Fairley; Christopher R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fairley; Christopher R..The latest application filed is for "confocal wafer inspection system and method".

Company Profile

0.16.9

Fairley; Christopher R. - San Jose CA
Fairley; Christopher R - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Confocal wafer inspection system and method Grant 7,858,911 - Fairley , et al. December 28, 2	2010-12-28
High throughput brightfield/darkfield water inspection system using advanced optical techniques Grant 7,554,655 - Fairley , et al. June 30, 2	2009-06-30
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,522,275 - Fairley , et al. April 21, 2	2009-04-21
Confocal wafer inspection system and method App 20080273196 - Fairley; Christopher R. ; et al.	2008-11-06
High throughput brightfield/darkfield water inspection system using advanced optical techniques App 20080225298 - Fairley; Christopher R. ; et al.	2008-09-18
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 7,399,950 - Fairley , et al. July 15, 2	2008-07-15
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,379,173 - Fairley , et al. May 27, 2	2008-05-27
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20080007726 - Fairley; Christopher R. ; et al.	2008-01-10
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,259,844 - Fairley , et al. August 21, 2	2007-08-21
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20070115461 - Fairley; Christopher R. ; et al.	2007-05-24
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,164,475 - Fairley , et al. January 16, 2	2007-01-16
Confocal wafer inspection method and apparatus using fly lens arrangement App 20070007429 - Fairley; Christopher R. ; et al.	2007-01-11
Confocal wafer depth scanning inspection method Grant 7,109,458 - Fairley , et al. September 19, 2	2006-09-19
Confocal wafer inspection method and apparatus App 20050156098 - Fairley, Christopher R. ; et al.	2005-07-21
High throughput brightfield/darkfield wafer inspection system using advanced optical techiques App 20050062962 - Fairley, Christopher R. ; et al.	2005-03-24
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 6,867,406 - Fairley , et al. March 15, 2	2005-03-15
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20040252297 - Fairley, Christopher R. ; et al.	2004-12-16
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,816,249 - Fairley , et al. November 9, 2	2004-11-09
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20020118359 - Fairley, Christopher R. ; et al.	2002-08-29
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,288,780 - Fairley , et al. September 11, 2	2001-09-11
Laser imaging system for inspection and analysis of sub-micron particles Grant 5,963,314 - Worster , et al. October 5, 1	1999-10-05
Method and apparatus for automatically focusing a microscope Grant 5,783,814 - Fairley , et al. July 21, 1	1998-07-21
Method and apparatus for automatic focusing of a confocal laser microscope Grant 5,672,861 - Fairley , et al. September 30, 1	1997-09-30
Laser imaging system for inspection and analysis of sub-micron particles Grant 5,479,252 - Worster , et al. December 26, 1	1995-12-26
Phase measurement system using a dithered clock Grant 5,019,786 - Fairley , et al. May 28, 1	1991-05-28

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