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Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration Grant 10,846,442 - Ye , et al. November 24, 2 | 2020-11-24 |
Methods and systems for pattern design with tailored response to wavefront aberration Grant 10,423,075 - Feng , et al. Sept | 2019-09-24 |
Computation pipeline of single-pass multiple variant calls Grant 10,424,395 - Ye , et al. Sept | 2019-09-24 |
Computation pipeline of location-dependent variant calls Grant 10,424,396 - Ye , et al. Sept | 2019-09-24 |
Optimization flows of source, mask and projection optics Grant 10,401,732 - Hsu , et al. Sep | 2019-09-03 |
Method and system for lithography process-window-maximizing optical proximity correction Grant 10,310,371 - Ye , et al. | 2019-06-04 |
Methods and system for model-based generic matching and tuning Grant 10,169,522 - Cao , et al. J | 2019-01-01 |
Methods And Systems For Parameter-sensitive And Orthogonal Gauge Design For Lithography Calibration App 20180322224 - Ye; Jun ;   et al. | 2018-11-08 |
Smart selection and/or weighting of parameters for lithographic process simulation Grant 10,025,198 - Cao , et al. July 17, 2 | 2018-07-17 |
Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration Grant 10,025,885 - Ye , et al. July 17, 2 | 2018-07-17 |
Methods for performing model-based lithography guided layout design Grant 9,779,186 - Ye , et al. October 3, 2 | 2017-10-03 |
Optimization Flows Of Source, Mask And Projection Optics App 20170176864 - HSU; Duan-Fu ;   et al. | 2017-06-22 |
Optimization of source, mask and projection optics Grant 9,619,603 - Feng , et al. April 11, 2 | 2017-04-11 |
Optimization flows of source, mask and projection optics Grant 9,588,438 - Hsu , et al. March 7, 2 | 2017-03-07 |
Computation Pipeline Of Location-dependent Variant Calls App 20160283655 - Ye; Jun ;   et al. | 2016-09-29 |
Computation Pipeline Of Single-pass Multiple Variant Calls App 20160283654 - Ye; Jun ;   et al. | 2016-09-29 |
Method And System For Lithography Process-window-maximizing Optical Proximity Correction App 20160246168 - YE; Jun ;   et al. | 2016-08-25 |
Methods and systems for lithography process window simulation Grant 9,390,206 - Ye , et al. July 12, 2 | 2016-07-12 |
Pattern-independent and hybrid matching/tuning including light manipulation by projection optics Grant 9,378,309 - Feng , et al. June 28, 2 | 2016-06-28 |
Method and system for lithography process-window-maximixing optical proximity correction Grant 9,360,766 - Ye , et al. June 7, 2 | 2016-06-07 |
Methods And Systems For Parameter-sensitive And Orthogonal Gauge Design For Lithography Calibration App 20150186557 - YE; Jun ;   et al. | 2015-07-02 |
Methods And Systems For Pattern Design With Tailored Response To Wavefront Aberration App 20150153651 - FENG; Hanying ;   et al. | 2015-06-04 |
Methods and systems for lithography calibration using a mathematical model for a lithographic process Grant 9,009,647 - Ye , et al. April 14, 2 | 2015-04-14 |
Optimization Of Source, Mask And Projection Optics App 20150074622 - Feng; Hanying ;   et al. | 2015-03-12 |
Methods And System For Model-based Generic Matching And Tuning App 20150074619 - CAO; Yu ;   et al. | 2015-03-12 |
Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration Grant 8,930,172 - Ye , et al. January 6, 2 | 2015-01-06 |
Methods and systems for pattern design with tailored response to wavefront aberration Grant 8,918,742 - Feng , et al. December 23, 2 | 2014-12-23 |
Methods and system for model-based generic matching and tuning Grant 8,893,058 - Cao , et al. November 18, 2 | 2014-11-18 |
Optimization of source, mask and projection optics Grant 8,893,060 - Feng , et al. November 18, 2 | 2014-11-18 |
Methods For Performing Model-based Lithography Guided Layout Design App 20140317580 - YE; Jun ;   et al. | 2014-10-23 |
Pattern-independent And Hybrid Matching/tuning Including Light Manipulation By Projection Optics App 20140282303 - FENG; Hanying ;   et al. | 2014-09-18 |
Pattern-dependent proximity matching/tuning including light manipulation by projection optics Grant 8,806,394 - Feng , et al. August 12, 2 | 2014-08-12 |
Pattern-independent and hybrid matching/tuning including light manipulation by projection optics Grant 8,745,551 - Feng , et al. June 3, 2 | 2014-06-03 |
Methods for performing model-based lithography guided layout design Grant 8,732,625 - Ye , et al. May 20, 2 | 2014-05-20 |
Pattern-dependent Proximity Matching/tuning Including Light Manipulation By Projection Optics App 20140033145 - FENG; Hanying ;   et al. | 2014-01-30 |
Content-based Targeted Online Advertisement App 20140012671 - Ye; Jun ;   et al. | 2014-01-09 |
Content-based Bidding In Online Advertising App 20140012672 - Ye; Jun ;   et al. | 2014-01-09 |
Methods And Systems For Lithography Process Window Simulation App 20140005998 - YE; Jun ;   et al. | 2014-01-02 |
Pattern-dependent proximity matching/tuning including light manipulation by projection optics Grant 8,560,978 - Feng , et al. October 15, 2 | 2013-10-15 |
Methods And System For Model-based Generic Matching And Tuning App 20130263064 - CAO; Yu ;   et al. | 2013-10-03 |
Illumination optimization Grant 8,542,340 - Ye , et al. September 24, 2 | 2013-09-24 |
Methods And Systems For Lithography Calibration App 20130232457 - YE; Jun ;   et al. | 2013-09-05 |
Methods and systems for lithography process window simulation Grant 8,527,255 - Ye , et al. September 3, 2 | 2013-09-03 |
Methods and system for model-based generic matching and tuning Grant 8,443,307 - Cao , et al. May 14, 2 | 2013-05-14 |
Methods and system for lithography calibration Grant 8,418,088 - Ye , et al. April 9, 2 | 2013-04-09 |
Sentiment-targeting For Online Advertisement App 20130066716 - Chen; Luoqi ;   et al. | 2013-03-14 |
Method Of Attention-targeting For Online Advertisement App 20130041750 - YE; Jun ;   et al. | 2013-02-14 |
Methods and Systems for Pattern Design with Tailored Response to Wavefront Aberration App 20130014065 - Feng; Hanying ;   et al. | 2013-01-10 |
Methods and Systems for Lithography Process Window Simulation App 20120253774 - Ye; Jun ;   et al. | 2012-10-04 |
Methods and system for lithography process window simulation Grant 8,200,468 - Ye , et al. June 12, 2 | 2012-06-12 |
Pattern-Independent and Hybrid Matching/Tuning Including Light Manipulation by Projection Optics App 20120124529 - Feng; Hanying ;   et al. | 2012-05-17 |
Optimization of Source, Mask and Projection Optics App 20120117522 - Feng; Hanying ;   et al. | 2012-05-10 |
Pattern-Dependent Proximity Matching/Tuning Including Light Manipulation By Projection Optics App 20120117521 - Feng; Hanying ;   et al. | 2012-05-10 |
Optimization Flows of Source, Mask and Projection Optics App 20120113404 - Hsu; Duan-Fu ;   et al. | 2012-05-10 |
Methods and Systems for Parameter-Sensitive and Orthogonal Gauge Design for Lithography Calibration App 20110224956 - Ye; Jun ;   et al. | 2011-09-15 |
Illumination Optimization App 20110116067 - Ye; Jun ;   et al. | 2011-05-19 |
System and method for model-based sub-resolution assist feature generation Grant 7,882,480 - Ye , et al. February 1, 2 | 2011-02-01 |
Methods For Performing Model-based Lithography Guided Layout Design App 20100203430 - Ye; Jun ;   et al. | 2010-08-12 |
Method And System For Lithography Process-window-maximixing Optical Proximity Correction App 20100162197 - YE; Jun ;   et al. | 2010-06-24 |
Methods And System For Model-based Generic Matching And Tuning App 20100146475 - Cao; Yu ;   et al. | 2010-06-10 |
Methods And System For Lithography Calibration App 20100119961 - YE; Jun ;   et al. | 2010-05-13 |
Methods and system for lithography process window simulation App 20090157360 - Ye; Jun ;   et al. | 2009-06-18 |
System And Method For Model-based Sub-resolution Assist Feature Generation App 20080301620 - Ye; Jun ;   et al. | 2008-12-04 |