Patent | Date |
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Abrasives for chemical mechanical polishing Grant 7,087,188 - Cadien , et al. August 8, 2 | 2006-08-08 |
Chemical mechanical polish slurry App 20060124592 - Miller; Anne E. ;   et al. | 2006-06-15 |
Novel slurry for chemical mechanical polishing of metals App 20060099817 - Feller; A. Daniel ;   et al. | 2006-05-11 |
Novel slurry for chemical mechanical polishing of metals App 20060097347 - Feller; A. Daniel ;   et al. | 2006-05-11 |
High pH slurry for chemical mechanical polishing of copper Grant 6,909,193 - Miller , et al. June 21, 2 | 2005-06-21 |
Abrasives for chemical mechanical polishing Grant 6,881,674 - Cadien , et al. April 19, 2 | 2005-04-19 |
Novel slurry for chemical mechanical polishing of metals App 20050070109 - Feller, A. Daniel ;   et al. | 2005-03-31 |
High Ph Slurry For Chemical Mechanical Polishing Of Copper App 20050017367 - Miller, Anne E. ;   et al. | 2005-01-27 |
High PH slurry for chemical mechanical polishing of copper Grant 6,825,117 - Miller , et al. November 30, 2 | 2004-11-30 |
Ceric-ion slurry for use in chemical-mechanical polishing App 20040203227 - Miller, Anne E. ;   et al. | 2004-10-14 |
Ceric-ion slurry for use in chemical-mechanical polishing App 20040203245 - Miller, Anne E. ;   et al. | 2004-10-14 |
Ceric-ion slurry for use in chemical-mechanical polishing Grant 6,752,844 - Miller , et al. June 22, 2 | 2004-06-22 |
Slurry and method for chemical mechanical polishing of copper Grant 6,740,591 - Miller , et al. May 25, 2 | 2004-05-25 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing Grant 6,719,614 - Miller , et al. April 13, 2 | 2004-04-13 |
Slurry and method for chemical mechanical polishing of copper App 20030211745 - Miller, Anne E. ;   et al. | 2003-11-13 |
Abrasives for chemical mechanical polishing App 20030143851 - Cadien, Kenneth C. ;   et al. | 2003-07-31 |
High Ph Slurry For Chemical Mechanical Polishing Of Copper App 20030134512 - MILLER, ANNE E. ;   et al. | 2003-07-17 |
Abrasives For Chemical Mechanical Polishing App 20030129838 - CADIEN, KENNETH C. ;   et al. | 2003-07-10 |
Slurry and method for chemical mechanical polishing of copper App 20020177316 - Miller, Anne E. ;   et al. | 2002-11-28 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing Grant 6,443,814 - Miller , et al. September 3, 2 | 2002-09-03 |
Method And Chemistry For Cleaning Of Oxidized Copper During Chemical Mechanical Polishing App 20020106976 - Miller, Anne E. ;   et al. | 2002-08-08 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing App 20020107155 - Miller, Anne E. ;   et al. | 2002-08-08 |
Method And Chemistry For Cleaning Of Oxidized Copper During Chemical Mechanical Polishing App 20020102922 - Miller, Anne E. ;   et al. | 2002-08-01 |
Ceric-ion Slurry For Use In Chemical-mechanical Polishing App 20020053656 - MILLER, ANNE E. ;   et al. | 2002-05-09 |
Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide Grant 5,700,383 - Feller , et al. December 23, 1 | 1997-12-23 |