Patent | Date |
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Large-grain tin sputtering target Grant 11,450,516 - Ruggiero , et al. September 20, 2 | 2022-09-20 |
ECAE materials for high strength aluminum alloys Grant 11,421,311 - Ferrasse , et al. August 23, 2 | 2022-08-23 |
Frictionless forged aluminum alloy sputtering target with improved properties Grant 11,359,273 - Ferrasse , et al. June 14, 2 | 2022-06-14 |
Profiled Sputtering Target And Method Of Making The Same App 20220139685 - Lin; Shih-Yao ;   et al. | 2022-05-05 |
ECAE materials for high strength aluminum alloys Grant 11,248,286 - Ferrasse , et al. February 15, 2 | 2022-02-15 |
Profiled sputtering target and method of making the same Grant 11,244,815 - Lin , et al. February 8, 2 | 2022-02-08 |
Method of forming copper alloy sputtering targets with refined shape and microstructure Grant 11,035,036 - Ferrasse , et al. June 15, 2 | 2021-06-15 |
Ecae Materials For High Strength Aluminum Alloys App 20210054490 - Ferrasse; Stephane ;   et al. | 2021-02-25 |
Large-grain Tin Sputtering Target App 20210050194 - Ruggiero; Marc D. ;   et al. | 2021-02-18 |
High strength aluminum alloy backing plate and methods of making Grant 10,900,102 - Ferrasse , et al. January 26, 2 | 2021-01-26 |
ECAE materials for high strength aluminum alloys Grant 10,851,447 - Ferrasse , et al. December 1, 2 | 2020-12-01 |
Copper manganese sputtering target Grant 10,760,156 - Ferrasse , et al. Sep | 2020-09-01 |
Ecae Materials For High Strength Aluminum Alloys App 20200270730 - Ferrasse; Stephane ;   et al. | 2020-08-27 |
Ecae Processing For High Strength And High Hardness Aluminum Alloys App 20200131611 - Ferrasse; Stephane ;   et al. | 2020-04-30 |
Method Of Forming Copper Alloy Sputtering Targets With Refined Shape And Microstructure App 20190233935 - Ferrasse; Stephane ;   et al. | 2019-08-01 |
Copper Manganese Sputtering Target App 20190112702 - Ferrasse; Stephane ;   et al. | 2019-04-18 |
Sputter Target Backing Plate Assemblies With Cooling Structures App 20180323047 - Strothers; Susan D. ;   et al. | 2018-11-08 |
Profiled Sputtering Target And Method Of Making The Same App 20180308671 - Lin; Shih-Yao ;   et al. | 2018-10-25 |
Frictionless Forged Aluminum Alloy Sputtering Target With Improved Properties App 20180223420 - Ferrasse; Stephane ;   et al. | 2018-08-09 |
Heat Treatment Methods For Metal And Metal Alloy Preparation App 20180202039 - Ferrasse; Stephane ;   et al. | 2018-07-19 |
Ecae Materials For High Strength Aluminum Alloys App 20180155812 - Ferrasse; Stephane ;   et al. | 2018-06-07 |
Ecae Materials For High Strength Aluminum Alloys App 20180155811 - Ferrasse; Stephane ;   et al. | 2018-06-07 |
High Strength Aluminum Alloy Backing Plate And Methods Of Making App 20180094340 - Ferrasse; Stephane ;   et al. | 2018-04-05 |
Sputtering Target Assembly Having A Graded Interlayer And Methods Of Making App 20170287685 - Ferrasse; Stephane ;   et al. | 2017-10-05 |
Target designs and related methods for coupled target assemblies, methods of production and uses thereof Grant 8,702,919 - Ferrasse , et al. April 22, 2 | 2014-04-22 |
Angular Extrusion Of Copper Alloy Anodes App 20120155501 - Ferrasse; Stephane ;   et al. | 2012-06-21 |
Copper sputtering targets and methods of forming copper sputtering targets Grant 7,767,043 - Segal , et al. August 3, 2 | 2010-08-03 |
Target assemblies, targets, backing plates, and methods of target cooling Grant 7,691,240 - Hort , et al. April 6, 2 | 2010-04-06 |
Copper Sputtering Targets and Methods of Forming Copper Sputtering Targets App 20100059147 - Segal; Vladimir M. ;   et al. | 2010-03-11 |
Physical vapor deposition target constructions Grant 7,618,520 - Wu , et al. November 17, 2 | 2009-11-17 |
Target Designs And Related Methods For Coupled Target Assemblies, Methods Of Production And Uses Thereof App 20090045051 - Ferrasse; Stephane ;   et al. | 2009-02-19 |
Copper Sputtering Targets and Methods of Forming Copper Sputtering Targets App 20090020192 - Segal; Vladimir M. ;   et al. | 2009-01-22 |
Hollow cathode magnetron sputtering targets and methods of forming hollow cathode magnetron sputtering targets App 20070251819 - Kardokus; Janine K. ;   et al. | 2007-11-01 |
High-strength mechanical and structural components, and methods of making high-strength components App 20070084527 - Ferrasse; Stephane ;   et al. | 2007-04-19 |
Target assemblies, targets, backing plates, and methods of target cooling App 20060260936 - Hort; Werner H. ;   et al. | 2006-11-23 |
Physical vapor deposition target constructions App 20060070876 - Wu; Chi tse ;   et al. | 2006-04-06 |
Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions Grant 7,017,382 - Segal , et al. March 28, 2 | 2006-03-28 |
Physical vapor deposition targets, and methods of fabricating metallic materials Grant 6,946,039 - Segal , et al. September 20, 2 | 2005-09-20 |
Methods of fabricating metallic materials Grant 6,908,517 - Segal , et al. June 21, 2 | 2005-06-21 |
Sputtering targets formed from cast materials Grant 6,878,250 - Segal , et al. April 12, 2 | 2005-04-12 |
Thin films and methods of forming thin films utilizing ECAE-targets App 20040256218 - Glass, Howard L. ;   et al. | 2004-12-23 |
Methods of fabricating articles and sputtering targets Grant 6,723,187 - Segal , et al. April 20, 2 | 2004-04-20 |
Copper sputtering targets and methods of forming copper sputtering targets App 20040072009 - Segal, Vladimir M. ;   et al. | 2004-04-15 |
Fine grain size material, sputtering target, methods of forming, and micro-arc reduction method App 20030052000 - Segal, Vladimir ;   et al. | 2003-03-20 |
Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions App 20020174916 - Segal, Vladimir M. ;   et al. | 2002-11-28 |
Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions App 20020174917 - Segal, Vladimir M. ;   et al. | 2002-11-28 |
Methods for controlling the texture of alloys utilizing equal channel angular extrusion App 20020007880 - Segal, Vladimir ;   et al. | 2002-01-24 |
Alloys formed from cast materials utilizing equal channel angular extrusion App 20020000272 - Segal, Vladimir ;   et al. | 2002-01-03 |
Methods of fabricating articles and sputtering targets App 20010054457 - Segal, Vladimir ;   et al. | 2001-12-27 |
Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions App 20010047838 - Segal, Vladimir M. ;   et al. | 2001-12-06 |