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Stepped indirectly heated cathode with improved shielding
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Stepped Indirectly Heated Cathode With Improved Shielding
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Wafer cooling system and method
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Wafer Cooling Method
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Wafer cooling apparatus and method
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Optical heat source with restricted wavelengths for process heating
Grant 9,842,752 - Bernhardt , et al. December 12, 2 | 2017-12-12 |
Wafer Cooling Method
App 20170352544 - Farley; Marvin ; et al. | 2017-12-07 |
Bipolar wafer charge monitor system and ion implantation system comprising same
Grant 9,558,914 - Farley , et al. January 31, 2 | 2017-01-31 |
Bipolar Wafer Charge Monitor System And Ion Implantation System Comprising Same
App 20160247664 - Farley; Marvin ; et al. | 2016-08-25 |
Ion implantation system and method with variable energy control
Grant 9,218,941 - Jen , et al. December 22, 2 | 2015-12-22 |
Ion Implantation System and Method with Variable Energy Control
App 20150200073 - Jen; Causon Ko-Chuan ; et al. | 2015-07-16 |
Optical Heat Source With Restricted Wavelengths For Process Heating
App 20150037983 - Bernhardt; David ; et al. | 2015-02-05 |
Low-inertia multi-axis multi-directional mechanically scanned ion implantation system
Grant 8,227,768 - Smick , et al. July 24, 2 | 2012-07-24 |
Dose Measurement Method using Calorimeter
App 20120161037 - Farley; Marvin | 2012-06-28 |
Ion beam angle calibration and emittance measurement system for ribbon beams
Grant 8,168,941 - Farley , et al. May 1, 2 | 2012-05-01 |
Post-decel magnetic energy filter for ion implantation systems
Grant 8,124,946 - Ryding , et al. February 28, 2 | 2012-02-28 |
Post Implant Wafer Heating Using Light
App 20110291022 - Lee; William D. ; et al. | 2011-12-01 |
Ion beam monitoring arrangement
App 20110042578 - Murrell; Adrian ; et al. | 2011-02-24 |
Ion beam guide tube
Grant 7,872,247 - Ryding , et al. January 18, 2 | 2011-01-18 |
Ion Beam Angle Calibration And Emittance Measurement System For Ribbon Beams
App 20100181470 - Farley; Marvin ; et al. | 2010-07-22 |
Low-inertia Multi-axis Multi-directional Mechanically Scanned Ion Implantation System
App 20090321631 - Smick; Theodore ; et al. | 2009-12-31 |
Post-decel Magnetic Energy Filter For Ion Implantation Systems
App 20090321630 - Ryding; Geoffrey ; et al. | 2009-12-31 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,611,975 - Murrell , et al. November 3, 2 | 2009-11-03 |
Method of scanning a substrate in an ion implanter
Grant 7,582,883 - Ryding , et al. September 1, 2 | 2009-09-01 |
Ion beam guide tube
App 20090095916 - Ryding; Geoffrey ; et al. | 2009-04-16 |
Ion beam diagnostics
Grant 7,479,644 - Ryding , et al. January 20, 2 | 2009-01-20 |
Ion beam monitoring arrangement
App 20080169435 - Sakase; Takao ; et al. | 2008-07-17 |
Method of scanning a substrate in an ion implanter
App 20080169434 - Ryding; Geoffrey ; et al. | 2008-07-17 |
Ion beam diagnostics
App 20080142727 - Ryding; Geoffrey ; et al. | 2008-06-19 |
Shaped apertures in an ion implanter
App 20080099696 - Ryding; Geoffrey ; et al. | 2008-05-01 |
Method Of Implanting A Substrate And An Ion Implanter For Performing The Method
App 20070259511 - Murrell; Adrian ; et al. | 2007-11-08 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,282,427 - Murrell , et al. October 16, 2 | 2007-10-16 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,253,424 - Murrell , et al. August 7, 2 | 2007-08-07 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,235,797 - Murrell , et al. June 26, 2 | 2007-06-26 |
Method of implanting a substrate and an ion implanter for performing the method
App 20070105355 - Murrell; Adrian ; et al. | 2007-05-10 |
Method of implanting a substrate and an ion implanter for performing the method
App 20060197016 - Murrell; Adrian ; et al. | 2006-09-07 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,049,210 - Murrell , et al. May 23, 2 | 2006-05-23 |
SIMOX using controlled water vapor for oxygen implants
Grant 6,989,315 - Dolan , et al. January 24, 2 | 2006-01-24 |
Method of implanting a substrate and an ion implanter for performing the method
App 20050269527 - Murrell, Adrian ; et al. | 2005-12-08 |
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor
Grant 6,956,223 - Smick , et al. October 18, 2 | 2005-10-18 |
Ion beam monitoring arrangement
App 20050191409 - Murrell, Adrian ; et al. | 2005-09-01 |
Ion implantation
App 20050181584 - Foad, Majeed ; et al. | 2005-08-18 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 6,908,836 - Murrell , et al. June 21, 2 | 2005-06-21 |
Indirectly heated button cathode for an ion source
Grant 6,878,946 - Farley , et al. April 12, 2 | 2005-04-12 |
Ion implant dose control
Grant 6,870,170 - Farley , et al. March 22, 2 | 2005-03-22 |
Method of implanting a substrate and an ion implanter for performing the method
App 20040191931 - Murrell, Adrian ; et al. | 2004-09-30 |
Indirectly heated button cathode for an ion source
App 20040061068 - Farley, Marvin ; et al. | 2004-04-01 |
Method of implanting a substrate and an ion implanter for performing the method
App 20040058513 - Murrell, Adrian ; et al. | 2004-03-25 |
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor
App 20030192474 - Smick, Theodore H. ; et al. | 2003-10-16 |
Indirectly heated button cathode for an ion source
App 20030168609 - Farley, Marvin ; et al. | 2003-09-11 |
Determining beam alignment in ion implantation using Rutherford Back Scattering
Grant 6,555,832 - Ryding , et al. April 29, 2 | 2003-04-29 |
Ion extraction assembly
Grant 6,501,078 - Ryding , et al. December 31, 2 | 2002-12-31 |
Simox using controlled water vapor for oxygen implants
App 20020016046 - Dolan, Robert ; et al. | 2002-02-07 |
Ion implant dose control
Grant 6,297,510 - Farley October 2, 2 | 2001-10-02 |
Fluid bearing vacuum seal assembly
Grant 6,274,875 - Smick , et al. August 14, 2 | 2001-08-14 |
Ion implantation with charge neutralization
Grant 6,271,529 - Farley , et al. August 7, 2 | 2001-08-07 |
SIMOX using controlled water vapor for oxygen implants
Grant 6,248,642 - Dolan , et al. June 19, 2 | 2001-06-19 |
Method and apparatus for controlling a workpiece in a vacuum chamber
Grant 6,163,033 - Smick , et al. December 19, 2 | 2000-12-19 |
Method and apparatus for controlling a workpiece in a vacuum chamber
Grant 5,898,179 - Smick , et al. April 27, 1 | 1999-04-27 |
Treating work pieces with electro-magnetically scanned ion beams
Grant 4,804,852 - Rose , et al. February 14, 1 | 1989-02-14 |
Ion implantation surface charge control method and apparatus
Grant 4,804,837 - Farley February 14, 1 | 1989-02-14 |
Charge density detector for beam implantation
Grant 4,675,530 - Rose , et al. June 23, 1 | 1987-06-23 |
Dose control apparatus
Grant 4,587,433 - Farley May 6, 1 | 1986-05-06 |
Dose control method
Grant 4,539,217 - Farley September 3, 1 | 1985-09-03 |
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