Patent | Date |
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Charged particle beam device with retarding field analyzer Grant 8,203,119 - Degenhardt , et al. June 19, 2 | 2012-06-19 |
Focussing lens for charged particle beams Grant 7,652,263 - Feuerbaum January 26, 2 | 2010-01-26 |
Imaging system with multi source array Grant 7,638,777 - Feuerbaum , et al. December 29, 2 | 2009-12-29 |
Apparatus and method for inspecting a sample of a specimen by means of an electron beam Grant 7,586,093 - Feuerbaum September 8, 2 | 2009-09-08 |
Charged Particle Beam Device With Retarding Field Analyzer App 20090200463 - Degenhardt; Ralf ;   et al. | 2009-08-13 |
Focussing Lens for Charged Particle Beams App 20070262255 - Feuerbaum; Hans-Peter | 2007-11-15 |
Charged particle beam apparatus and method for operating the same Grant 7,274,018 - Adamec , et al. September 25, 2 | 2007-09-25 |
Apparatus and method for inspecting a sample of a specimen by means of an electron beam App 20070057182 - Feuerbaum; Hans-Peter | 2007-03-15 |
Imaging system with multi source array App 20060237659 - Feuerbaum; Hans Peter ;   et al. | 2006-10-26 |
Charged particle beam apparatus and method for operating the same App 20060192145 - Adamec; Pavel ;   et al. | 2006-08-31 |
Charged particle beam microscope with minicolumn Grant 7,075,092 - Winkler , et al. July 11, 2 | 2006-07-11 |
Charged particle beam apparatus and method for operating the same Grant 7,045,781 - Adamec , et al. May 16, 2 | 2006-05-16 |
Multi beam charged particle device Grant 6,943,349 - Adamec , et al. September 13, 2 | 2005-09-13 |
Optical column for charged particle beam device Grant 6,936,817 - Feuerbaum August 30, 2 | 2005-08-30 |
Charged particle beam microscope with minicolumn App 20040195522 - Winkler, Dieter ;   et al. | 2004-10-07 |
Charged particle beam apparatus and method for operating the same App 20040169141 - Adamec, Pavel ;   et al. | 2004-09-02 |
Charged particle beam microscope with minicolumn Grant 6,740,889 - Winkler , et al. May 25, 2 | 2004-05-25 |
Charged particle device Grant 6,730,907 - Feuerbaum , et al. May 4, 2 | 2004-05-04 |
Multi beam charged particle device App 20030168606 - Adamec, Pavel ;   et al. | 2003-09-11 |
Optical column for charged particle beam device App 20030155521 - Feuerbaum, Hans-Peter | 2003-08-21 |
Method and device for focusing a charged particle beam Grant 6,555,824 - Feuerbaum , et al. April 29, 2 | 2003-04-29 |
Apparatus and method for examining specimen with a charged particle beam Grant 6,555,815 - Feuerbaum , et al. April 29, 2 | 2003-04-29 |
Apparatus And Method For Examing Specimen With A Charged Particle Beam App 20020053638 - WINKLER, DIETER ;   et al. | 2002-05-09 |
Device for corpuscular-optical examination and/or processing of material samples Grant 5,329,125 - Feuerbaum July 12, 1 | 1994-07-12 |
Method of operating an electron beam measuring device Grant 5,041,724 - Feuerbaum , et al. August 20, 1 | 1991-08-20 |
Detector objective for particle beam apparatus Grant 4,831,266 - Frosien , et al. May 16, 1 | 1989-05-16 |
Spectrometer objective for particle beam measuring instruments Grant 4,812,651 - Feuerbaum , et al. March 14, 1 | 1989-03-14 |
Method and apparatus for locating defects in an electrical circuit with a light beam Grant 4,733,176 - Feuerbaum March 22, 1 | 1988-03-22 |
Scanning particle microscope Grant 4,713,543 - Feuerbaum , et al. December 15, 1 | 1987-12-15 |
Method for automatically setting the voltage resolution in particle beam measuring devices and apparatus for implementation thereof Grant 4,686,466 - Feuerbaum , et al. August 11, 1 | 1987-08-11 |
Opposing field spectrometer for electron beam mensuration technology Grant 4,683,376 - Feuerbaum July 28, 1 | 1987-07-28 |
Secondary electron spectrometer for measuring voltages on a sample utilizing an electron probe Grant 4,514,682 - Feuerbaum April 30, 1 | 1985-04-30 |
Electron beam testing device for stroboscopic measurement of high-frequency, periodic events Grant 4,486,660 - Feuerbaum December 4, 1 | 1984-12-04 |
Arrangement for stroboscopic potential measurements with an electron beam testing device Grant 4,413,181 - Feuerbaum November 1, 1 | 1983-11-01 |
Techniques for impressing a voltage with an electron beam Grant 4,296,372 - Feuerbaum October 20, 1 | 1981-10-20 |
Method for the contactless measurement of the potential waveform in an electronic component and apparatus for implementing the method Grant 4,220,854 - Feuerbaum September 2, 1 | 1980-09-02 |
Apparatus for keying in electron beams Grant 4,169,229 - Feuerbaum September 25, 1 | 1979-09-25 |