Falter; Manfred
Patent Applications and Registrations
Patent applications and USPTO patent grants for Falter; Manfred.The latest application filed is for "apparatus for thermally treating semiconductor substrates".
- Falter; Manfred - Ulm DE
| Patent | Date |
|---|---|
| Apparatus for thermally treating semiconductor substrates Grant 8,450,652 - Falter May 28, 2 | 2013-05-28 |
| Method and system for thermally processing a plurality of wafer-shaped objects Grant 7,977,258 - Nenyei , et al. July 12, 2 | 2011-07-12 |
| Apparatus For Thermally Treating Semiconductor Substrates App 20090139977 - Falter; Manfred ; et al. | 2009-06-04 |
| Method and system for thermally processing a plurality of wafer-shaped objects App 20080248657 - Nenyei; Zsolt ; et al. | 2008-10-09 |
| Device for thermally treating substrates Grant 6,965,093 - Falter November 15, 2 | 2005-11-15 |
| Device for thermally treating substrates App 20040089649 - Falter, Manfred | 2004-05-13 |
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