Patent | Date |
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System and method for defect detection using multi-spot scanning Grant 11,385,188 - Shoham , et al. July 12, 2 | 2022-07-12 |
Inspection of a three dimensional structure of a sample using a phase shift mask Grant 11,270,432 - Feldman , et al. March 8, 2 | 2022-03-08 |
Inspection Of A Three Dimensional Structure Of A Sample Using A Phase Shift Mask App 20220058784 - Feldman; Haim ;   et al. | 2022-02-24 |
Computerized system and method for obtaining information about a region of an object Grant 10,902,582 - Feldman , et al. January 26, 2 | 2021-01-26 |
Multi-perspective Wafer Analysis App 20200400589 - FELDMAN; Haim ;   et al. | 2020-12-24 |
Computerized System And Method For Obtaining Information About A Region Of An Object App 20200234418 - FELDMAN; Haim ;   et al. | 2020-07-23 |
Multi-perspective Wafer Analysis App 20200232934 - FELDMAN; Haim ;   et al. | 2020-07-23 |
Asymmetrical magnification inspection system and illumination module Grant 10,481,101 - Feldman , et al. Nov | 2019-11-19 |
System and method for defect detection using multi-spot scanning Grant 10,386,311 - Shoham , et al. A | 2019-08-20 |
Near-field sensor height control Grant 10,060,736 - Sagiv , et al. August 28, 2 | 2018-08-28 |
Asymmetrical Magnification Inspection System And Illumination Module App 20180209915 - Feldman; Haim ;   et al. | 2018-07-26 |
Evaluation system and a method for evaluating a substrate Grant 9,835,563 - Uziel , et al. December 5, 2 | 2017-12-05 |
System and method for defect detection using multi-spot scanning Grant 9,810,643 - Shoham , et al. November 7, 2 | 2017-11-07 |
Systems And Methods For Inspecting An Object App 20170016834 - Feldman; Haim ;   et al. | 2017-01-19 |
Systems and methods for inspecting an object Grant 9,535,014 - Feldman , et al. January 3, 2 | 2017-01-03 |
On-tool wavefront aberrations measurement system and method Grant 9,395,266 - Golberg , et al. July 19, 2 | 2016-07-19 |
Evaluation System And A Method For Evaluating A Substrate App 20160077016 - Uziel; Yoram ;   et al. | 2016-03-17 |
On-tool Wavefront Aberrations Measurement System And Method App 20150300913 - Golberg; Boris ;   et al. | 2015-10-22 |
Inspection method and an inspection system exhibiting speckle reduction characteristics Grant 9,012,875 - Shoham , et al. April 21, 2 | 2015-04-21 |
Inspection Method And An Inspection System Exhibiting Speckle Reduction Characteristics App 20140299790 - Shoham; Amir ;   et al. | 2014-10-09 |
Inspection system and method for fast changes of focus Grant 8,659,754 - Feldman , et al. February 25, 2 | 2014-02-25 |
Inspection System And Method For Fast Changes Of Focus App 20130342893 - Feldman; Haim ;   et al. | 2013-12-26 |
Inspection system and method for fast changes of focus Grant 8,488,117 - Feldman , et al. July 16, 2 | 2013-07-16 |
Scanning microscopy using inhomogeneous polarization Grant 8,228,601 - Meshulach , et al. July 24, 2 | 2012-07-24 |
Inspection System And Method For Fast Changes Of Focus App 20120086937 - Feldman; Haim ;   et al. | 2012-04-12 |
Illumination system for optical inspection Grant 8,134,699 - Naftali , et al. March 13, 2 | 2012-03-13 |
Illumination System For Optical Inspection App 20110170090 - Naftali; Ron ;   et al. | 2011-07-14 |
High resolution wafer inspection system Grant 7,973,919 - Grossman , et al. July 5, 2 | 2011-07-05 |
Illumination system for optical inspection Grant 7,924,419 - Naftali , et al. April 12, 2 | 2011-04-12 |
High Resolution Wafer Inspection System App 20100188658 - Grossman; Dan ;   et al. | 2010-07-29 |
High resolution wafer inspection system Grant 7,714,999 - Grossman , et al. May 11, 2 | 2010-05-11 |
Illumination System For Optical Inspection App 20100097680 - Naftali; Ron ;   et al. | 2010-04-22 |
Scanning microscopy Grant 7,684,048 - Meshulach , et al. March 23, 2 | 2010-03-23 |
Simulation of aerial images Grant 7,634,754 - Feldman December 15, 2 | 2009-12-15 |
Illumination system for optical inspection Grant 7,630,069 - Naftali , et al. December 8, 2 | 2009-12-08 |
Scanning Microscopy Using Inhomogeneous Polarization App 20090284835 - Meshulach; Doron ;   et al. | 2009-11-19 |
Simulation of aerial images Grant 7,620,932 - Feldman November 17, 2 | 2009-11-17 |
One-dimensional phase contrast microscopy with a traveling lens generated by a step function change Grant 7,576,348 - Feldman , et al. August 18, 2 | 2009-08-18 |
High throughput inspection system and a method for generating transmitted and/or reflected images Grant 7,518,718 - Elyasaf , et al. April 14, 2 | 2009-04-14 |
High Resolution Wafer Inspection System App 20080231845 - Grossman; Dan ;   et al. | 2008-09-25 |
Simulation Of Aerial Images App 20080152234 - Feldman; Haim | 2008-06-26 |
Simulation Of Aerial Images App 20080152212 - Feldman; Haim | 2008-06-26 |
Printer and a method for recording a multi-level image Grant 7,379,161 - Almogy , et al. May 27, 2 | 2008-05-27 |
One-dimensional Phase Contrast Microscopy App 20080116362 - Feldman; Haim ;   et al. | 2008-05-22 |
Methods and systems for optical inspection of surfaces based on laser screening Grant 7,342,218 - Almogy , et al. March 11, 2 | 2008-03-11 |
Dark field inspection system Grant 7,339,661 - Korngut , et al. March 4, 2 | 2008-03-04 |
Simulation of aerial images Grant 7,331,033 - Feldman February 12, 2 | 2008-02-12 |
Laser scanner with amplitude and phase detection Grant 7,286,239 - Feldman October 23, 2 | 2007-10-23 |
Scanning Microscopy App 20070109546 - Meshulach; Doron ;   et al. | 2007-05-17 |
High throughput inspection system and method for generating transmitted and/or reflected images Grant 7,187,439 - Elyasaf , et al. March 6, 2 | 2007-03-06 |
Illumination system for optical inspection App 20070008519 - Naftali; Ron ;   et al. | 2007-01-11 |
High Throughput Inspection System and a Method for Generating Transmitted and/or Reflected Images App 20060221331 - Elyasaf; Emanuel ;   et al. | 2006-10-05 |
Printer and a method for recording a multi-level image App 20060197931 - Almogy; Gilad ;   et al. | 2006-09-07 |
Wafer defect detection system with traveling lens multi-beam scanner Grant 7,053,395 - Feldman , et al. May 30, 2 | 2006-05-30 |
Printer and a method for recording a multi-level image Grant 7,053,985 - Almogy , et al. May 30, 2 | 2006-05-30 |
System and method for inspection of a substrate that has a refractive index Grant 7,030,978 - Guetta , et al. April 18, 2 | 2006-04-18 |
Simulation of aerial images App 20060048090 - Feldman; Haim | 2006-03-02 |
Dual-spot phase-sensitive detection Grant 7,002,695 - Feldman February 21, 2 | 2006-02-21 |
High throughput inspection system and method for generating transmitted and/or reflected images App 20050270521 - Elyasaf, Emanuel ;   et al. | 2005-12-08 |
Dark field inspection system App 20050219518 - Korngut, Doron ;   et al. | 2005-10-06 |
Apparatus and method for dual spot inspection of repetitive patterns Grant 6,943,898 - Libinson , et al. September 13, 2 | 2005-09-13 |
Laser scanner with amplitude and phase detection Grant 6,937,343 - Feldman August 30, 2 | 2005-08-30 |
Laser scanner with amplitude and phase detection App 20050179907 - Feldman, Haim | 2005-08-18 |
High throughput inspection system and method for generating transmitted and/or reflected images Grant 6,930,770 - Elyasaf , et al. August 16, 2 | 2005-08-16 |
Wafer defect detection system with traveling lens multi-beam scanner Grant 6,853,475 - Feldman , et al. February 8, 2 | 2005-02-08 |
System and method for inspection of a substrate that has a refractive index App 20040246474 - Guetta, Avishay ;   et al. | 2004-12-09 |
Wafer defect detection system with traveling lens multi-beam scanner Grant 6,809,808 - Feldman , et al. October 26, 2 | 2004-10-26 |
Dynamic automatic focusing method and apparatus using interference patterns Grant 6,794,625 - Feldman September 21, 2 | 2004-09-21 |
Eliminating coherence effects in bright-field laser imaging App 20040119001 - Almogy, Gilad ;   et al. | 2004-06-24 |
Focus error detection apparatus and method having dual focus error detection path Grant 6,750,436 - Feldman , et al. June 15, 2 | 2004-06-15 |
Wafer defect detection system with traveling lens multi-beam scanner App 20040080740 - Feldman, Haim ;   et al. | 2004-04-29 |
Wafer defect detection system with traveling lens multi-beam scanner App 20040075068 - Feldman, Haim ;   et al. | 2004-04-22 |
Laser scanner with amplitude and phase detection App 20040042014 - Feldman, Haim | 2004-03-04 |
High throughput inspection system and method for generating transmitted and/or reflected images App 20040027563 - Elyasaf, Emanuel ;   et al. | 2004-02-12 |
Focus Error Detection Apparatus And Method App 20040007659 - Feldman, Haim ;   et al. | 2004-01-15 |
Scanning angle expander and a method for expanding a scanning beam angle Grant 6,671,098 - Feldman December 30, 2 | 2003-12-30 |
Scanning Angle Expander And A Method For Expanding A Scanning Beam Angle App 20030214723 - Feldman, Haim | 2003-11-20 |
Dual-spot phase-sensitive detection App 20030210405 - Feldman, Haim | 2003-11-13 |
Apparatus and method for dual spot inspection of repetitive patterns App 20030210402 - Libinson, Alexander ;   et al. | 2003-11-13 |
Wafer defect detection system with traveling lens multi-beam scanner App 20030179369 - Feldman, Haim ;   et al. | 2003-09-25 |
Focus error correction method and apparatus App 20020171028 - Feldman, Haim | 2002-11-21 |
Focus error correction method and apparatus Grant 6,124,924 - Feldman , et al. September 26, 2 | 2000-09-26 |