| Patent | Date |
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Removal Of Stray Ruthenium Metal Nuclei For Selective Ruthenium Metal Layer Formation
App 20220254683 - Zandi; Omid ; et al. | 2022-08-11 |
Dynamically Adjusted Purge Timing In Wet Atomic Layer Etching
App 20220254646 - Faguet; Jacques ; et al. | 2022-08-11 |
Implementing the post-porosity plasma protection (P4) process using I-CVD
Grant 11,371,143 - Lionti , et al. June 28, 2 | 2022-06-28 |
Selective Etching with Fluorine, Oxygen and Noble Gas Containing Plasmas
App 20220199418 - Zhang; Du ; et al. | 2022-06-23 |
Methods For Etching A Substrate Using A Hybrid Wet Atomic Layer Etching Process
App 20220148882 - Abel; Paul ; et al. | 2022-05-12 |
Systems For Etching A Substrate Using A Hybrid Wet Atomic Layer Etching Process
App 20220148885 - Abel; Paul ; et al. | 2022-05-12 |
Etching Method And Etching Apparatus
App 20220102160 - TAHARA; Shigeru ; et al. | 2022-03-31 |
Plasma etching method
Grant 11,120,999 - Yatsuda , et al. September 14, 2 | 2021-09-14 |
Method For Using Ultra-thin Etch Stop Layers In Selective Atomic Layer Etching
App 20210242031 - Zandi; Omid ; et al. | 2021-08-05 |
Roughness reduction methods for materials using illuminated etch solutions
Grant 10,896,824 - Zandi , et al. January 19, 2 | 2021-01-19 |
Implementing The Post-porosity Plasma Protection (p4) Process Using I-cvd
App 20200378001 - Lionti; Krystelle ; et al. | 2020-12-03 |
Plasma Etching Method
App 20200381264 - YATSUDA; Koichi ; et al. | 2020-12-03 |
Photo-assisted chemical vapor etch for selective removal of ruthenium
Grant 10,818,512 - Zandi , et al. October 27, 2 | 2020-10-27 |
Photo-assisted Chemical Vapor Etch For Selective Removal Of Ruthenium
App 20200243346 - Zandi; Omid ; et al. | 2020-07-30 |
Roughness Reduction Methods For Materials Using Illuminated Etch Solutions
App 20200194278 - Zandi; Omid ; et al. | 2020-06-18 |
Processing Systems And Platforms For Roughness Reduction Of Materials Using Illuminated Etch Solutions
App 20200075351 - Zandi; Omid ; et al. | 2020-03-05 |
Method for depositing a planarization layer using polymerization chemical vapor deposition
Grant 10,115,586 - Faguet , et al. October 30, 2 | 2018-10-30 |
Atomic Layer Etching Systems And Methods
App 20170345665 - FAGUET; Jacques ; et al. | 2017-11-30 |
Method For Depositing A Planarization Layer Using Polymerization Chemical Vapor Deposition
App 20170323784 - Faguet; Jacques ; et al. | 2017-11-09 |
Method For Coating Or Filling A Porous Material
App 20170037509 - Faguet; Jacques ; et al. | 2017-02-09 |
Vapor Deposition System And Method Of Operating
App 20160024651 - Faguet; Jacques | 2016-01-28 |
Chemical vapor deposition method
Grant 9,212,420 - Lee , et al. December 15, 2 | 2015-12-15 |
Vapor deposition system
Grant 9,157,152 - Faguet , et al. October 13, 2 | 2015-10-13 |
Method for chemical vapor deposition control
Grant 9,139,910 - Lee , et al. September 22, 2 | 2015-09-22 |
Method And Device For Controlling Pattern And Structure Formation By An Electric Field
App 20150152556 - Brcka; Jozef ; et al. | 2015-06-04 |
Method and device for controlling pattern and structure formation by an electric field
Grant 8,916,055 - Brcka , et al. December 23, 2 | 2014-12-23 |
Dielectric treatment module using scanning IR radiation source
Grant 8,895,942 - Liu , et al. November 25, 2 | 2014-11-25 |
Apparatus for chemical vapor deposition control
Grant 8,852,347 - Lee , et al. October 7, 2 | 2014-10-07 |
Method and system for performing different deposition processes within a single chamber
Grant 8,815,014 - Faguet , et al. August 26, 2 | 2014-08-26 |
Method And Device For Controlling Pattern And Structure Formation By An Electric Field
App 20130217210 - Brcka; Jozef ; et al. | 2013-08-22 |
Apparatus For Thermal And Plasma Enhanced Vapor Deposition And Method Of Operating
App 20120315404 - LI; Yicheng ; et al. | 2012-12-13 |
Gas heating device for a vapor deposition system
Grant 8,291,856 - Nasman , et al. October 23, 2 | 2012-10-23 |
High temperature gas heating device for a vapor deposition system
Grant 8,272,347 - Nasman , et al. September 25, 2 | 2012-09-25 |
Method Of Operating Filament Assisted Chemical Vapor Deposition System
App 20120213929 - LEE; Eric M. ; et al. | 2012-08-23 |
Ultraviolet treatment apparatus
Grant 8,242,460 - Yue , et al. August 14, 2 | 2012-08-14 |
Plasma enhanced atomic layer deposition system and method
Grant 8,163,087 - Faguet , et al. April 24, 2 | 2012-04-24 |
Apparatus for chemical vapor deposition control
App 20110303145 - LEE; Eric M. ; et al. | 2011-12-15 |
Method for chemical vapor deposition control
App 20110305831 - LEE; Eric M. ; et al. | 2011-12-15 |
Flow Plate Utilization In Filament Assisted Chemical Vapor Deposition
App 20110244128 - Brcka; Jozef ; et al. | 2011-10-06 |
Ultraviolet treatment apparatus
App 20110233430 - YUE; Hongyu ; et al. | 2011-09-29 |
Method of integrating PEALD Ta-containing films into Cu metallization
Grant 7,959,985 - Ishizaka , et al. June 14, 2 | 2011-06-14 |
Method And System For Performing Different Deposition Processes Within A Single Chamber
App 20110135842 - FAGUET; Jacques ; et al. | 2011-06-09 |
Vapor Deposition System
App 20110126762 - Faguet; Jacques ; et al. | 2011-06-02 |
High temperature gas heating device for a vapor deposition system
App 20110061595 - NASMAN; Ronald ; et al. | 2011-03-17 |
Ionized physical vapor deposition (iPVD) process
Grant 7,901,545 - Cerio, Jr. , et al. March 8, 2 | 2011-03-08 |
Method and system for performing plasma enhanced atomic layer deposition
Grant 7,897,217 - Faguet March 1, 2 | 2011-03-01 |
Chemical vapor deposition method
App 20100247803 - LEE; Eric M. ; et al. | 2010-09-30 |
Method and system for fabricating a nano-structure
Grant 7,771,790 - Faguet August 10, 2 | 2010-08-10 |
Ionized PVD with sequential deposition and etching
Grant 7,744,735 - Robison , et al. June 29, 2 | 2010-06-29 |
Method of light enhanced atomic layer deposition
Grant 7,727,912 - Ishizaka , et al. June 1, 2 | 2010-06-01 |
Dielectric Treatment Platform For Dielectric Film Deposition And Curing
App 20100068897 - Liu; Junjun ; et al. | 2010-03-18 |
Dielectric Treatment Module Using Scanning Ir Radiation Source
App 20100065759 - Liu; Junjun ; et al. | 2010-03-18 |
Dielectric Material Treatment System And Method Of Operating
App 20100065758 - Liu; Junjun ; et al. | 2010-03-18 |
Ir Laser Optics System For Dielectric Treatment Module
App 20100067886 - Liu; Junjun ; et al. | 2010-03-18 |
IONIZED PHYSICAL VAPOR DEPOSITION (iPVD) PROCESS
App 20090321247 - Cerio, JR.; Frank M. ; et al. | 2009-12-31 |
Gas Heating Device For A Vapor Deposition System
App 20090223452 - Nasman; Ronald ; et al. | 2009-09-10 |
Method for enlarging a nano-structure
Grant 7,569,491 - Faguet August 4, 2 | 2009-08-04 |
Method for precursor delivery
Grant 7,485,338 - Faguet February 3, 2 | 2009-02-03 |
Vapor Deposition System And Method Of Operating
App 20080241377 - FAGUET; JACQUES | 2008-10-02 |
Method For Enlarging A Nano-structure
App 20080053955 - FAGUET; Jacques | 2008-03-06 |
Method And System For Fabricating A Nano-structure
App 20080057192 - Faguet; Jacques | 2008-03-06 |
Method of integrating PEALD Ta- containing films into Cu metallization
App 20070218683 - Ishizaka; Tadahiro ; et al. | 2007-09-20 |
Method of light enhanced atomic layer deposition
App 20070218704 - Ishizaka; Tadahiro ; et al. | 2007-09-20 |
Apparatus for thermal and plasma enhanced vapor deposition and method of operating
App 20070116873 - Li; Yicheng ; et al. | 2007-05-24 |
Method and system for performing plasma enhanced atomic layer deposition
App 20070116887 - Faguet; Jacques | 2007-05-24 |
Method and system for performing different deposition processes within a single chamber
App 20070116888 - Faguet; Jacques | 2007-05-24 |
Apparatus for thermal and plasma enhanced vapor deposition and method of operating
App 20070116872 - Li; Yicheng ; et al. | 2007-05-24 |
Particulate reduction using temperature-controlled chamber shield
Grant 7,182,816 - Kleshock , et al. February 27, 2 | 2007-02-27 |
Plasma enhanced atomic layer deposition system and method
App 20060225655 - Faguet; Jacques ; et al. | 2006-10-12 |
Method and system for precursor delivery
App 20060222768 - Faguet; Jacques | 2006-10-05 |
Ionized physical vapor deposition (iPVD) process
App 20050211545 - Cerio, Frank M. JR. ; et al. | 2005-09-29 |
Particulate reduction using temperature-controlled chamber shield
App 20050039679 - Kleshock, Mark ; et al. | 2005-02-24 |
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