - Sun; Jennifer Y. ; et al.	2017-10-19
Chamber Components With Polished Internal Apertures App 20170274493 - Sun; Jennifer Y. ; et al.	2017-09-28
High Purity Metallic Top Coat For Semiconductor Manufacturing Components App 20170247795 - Sun; Jennifer Y. ; et al.	2017-08-31
Ion beam sputtering with ion assisted deposition for coatings on chamber components Grant 9,725,799 - Sun , et al. August 8, 2	2017-08-08
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings Grant 9,711,334 - Sun , et al. July 18, 2	2017-07-18
Chamber components with polished internal apertures Grant 9,687,953 - Sun , et al. June 27, 2	2017-06-27
High purity metallic top coat for semiconductor manufacturing components Grant 9,663,870 - Sun , et al. May 30, 2	2017-05-30
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition App 20170133207 - Sun; Jennifer Y. ; et al.	2017-05-11
Ion Assisted Deposition For Rare-earth Oxide Based Coatings App 20170130319 - Sun; Jennifer Y. ; et al.	2017-05-11
Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles Grant 9,583,369 - Sun , et al. February 28, 2	2017-02-28
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20160326626 - Sun; Jennifer Y. ; et al.	2016-11-10
Smart Device Fabrication Via Precision Patterning App 20160329195 - Sun; Jennifer ; et al.	2016-11-10
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components App 20160326625 - Sun; Jennifer Y. ; et al.	2016-11-10
Smart device fabrication via precision patterning Grant 9,420,639 - Sun , et al. August 16, 2	2016-08-16
Chamber Components With Polished Internal Apertures App 20150375358 - Sun; Jennifer Y. ; et al.	2015-12-31
Slurry Plasma Spray Of Plasma Resistant Ceramic Coating App 20150321964 - Sun; Jennifer ; et al.	2015-11-12
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20150307982 - Firouzdor; Vahid ; et al.	2015-10-29
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20150311044 - Sun; Jennifer Y. ; et al.	2015-10-29
Chamber Component With Fluorinated Thin Film Coating App 20150311043 - Sun; Jennifer Y. ; et al.	2015-10-29
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components App 20150158775 - Sun; Jennifer Y. ; et al.	2015-06-11
Smart Device Fabrication Via Precision Patterning App 20150129574 - SUN; Jennifer ; et al.	2015-05-14
High Purity Metallic Top Coat For Semiconductor Manufacturing Components App 20150132602 - Sun; Jennifer Y. ; et al.	2015-05-14
Oxygen Containing Plasma Cleaning To Remove Contamination From Electronic Device Components App 20150107618 - Sun; Jennifer Y. ; et al.	2015-04-23
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings App 20150024155 - Sun; Jennifer Y. ; et al.	2015-01-22
Ion Assisted Deposition For Rare-earth Oxide Based Coatings On Lids And Nozzles App 20150021324 - Sun; Jennifer Y. ; et al.	2015-01-22
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20140377504 - Sun; Jennifer Y. ; et al.	2014-12-25
Substrate Support Assembly Having A Plasma Resistant Protective Layer App 20140154465 - Sun; Jennifer Y. ; et al.	2014-06-05
Process For Friction Stir Welding Dissimilar Metals And Workpiece Assemblies Formed Thereby App 20140134449 - Kou; Sindo ; et al.	2014-05-15
Method of friction stir welding dissimilar metals and workpiece assemblies formed thereby Grant 8,464,926 - Kou , et al. June 18, 2	2013-06-18
Method of friction stir welding dissimilar metals and workpiece assemblies formed thereby App 20110104515 - Kou; Sindo ; et al.	2011-05-05

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