| Patent | Date |
|---|
Method For Measuring And Correcting Misregistration Between Layers In A Semiconductor Device, And Misregistration Targets Useful Therein
App 20220199437 - Volkovich; Roie ; et al. | 2022-06-23 |
Imaging Overlay Targets Using Moire Elements And Rotational Symmetry Arrangements
App 20220171297 - Feler; Yoel ; et al. | 2022-06-02 |
Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein
Grant 11,302,544 - Volkovich , et al. April 12, 2 | 2022-04-12 |
Imaging overlay targets using Moire elements and rotational symmetry arrangements
Grant 11,256,177 - Feler , et al. February 22, 2 | 2022-02-22 |
Metrology Target For One-dimensional Measurement Of Periodic Misregistration
App 20210381825 - Feler; Yoel ; et al. | 2021-12-09 |
Periodic semiconductor device misregistration metrology system and method
Grant 11,182,892 - Michelsson , et al. November 23, 2 | 2021-11-23 |
Misregistration metrology by using fringe Moire and optical Moire effects
Grant 11,164,307 - Feler , et al. November 2, 2 | 2021-11-02 |
Metrology Methods And Optical Schemes For Measurement Of Misregistration By Using Hatched Target Designs
App 20210333218 - Feler; Yoel | 2021-10-28 |
Metrology Target For Scanning Metrology
App 20210311401 - Hill; Andrew V. ; et al. | 2021-10-07 |
Metrology targets and methods with oblique periodic structures
Grant 11,137,692 - Feler , et al. October 5, 2 | 2021-10-05 |
Multi-layered Moire Targets And Methods For Using The Same In Measuring Misregistration Of Semiconductor Devices
App 20210233821 - FELER; Yoel ; et al. | 2021-07-29 |
Metrology target for scanning metrology
Grant 11,073,768 - Hill , et al. July 27, 2 | 2021-07-27 |
Improved Self-moire Grating Design For Use In Metrology
App 20210200106 - Levinski; Vladimir ; et al. | 2021-07-01 |
Accuracy Improvements In Optical Metrology
App 20210175132 - Bringoltz; Barak ; et al. | 2021-06-10 |
Reduction Or Elimination Of Pattern Placement Error In Metrology Measurements
App 20210149296 - Feler; Yoel ; et al. | 2021-05-20 |
Periodic Semiconductor Device Misregistration Metrology System and Method
App 20210082099 - Michelsson; Detlef ; et al. | 2021-03-18 |
Imaging Overlay Targets Using Moire Elements and Rotational Symmetry Arrangements
App 20210072650 - Feler; Yoel ; et al. | 2021-03-11 |
Determining the impacts of stochastic behavior on overlay metrology data
Grant 10,901,325 - Gurevich , et al. January 26, 2 | 2021-01-26 |
Metrology Target for Scanning Metrology
App 20200409271 - Hill; Andrew V. ; et al. | 2020-12-31 |
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
Grant 10,831,108 - Marciano , et al. November 10, 2 | 2020-11-10 |
Estimation of asymmetric aberrations
Grant 10,824,082 - Feler , et al. November 3, 2 | 2020-11-03 |
Method For Measuring And Correcting Misregistration Between Layers In A Semiconductor Device, And Misregistration Targets Useful Therein
App 20200312687 - Volkovich; Roie ; et al. | 2020-10-01 |
Reticle optimization algorithms and optimal target design
Grant 10,754,261 - Feler , et al. A | 2020-08-25 |
Estimation Of Asymmetric Aberrations
App 20200133135 - Feler; Yoel ; et al. | 2020-04-30 |
Metrology Targets And Methods With Oblique Periodic Structures
App 20200124982 - Feler; Yoel ; et al. | 2020-04-23 |
Symmetric target design in scatterometry overlay metrology
Grant 10,591,406 - Bringoltz , et al. | 2020-03-17 |
Reduction Or Elimination Of Pattern Placement Error In Metrology Measurements
App 20190250504 - Feler; Yoel ; et al. | 2019-08-15 |
Method and system for selection of metrology targets for use in focus and dose applications
Grant 10,340,196 - Volkovich , et al. | 2019-07-02 |
Near field metrology
Grant 10,261,014 - Sapiens , et al. | 2019-04-16 |
Method, system, and user interface for metrology target characterization
Grant 10,242,290 - Tarshish-Shapir , et al. | 2019-03-26 |
Determining The Impacts Of Stochastic Behavior On Overlay Metrology Data
App 20190049858 - GUREVICH; Evgeni ; et al. | 2019-02-14 |
Focus metrology and targets which utilize transformations based on aerial images of the targets
Grant 10,197,922 - Gutman , et al. Fe | 2019-02-05 |
Reticle Optimization Algorithms and Optimal Target Design
App 20180348648 - Feler; Yoel ; et al. | 2018-12-06 |
Focus measurements using scatterometry metrology
Grant 9,934,353 - El Kodadi , et al. April 3, 2 | 2018-04-03 |
Accuracy Improvements In Optical Metrology
App 20180047646 - Bringoltz; Barak ; et al. | 2018-02-15 |
Approach for model calibration used for focus and dose measurement
Grant 9,841,689 - Levinski , et al. December 12, 2 | 2017-12-12 |
Symmetric target design in scatterometry overlay metrology
Grant 9,739,702 - Bringoltz , et al. August 22, 2 | 2017-08-22 |
Focus Metrology and Targets Which Utilize Transformations Based on Aerial Images of the Targets
App 20170212427 - Gutman; Nadav ; et al. | 2017-07-27 |
Phase characterization of targets
Grant 9,581,430 - Manassen , et al. February 28, 2 | 2017-02-28 |
Methods Of Analyzing And Utilizing Landscapes To Reduce Or Eliminate Inaccuracy In Overlay Optical Metrology
App 20160313658 - Marciano; Tal ; et al. | 2016-10-27 |
Method and system for providing a target design displaying high sensitivity to scanner focus change
Grant 9,454,072 - Levinski , et al. September 27, 2 | 2016-09-27 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20160216197 - Bringoltz; Barak ; et al. | 2016-07-28 |
Focus Measurements Using Scatterometry Metrology
App 20160103946 - El Kodadi; Mohamed ; et al. | 2016-04-14 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20150204664 - Bringoltz; Barak ; et al. | 2015-07-23 |
Near Field Metrology
App 20150198524 - Sapiens; Noam ; et al. | 2015-07-16 |
Method and System for Providing a Target Design Displaying High Sensitivity to Scanner Focus Change
App 20140141536 - Levinski; Vladimir ; et al. | 2014-05-22 |
Metrology Target Characterization
App 20140136137 - Tarshish-Shapir; Inna ; et al. | 2014-05-15 |
Phase Characterization Of Targets
App 20140111791 - Manassen; Amnon ; et al. | 2014-04-24 |
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