Fiolka; Damian

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fiolka; Damian.The latest application filed is for "polarization-modulating optical element".

Company Profile

1.100.120

Fiolka; Damian - Oberkochen DE
Fiolka; Damian - Oberkocken DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Polarization-modulating Optical Element App 20190094704 - Fiolka; Damian ; et al.	2019-03-28
Illumination system of a microlithographic projection exposure apparatus with a birefringent element Grant 10,151,982 - Fiolka , et al. Dec	2018-12-11
Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation Grant 10,146,135 - Layh , et al. De	2018-12-04
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180314165 - Deguenther; Markus ; et al.	2018-11-01
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180246415 - Xalter; Stefan ; et al.	2018-08-30
Illumination system of a microlithographic projection exposure apparatus Grant 9,933,706 - Deguenther , et al. April 3, 2	2018-04-03
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,897,925 - Xalter , et al. February 20, 2	2018-02-20
Polarization-modulating Optical Element App 20170329233 - Fiolka; Damian ; et al.	2017-11-16
Microlithography illumination system and microlithography illumination optical unit Grant 9,778,576 - Fiolka , et al. October 3, 2	2017-10-03
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20170261861 - Deguenther; Markus ; et al.	2017-09-14
Polarization-modulating Optical Element App 20170102622 - Fiolka; Damian ; et al.	2017-04-13
EUV microlithography projection exposure apparatus with a heat light source Grant 9,588,435 - Fiolka March 7, 2	2017-03-07
Polarization-modulating optical element Grant 9,581,911 - Fiolka , et al. February 28, 2	2017-02-28
Illumination system of a microlithographic projection exposure apparatus Grant 9,454,085 - Deguenther , et al. September 27, 2	2016-09-27
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160266502 - Xalter; Stefan ; et al.	2016-09-15
Liquid cooled EUV reflector Grant 9,423,590 - Hartjes , et al. August 23, 2	2016-08-23
Illumination System Of A Microlithographic Projection Exposure Apparatus With A Birefringent Element App 20160195815 - Fiolka; Damian ; et al.	2016-07-07
Microlithography Illumination System And Microlithography Illumination Optical Unit App 20160195820 - Fiolka; Damian ; et al.	2016-07-07
Optical system for semiconductor lithography Grant 9,383,544 - Melzer , et al. July 5, 2	2016-07-05
Producing polarization-modulating optical element for microlithography system Grant 9,316,772 - Fiolka , et al. April 19, 2	2016-04-19
Illumination system of a microlithographic projection exposure apparatus with a birefringent element Grant 9,316,920 - Fiolka , et al. April 19, 2	2016-04-19
Microlithography illumination system and microlithography illumination optical unit Grant 9,304,405 - Fiolka , et al. April 5, 2	2016-04-05
Illumination system for EUV microlithography Grant 9,304,400 - Layh , et al. April 5, 2	2016-04-05
Illumination system or projection objective of a microlithographic projection exposure apparatus Grant 9,274,435 - Dieckmann , et al. March 1, 2	2016-03-01
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,239,229 - Xalter , et al. January 19, 2	2016-01-19
Illumination optical unit for microlithography Grant 9,235,137 - Fiolka , et al. January 12, 2	2016-01-12
Optical system and multi facet mirror of a microlithographic projection exposure apparatus Grant 9,213,245 - Fiolka , et al. December 15, 2	2015-12-15
Illumination system of a microlithographic projection exposure apparatus comprising a depolarizing element Grant 9,170,499 - Fiolka , et al. October 27, 2	2015-10-27
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150300807 - Xalter; Stefan ; et al.	2015-10-22
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150286150 - Deguenther; Markus ; et al.	2015-10-08
Method for modifying a polarization distribution in microlithographic projection exposure apparatus, and microlithographic projection exposure apparatus Grant 9,128,389 - Fiolka September 8, 2	2015-09-08
Illumination system of a microlithographic projection exposure apparatus Grant 9,091,945 - Deguenther , et al. July 28, 2	2015-07-28
Microlithographic Projection Exposure Apparatus Having A Multi-mirror Array With Temporal Stabilisation App 20150177623 - Layh; Michael ; et al.	2015-06-25
Optical element having a plurality of reflective facet elements Grant 9,063,336 - Kirch , et al. June 23, 2	2015-06-23
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150153654 - Fiolka; Damian ; et al.	2015-06-04
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,019,475 - Xalter , et al. April 28, 2	2015-04-28
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,013,684 - Xalter , et al. April 21, 2	2015-04-21
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,001,309 - Xalter , et al. April 7, 2	2015-04-07
Optical assembly Grant 8,964,162 - Fiolka , et al. February 24, 2	2015-02-24
Illumination system of a microlithographic projection exposure apparatus Grant 8,928,859 - Fiolka , et al. January 6, 2	2015-01-06
Polarization-modulating optical element Grant 8,861,084 - Fiolka , et al. October 14, 2	2014-10-14
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140233006 - Xalter; Stefan ; et al.	2014-08-21
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140226141 - Xalter; Stefan ; et al.	2014-08-14
Microlithographic Projection Exposure Apparatus App 20140211188 - Layh; Michael ; et al.	2014-07-31
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 8,767,181 - Gruner , et al. July 1, 2	2014-07-01
Illumination system for a microlithographic projection exposure apparatus Grant 8,730,455 - Fiolka , et al. May 20, 2	2014-05-20
Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation Grant 8,724,086 - Layh , et al. May 13, 2	2014-05-13
Illumination apparatus for microlithography projection system including polarization-modulating optical element Grant 8,711,479 - Fiolka , et al. April 29, 2	2014-04-29
Producing Polarization-modulating Optical Element For Microlithography System App 20140102355 - Fiolka; Damian ; et al.	2014-04-17
Optical Element App 20140071523 - Hartjes; Joachim ; et al.	2014-03-13
Filter device for the compensation of an asymmetric pupil illumination Grant 8,636,386 - Maul , et al. January 28, 2	2014-01-28
Optical system and method for characterising an optical system Grant 8,625,071 - Fiolka January 7, 2	2014-01-07
Illumination optics for EUV microlithography and related system and apparatus Grant 8,587,767 - Fiolka , et al. November 19, 2	2013-11-19
Polarization-modulating Optical Element App 20130293862 - Fiolka; Damian ; et al.	2013-11-07
Filter Device For The Compensation Of An Asymmetric Pupil Illumination App 20130278913 - Maul; Manfred ; et al.	2013-10-24
Measurement method and measurement system for measuring birefringence Grant 8,542,356 - Fiolka , et al. September 24, 2	2013-09-24
EUV microlithography projection exposure apparatus with a heat light source App 20130222780 - Fiolka; Damian	2013-08-29
Illumination Apparatus For Microlithography Projection System Including Polarization-modulating Optical Element App 20130222778 - Fiolka; Damian ; et al.	2013-08-29
Illumination optical unit with a movable filter element App 20130176546 - Layh; Michael ; et al.	2013-07-11
Polarization-modulating optical element Grant 8,482,717 - Fiolka , et al. July 9, 2	2013-07-09
Filter device for the compensation of an asymmetric pupil illumination Grant 8,480,261 - Maul , et al. July 9, 2	2013-07-09
Optical System And Multi Facet Mirror Of A Microlithographic Projection Exposure Apparatus App 20130100429 - Fiolka; Damian ; et al.	2013-04-25
Microlithographic projection exposure apparatus Grant 8,395,753 - Fiolka , et al. March 12, 2	2013-03-12
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20130021591 - Deguenther; Markus ; et al.	2013-01-24
Optical System For Semiconductor Lithography App 20120327385 - Melzer; Frank ; et al.	2012-12-27
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 8,339,577 - Xalter , et al. December 25, 2	2012-12-25
Illumination apparatus for microlithographyprojection system including polarization-modulating optical element Grant 8,320,043 - Fiolka , et al. November 27, 2	2012-11-27
Illumination system of a microlithographic projection exposure apparatus Grant 8,319,945 - Fiolka , et al. November 27, 2	2012-11-27
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120293784 - Xalter; Stefan ; et al.	2012-11-22
Optical Element Having A Plurality Of Reflective Facet Elements App 20120293785 - Kirch; Marc ; et al.	2012-11-22
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120293786 - Fiolka; Damian ; et al.	2012-11-22
Facet Mirror For Use In Microlithography App 20120287414 - Fiolka; Damian ; et al.	2012-11-15
Filter Device For The Compensation Of An Asymmetric Pupil Illumination App 20120281198 - Maul; Manfred ; et al.	2012-11-08
Polarization-modulating optical element Grant 8,289,623 - Fiolka , et al. October 16, 2	2012-10-16
Polarization-modulating optical element Grant 8,279,524 - Fiolka , et al. October 2, 2	2012-10-02
Optical system for semiconductor lithography Grant 8,269,947 - Melzer , et al. September 18, 2	2012-09-18
Polarization-modulating optical element Grant 8,270,077 - Fiolka , et al. September 18, 2	2012-09-18
Illumination system of a microlithographic projection exposure apparatus Grant 8,264,668 - Fiolka , et al. September 11, 2	2012-09-11
Polarization-modulating optical element Grant 8,259,393 - Fiolka , et al. September 4, 2	2012-09-04
Filter device for the compensation of an asymmetric pupil illumination Grant 8,246,211 - Maul , et al. August 21, 2	2012-08-21
Optical system of a microlithographic projection exposure apparatus Grant 8,237,918 - Totzeck , et al. August 7, 2	2012-08-07
Illumination Optical Unit For Microlithography App 20120162627 - Fiolka; Damian ; et al.	2012-06-28
Optical System For Generating A Light Beam For Treating A Substrate App 20120154895 - Muenz; Holger ; et al.	2012-06-21
Measurement Method And Measurement System For Measuring Birefringence App 20120092669 - FIOLKA; Damian ; et al.	2012-04-19
Optical Assembly App 20120019799 - Fiolka; Damian ; et al.	2012-01-26
Projection Exposure System, Beam Delivery System and Method of Generating a Beam of Light App 20120013878 - Kuss; Matthias ; et al.	2012-01-19
Optical system, in particular of a microlithographic projection exposure apparatus Grant 8,098,366 - Saenger , et al. January 17, 2	2012-01-17
Illumination system of a microlithographic projection exposure apparatus Grant 8,081,293 - Fiolka , et al. December 20, 2	2011-12-20
Device and method for influencing the polarization distribution in an optical system Grant 8,077,289 - Fiolka December 13, 2	2011-12-13
Filter Device For The Compensation Of An Asymmetric Pupil Illumination App 20110299285 - Maul; Manfred ; et al.	2011-12-08
Optical system of an illumination device of a projection exposure apparatus Grant 8,068,279 - Schuster , et al. November 29, 2	2011-11-29
Illumination System For A Microlithographic Projection Exposure Apparatus App 20110285978 - FIOLKA; Damian ; et al.	2011-11-24
Illumination system of a microlithographic projection exposure apparatus Grant 8,040,492 - Fiolka October 18, 2	2011-10-18
Subsystem of an illumination system of a microlithographic projection exposure apparatus Grant 8,035,803 - Fiolka October 11, 2	2011-10-11
Illumination system of a microlithographic projection exposure apparatus Grant 8,031,327 - Fiolka October 4, 2	2011-10-04
Filter device for the compensation of an asymmetric pupil illumination Grant 8,025,427 - Maul , et al. September 27, 2	2011-09-27
Illumination system for a microlithographic projection exposure apparatus Grant 8,004,656 - Fiolka , et al. August 23, 2	2011-08-23
Projection exposure system, beam delivery system and method of generating a beam of light Grant 7,995,280 - Kuss , et al. August 9, 2	2011-08-09
Polarization-modulating Optical Element App 20110188019 - Fiolka; Damian ; et al.	2011-08-04
Illumination System For Euv Microlithography App 20110177463 - Layh; Michael ; et al.	2011-07-21
Optical System, In Particular Of A Microlithographic Projection Exposure Apparatus App 20110149261 - Saenger; Ingo ; et al.	2011-06-23
Method For Modifying A Polarization Distribution In A Microlithographic Projection Exposure Apparatus, And Microlithographic Projection Exposure Apparatus App 20110122382 - Fiolka; Damian	2011-05-26
Microlithography Illumination System And Microlithography Illumination Optical Unit App 20110122392 - Fiolka; Damian ; et al.	2011-05-26
Transmission filter apparatus Grant 7,940,375 - Fiolka , et al. May 10, 2	2011-05-10
Polarized radiation in lithographic apparatus and device manufacturing method Grant 7,929,116 - Wagner , et al. April 19, 2	2011-04-19
Apparatus for providing a pattern of polarization Grant 7,916,391 - Albert , et al. March 29, 2	2011-03-29
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method App 20110069296 - GRUNER; Toralf ; et al.	2011-03-24
Illumination Optics For Euv Microlithography And Related System And Apparatus App 20110063598 - Fiolka; Damian ; et al.	2011-03-17
Microlithographic Projection Exposure Apparatus App 20110007293 - Fiolka; Damian ; et al.	2011-01-13
Filter Device For The Compensation Of An Asymmetric Pupil Illumination App 20100309450 - Maul; Manfred ; et al.	2010-12-09
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 7,847,921 - Gruner , et al. December 7, 2	2010-12-07
Illumination system and polarizer for a microlithographic projection exposure apparatus Grant 7,847,920 - Fiolka , et al. December 7, 2	2010-12-07
Microlithographic Projection Exposure Apparatus App 20100283985 - Layh; Michael ; et al.	2010-11-11
Microlithographic Projection Exposure Apparatus App 20100283984 - Layh; Michael ; et al.	2010-11-11
Illumination Optics For A Microlithographic Projection Exposure Apparatus App 20100277707 - Fiolka; Damian	2010-11-04
Illumination System Of A Microlothographic Projection Exposure Apparatus App 20100277708 - Fiolka; Damian ; et al.	2010-11-04
Microlithographic projection exposure apparatus Grant 7,817,250 - Fiolka , et al. October 19, 2	2010-10-19
Filter device for the compensation of an asymmetric pupil illumination Grant 7,798,676 - Maul , et al. September 21, 2	2010-09-21
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100231887 - Fiolka; Damian ; et al.	2010-09-16
Optical System And Method For Characterising An Optical System App 20100220303 - Fiolka; Damian	2010-09-02
Illumination optics for a microlithographic projection exposure apparatus Grant 7,787,104 - Fiolka August 31, 2	2010-08-31
Illumination system of a microlithographic projection exposure apparatus Grant 7,782,443 - Fiolka , et al. August 24, 2	2010-08-24
Illumination System For A Microlithography Projection Exposure Installation App 20100195077 - KOEHLER; Jess ; et al.	2010-08-05
Polarization-modulating Optical Element App 20100177293 - Fiolka; Damian ; et al.	2010-07-15
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100165318 - Fiolka; Damian ; et al.	2010-07-01
Illumination System Of A Microlothographic Projection Exposure Apparatus App 20100157268 - Fiolka; Damian ; et al.	2010-06-24
Illumination system for a microlithography projection exposure installation Grant 7,714,983 - Koehler , et al. May 11, 2	2010-05-11
Polarization-modulating Optical Element App 20100045957 - Fiolka; Damian ; et al.	2010-02-25
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100039629 - Xalter; Stefan ; et al.	2010-02-18
Illumination Optics For A Microlithographic Projection Exposure Apparatus App 20100039636 - Fiolka; Damian	2010-02-18
Microlithographic projection exposure apparatus with immersion projection lens Grant 7,663,735 - Fiolka February 16, 2	2010-02-16
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100002217 - Fiolka; Damian ; et al.	2010-01-07
Optical System Of A Microlithographic Projection Exposure Apparatus App 20090323042 - Totzeck; Michael ; et al.	2009-12-31
Illumination System Of A Microlithographic Projection Exposure Apparatus, And Depolarizer App 20090296066 - Fiolka; Damian	2009-12-03
System for reducing the coherence of laser radiation Grant 7,593,095 - Fiolka , et al. September 22, 2	2009-09-22
Optical System For Semiconductor Lithography App 20090207396 - Melzer; Frank ; et al.	2009-08-20
Illumination System Or Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20090195766 - Dieckmann; Nils ; et al.	2009-08-06
Illumination system for a microlithography projection exposure installation Grant 7,551,261 - Fiolka June 23, 2	2009-06-23
Optical System For Semiconductor Lithography App 20090135395 - Melzer; Frank ; et al.	2009-05-28
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090135397 - Fiolka; Damian	2009-05-28
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090115991 - Fiolka; Damian	2009-05-07
Optical beam transformation system and illumination system comprising an optical beam transformation system Grant 7,511,886 - Schultz , et al. March 31, 2	2009-03-31
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method App 20090040496 - GRUNER; Toralf ; et al.	2009-02-12
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090027646 - Fiolka; Damian ; et al.	2009-01-29
Microlithographic Projection Exposure Apparatus App 20090021719 - Fiolka; Damian ; et al.	2009-01-22
Illumination System For A Microlithographic Projection Exposure Apparatus App 20090009744 - Fiolka; Damian	2009-01-08
Polarization-modulating Optical Element App 20090002675 - Fiolka; Damian ; et al.	2009-01-01
Polarization-modulating Optical Element App 20080316459 - Fiolka; Damian ; et al.	2008-12-25
Polarization-modulating Optical Element App 20080316598 - Fiolka; Damian ; et al.	2008-12-25
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20080266540 - Fiolka; Damian	2008-10-30
Illumination system and polarizer for a microlithographic projection exposure apparatus App 20080239273 - Fiolka; Damian ; et al.	2008-10-02
Projection Exposure System, Beam Delivery System and Method of Generating a Beam of Light App 20080225921 - Kuss; Matthias ; et al.	2008-09-18
Device And Method For Influencing The Polarization Distribution In An Optical System App 20080218725 - Fiolka; Damian	2008-09-11
Illumination system and polarizer for a microlithographic projection exposure apparatus Grant 7,408,622 - Fiolka , et al. August 5, 2	2008-08-05
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 7,408,616 - Gruner , et al. August 5, 2	2008-08-05
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus Grant 7,405,808 - Gruner , et al. July 29, 2	2008-07-29
Method And A Device For Processing Birefringent And/or Optically Active Materials And Phase Plate App 20080151245 - Fiolka; Damian	2008-06-26
Polarized radiation in lithographic apparatus and device manufacturing method App 20080143992 - Wagner; Christian ; et al.	2008-06-19
Apparatus For Providing A Pattern Of Polarization App 20080130109 - Albert; Michael ; et al.	2008-06-05
Filter Device for the Compensation of an Asymmetric Pupil Illumination App 20080113281 - Maul; Manfred ; et al.	2008-05-15
Instrument For Measuring The Angular Distribution Of Light Produced By An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20080079939 - Fiolka; Damian ; et al.	2008-04-03
Polarized radiation in lithographic apparatus and device manufacturing method Grant 7,345,740 - Wagner , et al. March 18, 2	2008-03-18
Subsystem Of An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20080055580 - Fiolka; Damian	2008-03-06
Polarized radiation in lithographic apparatus and device manufacturing method Grant 7,312,852 - Wagner , et al. December 25, 2	2007-12-25
Illumination System For A Microlithography Projection Exposure Installation App 20070279535 - Fiolka; Damian	2007-12-06
Transmission Filter Apparatus App 20070279613 - Fiolka; Damian ; et al.	2007-12-06
Illumination System for a Microlithography Projection Exposure Installation App 20070263199 - Fiolka; Damian ; et al.	2007-11-15
Optical System Of An Illumination Device Of A Projection Exposure Apparatus App 20070217013 - Schuster; Karl-Heinz ; et al.	2007-09-20
Illumination system for a microlithographic projection exposure apparatus App 20070206171 - Fiolka; Damian ; et al.	2007-09-06
System for reducing the coherence of laser radiation App 20070206381 - Fiolka; Damian ; et al.	2007-09-06
Illumination system for a microlithography projection exposure installation App 20070165202 - Koehler; Jess ; et al.	2007-07-19
Polarization-modulating optical element App 20070081114 - Fiolka; Damian ; et al.	2007-04-12
Optical element for use in lithography apparatus and method of conditioning radiation beam App 20070058151 - Eurlings; Markus Franciscus Antonius ; et al.	2007-03-15
Microlithographic projection exposure apparatus with immersion projection lens App 20070024837 - Fiolka; Damian	2007-02-01
Polarization-modulating optical element App 20070019179 - Fiolka; Damian ; et al.	2007-01-25
Illumination System Of A Microlithographic Projection Exposure Apparatus, And Depolarizer App 20070014504 - Fiolka; Damian	2007-01-18
Polarization-modulating optical element App 20060291057 - Fiolka; Damian ; et al.	2006-12-28
Illumination system for a microlithographic projection exposure apparatus App 20060268251 - Deguenther; Markus ; et al.	2006-11-30
Fly's eye condenser and illumination system therewith App 20060221453 - Koehler; Jess ; et al.	2006-10-05
Method for improving the optical polarization properties of a microlithographic projection exposure apparatus App 20060204204 - Zenzinger; Markus ; et al.	2006-09-14
Projection exposure apparatus App 20060170895 - Fiolka; Damian	2006-08-03
Optical beam transformation system and illumination system comprising an optical beam transformation system App 20060146384 - Schultz; Joerg ; et al.	2006-07-06
Polarized radiation in lithographic apparatus and device manufacturing method App 20060139612 - Wagner; Christian ; et al.	2006-06-29
Polarized radiation in lithographic apparatus and device manufacturing method App 20060139611 - Wagner; Christian ; et al.	2006-06-29
Illumination system for a microlithographic projection exposure apparatus App 20060055909 - Fiolka; Damian ; et al.	2006-03-16
Retardation plate App 20060014048 - Fiolka; Damian	2006-01-19
Illumination system having a light mixer for the homogenization of radiation distributions App 20050280821 - Fiolka, Damian ; et al.	2005-12-22
Optical system of a microlithographic projection exposure apparatus App 20050243222 - Maul, Manfred ; et al.	2005-11-03
Optical unit for an illumination system of a microlithographic projection exposure apparatus App 20050237623 - Fiolka, Damian ; et al.	2005-10-27
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus App 20050152046 - Gruner, Toralf ; et al.	2005-07-14
Microlithographic exposure method as well as a projection exposure system for carrying out the method App 20050146704 - Gruner, Toralf ; et al.	2005-07-07
Illumination system and polarizer for a microlithographic projection exposure apparatus App 20050140958 - Fiolka, Damian ; et al.	2005-06-30
Optical system with birefringent optical elements App 20050094268 - Fiolka, Damian ; et al.	2005-05-05
Sensor for determining radiated energy and use thereof App 20050042140 - Fiolka, Damian	2005-02-24
Retardation element made from cubic crystal and an optical system therewith App 20040218271 - Hartmaier, Juergen ; et al.	2004-11-04