Patent | Date |
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Production managing system of semiconductor device Grant 7,321,805 - Yamada , et al. January 22, 2 | 2008-01-22 |
Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer Grant 7,232,994 - Yamada June 19, 2 | 2007-06-19 |
Semiconductor device test method and semiconductor device tester Grant 7,049,834 - Yamada May 23, 2 | 2006-05-23 |
Film thickness measuring apparatus and a method for measuring a thickness of a film Grant 7,002,361 - Yamada , et al. February 21, 2 | 2006-02-21 |
Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer Grant 6,982,418 - Yamada January 3, 2 | 2006-01-03 |
Semiconductor device tester Grant 6,975,125 - Yamada , et al. December 13, 2 | 2005-12-13 |
Contact hole standard test device, method of forming the same, method testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer Grant 6,967,327 - Yamada November 22, 2 | 2005-11-22 |
Semiconductor device tester Grant 6,946,857 - Yamada , et al. September 20, 2 | 2005-09-20 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Grant 6,943,043 - Ushiki , et al. September 13, 2 | 2005-09-13 |
Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer Grant 6,940,296 - Yamada September 6, 2 | 2005-09-06 |
Semiconductor device test method and semiconductor device tester Grant 6,914,444 - Yamada July 5, 2 | 2005-07-05 |
Semiconductor device test method and semiconductor device tester Grant 6,900,645 - Yamada May 31, 2 | 2005-05-31 |
Contact hole standard test device Grant 6,897,440 - Yamada May 24, 2 | 2005-05-24 |
Film thickness measuring apparatus and a method for measuring a thickness of a film Grant 6,850,079 - Yamada , et al. February 1, 2 | 2005-02-01 |
Production managing system of semiconductor device Grant 6,842,663 - Yamada , et al. January 11, 2 | 2005-01-11 |
Semiconductor manufacturing device Grant 6,837,936 - Ushiki , et al. January 4, 2 | 2005-01-04 |
Semiconductor device test method and semiconductor device tester Grant 6,809,534 - Yamada October 26, 2 | 2004-10-26 |
Semiconductor device tester which measures information related to a structure of a sample in a depth direction Grant 6,768,324 - Yamada , et al. July 27, 2 | 2004-07-27 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Grant 6,753,194 - Ushiki , et al. June 22, 2 | 2004-06-22 |
Production managing system of semiconductor device Grant 6,711,453 - Yamada , et al. March 23, 2 | 2004-03-23 |
Method and apparatus for measuring thickness of thin film Grant 6,683,308 - Itagaki , et al. January 27, 2 | 2004-01-27 |
Semiconductor manufacturing apparatus Grant 6,614,050 - Yamada , et al. September 2, 2 | 2003-09-02 |
Semiconductor device inspecting apparatus Grant 6,614,244 - Yamada , et al. September 2, 2 | 2003-09-02 |