Patent | Date |
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Confocal wafer inspection system and method Grant 7,858,911 - Fairley , et al. December 28, 2 | 2010-12-28 |
High throughput brightfield/darkfield water inspection system using advanced optical techniques Grant 7,554,655 - Fairley , et al. June 30, 2 | 2009-06-30 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,522,275 - Fairley , et al. April 21, 2 | 2009-04-21 |
Confocal wafer inspection system and method App 20080273196 - Fairley; Christopher R. ;   et al. | 2008-11-06 |
High throughput brightfield/darkfield water inspection system using advanced optical techniques App 20080225298 - Fairley; Christopher R. ;   et al. | 2008-09-18 |
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 7,399,950 - Fairley , et al. July 15, 2 | 2008-07-15 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,379,173 - Fairley , et al. May 27, 2 | 2008-05-27 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20080007726 - Fairley; Christopher R. ;   et al. | 2008-01-10 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,259,844 - Fairley , et al. August 21, 2 | 2007-08-21 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20070115461 - Fairley; Christopher R. ;   et al. | 2007-05-24 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,164,475 - Fairley , et al. January 16, 2 | 2007-01-16 |
Confocal wafer inspection method and apparatus using fly lens arrangement App 20070007429 - Fairley; Christopher R. ;   et al. | 2007-01-11 |
Confocal wafer depth scanning inspection method Grant 7,109,458 - Fairley , et al. September 19, 2 | 2006-09-19 |
Confocal wafer inspection method and apparatus App 20050156098 - Fairley, Christopher R. ;   et al. | 2005-07-21 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techiques App 20050062962 - Fairley, Christopher R. ;   et al. | 2005-03-24 |
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 6,867,406 - Fairley , et al. March 15, 2 | 2005-03-15 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20040252297 - Fairley, Christopher R. ;   et al. | 2004-12-16 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,816,249 - Fairley , et al. November 9, 2 | 2004-11-09 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20020118359 - Fairley, Christopher R. ;   et al. | 2002-08-29 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,288,780 - Fairley , et al. September 11, 2 | 2001-09-11 |
Laser imaging system for inspection and analysis of sub-micron particles Grant 5,963,314 - Worster , et al. October 5, 1 | 1999-10-05 |
Method and apparatus for automatically focusing a microscope Grant 5,783,814 - Fairley , et al. July 21, 1 | 1998-07-21 |
Method and apparatus for automatic focusing of a confocal laser microscope Grant 5,672,861 - Fairley , et al. September 30, 1 | 1997-09-30 |
Laser imaging system for inspection and analysis of sub-micron particles Grant 5,479,252 - Worster , et al. December 26, 1 | 1995-12-26 |
Phase measurement system using a dithered clock Grant 5,019,786 - Fairley , et al. May 28, 1 | 1991-05-28 |