Patent | Date |
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A Patterning Device And Method Of Use Thereof App 20220121105 - VAN LARE; Marie-Claire ;   et al. | 2022-04-21 |
Patterning stack optimization Grant 10,775,705 - Tel , et al. Sept | 2020-09-15 |
Patterning device Grant 10,732,498 - De Groot , et al. | 2020-08-04 |
Methods for providing lithography features on a substrate by self-assembly of block copolymers Grant 10,551,736 - Finders , et al. Fe | 2020-02-04 |
Patterning Device App 20190324365 - DE GROOT; Pieter Cristiaan ;   et al. | 2019-10-24 |
Patterning device Grant 10,401,723 - De Groot , et al. Sep | 2019-09-03 |
Patterning Stack Optimization App 20190204749 - TEL; Wim Tjibbo ;   et al. | 2019-07-04 |
Method for a lithographic apparatus Grant 10,331,042 - De Winter , et al. | 2019-06-25 |
Patterning Device App 20190137861 - DE GROOT; Pieter Cristiaan ;   et al. | 2019-05-09 |
Method to provide a patterned orientation template for a self-assemblable polymer Grant 10,240,250 - Nguyen , et al. | 2019-03-26 |
Method And Apparatus For Using Patterning Device Topography Induced Phase App 20170336712 - FINDERS; Jozef Maria | 2017-11-23 |
Method And Apparatus For Using Patterning Device Topography Induced Phase App 20170329231 - FINDERS; Jozef Maria | 2017-11-16 |
Determination and application of non-monotonic dose sensitivity Grant 9,811,002 - Finders November 7, 2 | 2017-11-07 |
Method And Apparatus For Using Patterning Device Topography Induced Phase App 20170315441 - FINDERS; Jozef Maria | 2017-11-02 |
Method And Apparatus For Using Patterning Device Topography Induced Phase App 20170285483 - FINDERS; Jozef Maria | 2017-10-05 |
Method And Apparatus For Using Patterning Device Topography Induced Phase App 20170269480 - FINDERS; Jozef Maria | 2017-09-21 |
Method For A Lithographic Apparatus App 20170010542 - De Winter; Laurentius Cornelius ;   et al. | 2017-01-12 |
Method for a lithographic apparatus Grant 9,535,341 - De Winter , et al. January 3, 2 | 2017-01-03 |
Lithographic mask, lithographic apparatus and method Grant 9,513,109 - Finders December 6, 2 | 2016-12-06 |
Methods of providing patterned epitaxy templates for self-assemblable block copolymers for use in device lithography Grant 9,513,553 - Wuister , et al. December 6, 2 | 2016-12-06 |
Determination And Application Of Non-monotonic Dose Sensitivity App 20160179016 - FINDERS; Jozef Maria | 2016-06-23 |
Lithographic apparatus and device manufacturing method Grant 9,285,685 - Streefkerk , et al. March 15, 2 | 2016-03-15 |
Methods of providing patterned templates for self-assemblable block copolymers for use in device lithography Grant 9,229,324 - Singh , et al. January 5, 2 | 2016-01-05 |
Lithographic apparatus and methods for determining an improved configuration of a lithographic apparatus Grant 9,229,336 - Finders , et al. January 5, 2 | 2016-01-05 |
Methods For Providing Spaced Lithography Features On A Substrate By Self-assembly Of Block Copolymers App 20150380299 - FINDERS; Jozef Maria ;   et al. | 2015-12-31 |
Method of optimizing a lithographic process, device manufacturing method, lithographic apparatus, computer program product and simulation apparatus Grant 9,170,502 - Finders October 27, 2 | 2015-10-27 |
Methods For Providing Lithography Features On A Substrate By Self-assembly Of Block Copolymers App 20150205197 - Finders; Jozef Maria ;   et al. | 2015-07-23 |
Lithographic Mask, Lithographic Apparatus And Method App 20150138568 - FINDERS; Jozef Maria | 2015-05-21 |
Lithographic mask, lithographic apparatus and method Grant 8,974,989 - Finders March 10, 2 | 2015-03-10 |
Methods Of Providing Patterned Epitaxy Templates For Self-assemblable Block Copolymers For Use In Device Lithography App 20150050599 - Wuister; Sander Frederik ;   et al. | 2015-02-19 |
Methods Of Providing Patterned Templates For Self-assemblable Block Copolymers For Use In Device Lithography App 20150034594 - Singh; Harmeet ;   et al. | 2015-02-05 |
Lithographic Apparatus And Device Manufacturing Method App 20140293248 - STREEFKERK; Bob ;   et al. | 2014-10-02 |
Method To Provide A Patterned Orientation Template For A Self-assemblable Polymer App 20140245948 - Nguyen; Thanh Trung ;   et al. | 2014-09-04 |
Lithographic method and arrangement for manufacturing a spacer Grant 8,786,833 - Nikolsky , et al. July 22, 2 | 2014-07-22 |
Method for a lithographic apparatus Grant 8,780,325 - Colina Santamaria , et al. July 15, 2 | 2014-07-15 |
Lithographic apparatus and device manufacturing method Grant 8,711,330 - Streefkerk , et al. April 29, 2 | 2014-04-29 |
Optimization method and a lithographic cell Grant 8,612,045 - Mos , et al. December 17, 2 | 2013-12-17 |
Lithographic Apparatus And Device Manufacturing Method App 20130222779 - FINDERS; Jozef Maria | 2013-08-29 |
Lithographic Mask, Lithographic Apparatus And Method App 20130183611 - FINDERS; Jozef Maria | 2013-07-18 |
Method for a lithographic apparatus Grant 8,426,088 - De Winter , et al. April 23, 2 | 2013-04-23 |
Lithographic apparatus and device manufacturing method Grant 8,416,394 - Finders April 9, 2 | 2013-04-09 |
Device manufacturing method and lithographic apparatus Grant 8,300,212 - De Winter , et al. October 30, 2 | 2012-10-30 |
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby Grant RE43,643 - Finders September 11, 2 | 2012-09-11 |
Method For A Lithographic Apparatus App 20120200838 - De Winter; Laurentius Cornelius ;   et al. | 2012-08-09 |
Lithographic Apparatus And Methods For Determining An Improved Configuration Of A Lithographic Apparatus App 20120194797 - FINDERS; Jozef Maria ;   et al. | 2012-08-02 |
Lithographic Apparatus And Device Manufacturing Method App 20120182534 - FINDERS; Jozef Maria | 2012-07-19 |
Method for a lithographic apparatus Grant 8,178,263 - De Winter , et al. May 15, 2 | 2012-05-15 |
Method Of Optimizing A Lithographic Process, Device Manufacturing Method, Lithographic Apparatus, Computer Program Product And Simulation Apparatus App 20120099091 - Finders; Jozef Maria | 2012-04-26 |
Lithographic apparatus and device manufacturing method Grant 8,164,741 - Finders April 24, 2 | 2012-04-24 |
Method of designing sets of mask patterns, sets of mask patterns, and device manufacturing method Grant 8,142,964 - De Putter , et al. March 27, 2 | 2012-03-27 |
Lithographic Apparatus And Device Manufacturing Method App 20110211182 - FINDERS; Jozef Maria | 2011-09-01 |
Lithographic Apparatus And Device Manufacturing Method App 20110211181 - STREEFKERK; Bob ;   et al. | 2011-09-01 |
Lithographic apparatus and device manufacturing method Grant 7,982,856 - Finders July 19, 2 | 2011-07-19 |
Lithographic apparatus and device manufacturing method Grant 7,961,293 - Streefkerk , et al. June 14, 2 | 2011-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,961,296 - Finders June 14, 2 | 2011-06-14 |
Lithographic Method And Arrangement App 20100310836 - Nikolski; Pioter ;   et al. | 2010-12-09 |
Method of patterning a positive tone resist layer overlaying a lithographic substrate Grant 7,824,842 - Finders November 2, 2 | 2010-11-02 |
Device Manufacturing Method And Lithographic Apparatus App 20100265479 - DE WINTER; Laurentius Cornelius ;   et al. | 2010-10-21 |
Method of patterning a positive tone resist layer overlaying a lithographic substrate Grant 7,811,746 - Finders October 12, 2 | 2010-10-12 |
Optimization Method and a Lithographic Cell App 20100161099 - Mos; Everhardus Cornelis ;   et al. | 2010-06-24 |
Method For A Lithographic Apparatus App 20100149508 - Colina Santamaria; Luis Alberto ;   et al. | 2010-06-17 |
Method for exposing a substrate and lithographic projection apparatus Grant 7,732,110 - Finders , et al. June 8, 2 | 2010-06-08 |
Method For A Lithographic Apparatus App 20100129742 - DE WINTER; Laurentius Cornelis ;   et al. | 2010-05-27 |
Method For A Lithographic Apparatus App 20100123887 - DE WINTER; Laurentius Cornelius ;   et al. | 2010-05-20 |
Method for exposing a substrate and lithographic projection apparatus Grant 7,670,731 - Finders , et al. March 2, 2 | 2010-03-02 |
Method for exposing a substrate and lithographic projection apparatus Grant 7,655,368 - Finders , et al. February 2, 2 | 2010-02-02 |
Method of Designing Sets of Mask Patterns, Sets of Mask Patterns, and Device Manufacturing Method App 20100021827 - DE PUTTER; Sander ;   et al. | 2010-01-28 |
Lithographic Apparatus And Device Manufacturing Method App 20090316125 - FINDERS; Jozef Maria | 2009-12-24 |
Lithographic Apparatus And Device Manufacturing Method App 20090296060 - Finders; Jozef Maria | 2009-12-03 |
Method For Exposing A Substrate And Lithographic Projection Apparatus App 20090190115 - FINDERS; Jozef Maria ;   et al. | 2009-07-30 |
Marker Structure, Mask Pattern, Alignment Method, And Lithographic Method And Apparatus App 20090073406 - Finders; Jozef Maria ;   et al. | 2009-03-19 |
Lithographic apparatus and device manufacturing method Grant 7,491,478 - Buurman , et al. February 17, 2 | 2009-02-17 |
Correction of optical proximity effects by intensity modulation of an illumination arrangement Grant 7,471,375 - Finders , et al. December 30, 2 | 2008-12-30 |
Marker structure, mask pattern, alignment method and lithographic method and apparatus Grant 7,466,413 - Finders , et al. December 16, 2 | 2008-12-16 |
Device manufacturing method, computer program product and lithographic apparatus Grant 7,456,931 - De Winter , et al. November 25, 2 | 2008-11-25 |
Method of determining an illumination profile and device manufacturing method Grant 7,425,397 - Finders , et al. September 16, 2 | 2008-09-16 |
Device manufacturing method, computer program product and lithographic apparatus App 20080170212 - De Winter; Laurentius Cornelius ;   et al. | 2008-07-17 |
Lithographic apparatus and device manufacturing method App 20080170215 - Streefkerk; Bob ;   et al. | 2008-07-17 |
Lithographic apparatus and method of reducing thermal distortion Grant 7,359,029 - Finders , et al. April 15, 2 | 2008-04-15 |
Lithographic apparatus and device manufacturing method Grant 7,352,435 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
Device manufacturing method, mask set for use in the method, data set for controlling a programmable patterning device, method of generating a mask pattern and a computer program Grant 7,316,870 - Eurlings , et al. January 8, 2 | 2008-01-08 |
Device manufacturing method, computer program product and lithographic apparatus Grant 7,307,690 - De Winter , et al. December 11, 2 | 2007-12-11 |
Lithographic apparatus and method of reducing thermal distortion App 20070273851 - Finders; Jozef Maria ;   et al. | 2007-11-29 |
Enhanced lithographic resolution through double exposure App 20070258073 - Finders; Jozef Maria ;   et al. | 2007-11-08 |
Method and apparatus for controlling iso-dense bias in lithography Grant 7,256,870 - Finders August 14, 2 | 2007-08-14 |
Enhanced lithographic resolution through double exposure Grant 7,256,873 - Finders , et al. August 14, 2 | 2007-08-14 |
Method for exposing a substrate and lithographic projection apparatus App 20070099100 - Finders; Jozef Maria ;   et al. | 2007-05-03 |
Method of patterning a positive tone resist layer overlaying a lithographic substrate App 20070077526 - Finders; Jozef Maria | 2007-04-05 |
Method of patterning a positive tone resist layer overlaying a lithographic substrate App 20070077523 - Finders; Jozef Maria | 2007-04-05 |
Method of determining an illumination profile and device manufacturing method App 20070059614 - Finders; Jozef Maria ;   et al. | 2007-03-15 |
Correction of optical proximity effects by intensity modulation of an illumination arrangement App 20060192935 - Hansen; Steven George ;   et al. | 2006-08-31 |
Method and apparatus for controlling iso-dense bias in lithography App 20060170898 - Finders; Jozef Maria | 2006-08-03 |
Lithographic apparatus and device manufacturing method App 20060017906 - Buurman; Erik Petrus ;   et al. | 2006-01-26 |
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby Grant 6,977,714 - Finders December 20, 2 | 2005-12-20 |
Modification of an image of a pattern during an imaging process App 20050210438 - Verstappen, Leonardus Henricus Marie ;   et al. | 2005-09-22 |
Lithographic apparatus and device manufacturing method App 20050174550 - Streefkerk, Bob ;   et al. | 2005-08-11 |
Enhanced lithographic resolution through double exposure App 20050162627 - Finders, Jozef Maria ;   et al. | 2005-07-28 |
Lithographic apparatus and methods, patterning structure and method for making a patterning structure, device manufacturing method, and device manufactured thereby App 20050136340 - Baselmans, Johannes Jacobus Matheus ;   et al. | 2005-06-23 |
Method for exposing a substrate and lithographic projection apparatus App 20050100831 - Finders, Jozef Maria ;   et al. | 2005-05-12 |
Marker structure, mask pattern, alignment method and lithographic method and apparatus App 20050031969 - Finders, Jozef Maria ;   et al. | 2005-02-10 |
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby App 20050024616 - Finders, Jozef Maria | 2005-02-03 |
Device manufacturing method, mask set for use in the method, data set for controlling a programmable patterning device, method of generating a mask pattern and a computer program App 20050005257 - Eurlings, Markus Franciscus Antonius ;   et al. | 2005-01-06 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,809,797 - Baselmans , et al. October 26, 2 | 2004-10-26 |
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby Grant 6,795,163 - Finders September 21, 2 | 2004-09-21 |
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby App 20020154281 - Finders, Jozef Maria | 2002-10-24 |