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Patent applications and USPTO patent grants for Fahrni; Francis.The latest application filed is for "lithographic apparatus, method of transferring a substrate and device manufacturing method".
Patent | Date |
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Lithographic apparatus, method of transferring a substrate and device manufacturing method Grant 10,916,453 - Van Beuzekom , et al. February 9, 2 | 2021-02-09 |
Lithographic Apparatus, Method Of Transferring A Substrate And Device Manufacturing Method App 20190391499 - VAN BEUZEKOM; Aart Adrianus ;   et al. | 2019-12-26 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method Grant 10,409,174 - Van Beuzekom , et al. Sept | 2019-09-10 |
Lithographic Apparatus App 20180299796 - NAKIBOGLU; Gunes ;   et al. | 2018-10-18 |
Lithographic Apparatus, Method Of Transferring A Substrate And Device Manufacturing Method App 20170108781 - VAN BEUZEKOM; Aart Adrianus ;   et al. | 2017-04-20 |
Lithographic apparatus and method Grant 8,610,878 - Baselmans , et al. December 17, 2 | 2013-12-17 |
Lithographic Apparatus and Method App 20110216297 - BASELMANS; Johannes Jacobus Matheus ;   et al. | 2011-09-08 |
Microfluidic System Based On Actuator Elements App 20100212762 - Den Toonder; Jacob M. J. ;   et al. | 2010-08-26 |
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