Ezumi; Makoto
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ezumi; Makoto.The latest application filed is for "method for inspecting and measuring sample and scanning electron microscope".
Company Profile
0.56.52
- Ezumi; Makoto - Mito N/A JP
- EZUMI; Makoto - Hitachinaka JP
- Ezumi; Makoto - Mito-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Charged particle instrument Grant 9,230,775 - Ohashi , et al. January 5, 2 | 2016-01-05 |
| Sample electrification measurement method and charged particle beam apparatus Grant 8,835,844 - Ezumi , et al. September 16, 2 | 2014-09-16 |
| Scanning electron microscope Grant 8,698,080 - Arai , et al. April 15, 2 | 2014-04-15 |
| Charged particle beam apparatus Grant 8,686,380 - Katagiri , et al. April 1, 2 | 2014-04-01 |
| Method For Inspecting And Measuring Sample And Scanning Electron Microscope App 20140001359 - EZUMI; Makoto ; et al. | 2014-01-02 |
| Scanning Electron Microscope And Length Measuring Method Using The Same App 20130292568 - Bizen; Daisuke ; et al. | 2013-11-07 |
| Method for inspecting and measuring sample and scanning electron microscope Grant 8,481,934 - Ezumi , et al. July 9, 2 | 2013-07-09 |
| Charged particle beam scanning method and charged particle beam apparatus Grant 8,338,781 - Sasaki , et al. December 25, 2 | 2012-12-25 |
| Charged Particle Instrument App 20120286160 - OHASHI; Takeyoshi ; et al. | 2012-11-15 |
| Sample dimension measuring method and scanning electron microscope Grant 8,080,789 - Nasu , et al. December 20, 2 | 2011-12-20 |
| Scanning electron microscope having a monochromator Grant 8,067,733 - Mori , et al. November 29, 2 | 2011-11-29 |
| Method For Inspecting And Measuring Sample And Scanning Electron Microscope App 20110215243 - EZUMI; Makoto ; et al. | 2011-09-08 |
| Charged Particle Beam Scanning Method And Charged Particle Beam Apparatus App 20110174975 - SASAKI; Yuko ; et al. | 2011-07-21 |
| Scanning electron microscope Grant 7,977,632 - Todokoro , et al. July 12, 2 | 2011-07-12 |
| Method for inspecting and measuring sample and scanning electron microscope Grant 7,960,696 - Ezumi , et al. June 14, 2 | 2011-06-14 |
| Charged particle beam scanning method and charged particle beam apparatus Grant 7,935,925 - Sasaki , et al. May 3, 2 | 2011-05-03 |
| Sample Electrification Measurement Method and Charged Particle Beam Apparatus App 20100294929 - Ezumi; Makoto ; et al. | 2010-11-25 |
| Monochromator and scanning electron microscope using the same Grant 7,838,827 - Ose , et al. November 23, 2 | 2010-11-23 |
| Charged particle beam apparatus Grant 7,718,976 - Kawasaki , et al. May 18, 2 | 2010-05-18 |
| Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor Grant 7,714,286 - Nakano , et al. May 11, 2 | 2010-05-11 |
| Sample electrification measurement method and charged particle beam apparatus Grant 7,700,918 - Ezumi , et al. April 20, 2 | 2010-04-20 |
| Scanning Electron Microscope Having A Monochromator App 20100044565 - MORI; Wataru ; et al. | 2010-02-25 |
| Sample dimension measuring method and scanning electron microscope App 20100038535 - Nasu; Osamu ; et al. | 2010-02-18 |
| Method for measuring dimensions of sample and scanning electron microscope Grant 7,659,508 - Nasu , et al. February 9, 2 | 2010-02-09 |
| Charged Particle Beam Alignment Method And Charged Particle Beam Apparatus App 20100006755 - Sato; Mitsugo ; et al. | 2010-01-14 |
| Charged particle beam apparatus Grant 7,642,514 - Takane , et al. January 5, 2 | 2010-01-05 |
| Charged particle beam apparatus App 20090294697 - Katagiri; Souichi ; et al. | 2009-12-03 |
| Scanning electron microscope having a monochromator Grant 7,612,336 - Mori , et al. November 3, 2 | 2009-11-03 |
| Charged particle beam alignment method and charged particle beam apparatus Grant 7,605,381 - Sato , et al. October 20, 2 | 2009-10-20 |
| Scanning electron microscope Grant 7,566,872 - Fukaya , et al. July 28, 2 | 2009-07-28 |
| Method For Inspecting And Measuring Sample And Scanning Electron Microscope App 20090084954 - EZUMI; Makoto ; et al. | 2009-04-02 |
| Scanning electron microscope App 20090065694 - Arai; Noriaki ; et al. | 2009-03-12 |
| Scanning Electron Microscope App 20090039259 - TODOKORO; Hideo ; et al. | 2009-02-12 |
| Charged Particle Beam Apparatus, Aberration Correction Value Calculation Unit Therefor, And Aberration Correction Program Therefor App 20090008550 - Nakano; Tomonori ; et al. | 2009-01-08 |
| Scanning electron microscope Grant 7,459,681 - Arai , et al. December 2, 2 | 2008-12-02 |
| Scanning electron microscope Grant 7,442,923 - Todokoro , et al. October 28, 2 | 2008-10-28 |
| Monochromator and scanning electron microscope using the same App 20080237463 - Ose; Yoichi ; et al. | 2008-10-02 |
| Sample electrification measurement method and charged particle beam apparatus App 20080201091 - Ezumi; Makoto ; et al. | 2008-08-21 |
| Charged particle beam apparatus and charged particle beam irradiation method Grant 7,408,172 - Sato , et al. August 5, 2 | 2008-08-05 |
| Changed particle beam emitting device and method for adjusting the optical axis App 20080179536 - Sato; Mitsugu ; et al. | 2008-07-31 |
| Scanning electron microscope Grant 7,399,966 - Todokoro , et al. July 15, 2 | 2008-07-15 |
| Charged particle beam apparatus App 20080116376 - Takane; Atsushi ; et al. | 2008-05-22 |
| Sample electrification measurement method and charged particle beam apparatus Grant 7,372,028 - Ezumi , et al. May 13, 2 | 2008-05-13 |
| Charged particle beam emitting device and method for adjusting the optical axis Grant 7,355,174 - Sato , et al. April 8, 2 | 2008-04-08 |
| Charged particle beam scanning method and charged particle beam apparatus App 20080073528 - Sasaki; Yuko ; et al. | 2008-03-27 |
| Charged Particle Beam Apparatus App 20080067378 - Kawasaki; Takeshi ; et al. | 2008-03-20 |
| Charged Particle Beam Apparatus And Charged Particle Beam Irradiation Method App 20080042074 - SATO; MITSUGU ; et al. | 2008-02-21 |
| Charged particle beam apparatus Grant 7,329,868 - Takane , et al. February 12, 2 | 2008-02-12 |
| Monochromator and scanning electron microscope using the same Grant 7,315,024 - Ose , et al. January 1, 2 | 2008-01-01 |
| Scanning electron microscope Grant 7,294,835 - Todokoro , et al. November 13, 2 | 2007-11-13 |
| Charged particle beam apparatus and charged particle beam irradiation method Grant 7,282,722 - Sato , et al. October 16, 2 | 2007-10-16 |
| Scanning electron microscope App 20070221846 - Todokoro; Hideo ; et al. | 2007-09-27 |
| Scanning electron microscope having a monochromator App 20070181805 - Mori; Wataru ; et al. | 2007-08-09 |
| Scanning electron microscope App 20070057183 - Arai; Noriaki ; et al. | 2007-03-15 |
| Scanning electron microscope App 20070045539 - Fukaya; Ritsuo ; et al. | 2007-03-01 |
| Charged particle beam apparatus App 20070023657 - Takane; Atsushi ; et al. | 2007-02-01 |
| Sample electrification measurement method and charged particle beam apparatus App 20060219918 - Ezumi; Makoto ; et al. | 2006-10-05 |
| Monochromator and scanning electron microscope using the same App 20060219910 - Ose; Yoichi ; et al. | 2006-10-05 |
| Charged particle beam apparatus Grant 7,109,485 - Takane , et al. September 19, 2 | 2006-09-19 |
| Sample electrification measurement method and charged particle beam apparatus Grant 7,087,899 - Ezumi , et al. August 8, 2 | 2006-08-08 |
| Scanning electron microscope Grant 7,075,078 - Ose , et al. July 11, 2 | 2006-07-11 |
| Scanning electron microscope App 20060113474 - Todokoro; Hideo ; et al. | 2006-06-01 |
| Scanning electron microscope Grant 7,049,591 - Todokoro , et al. May 23, 2 | 2006-05-23 |
| Scanning electron microscope App 20060071167 - Todokoro; Hideo ; et al. | 2006-04-06 |
| Monochromator and scanning electron microscope using the same Grant 7,022,983 - Ose , et al. April 4, 2 | 2006-04-04 |
| Charged particle beam emitting device and method for adjusting the optical axis App 20050285036 - Sato, Mitsugu ; et al. | 2005-12-29 |
| Charged particle beam apparatus and charged particle beam irradiation method App 20050253083 - Sato, Mitsugu ; et al. | 2005-11-17 |
| Charged particle beam apparatus and charged particle beam irradiation method Grant 6,956,211 - Sato , et al. October 18, 2 | 2005-10-18 |
| Sample electrification measurement method and charged particle beam apparatus Grant 6,946,656 - Ezumi , et al. September 20, 2 | 2005-09-20 |
| Charged particle beam apparatus Grant 6,936,818 - Takane , et al. August 30, 2 | 2005-08-30 |
| Charged particle beam apparatus App 20050184237 - Takane, Atsushi ; et al. | 2005-08-25 |
| Sample electrification measurement method and charged particle beam apparatus App 20050161600 - Ezumi, Makoto ; et al. | 2005-07-28 |
| Scanning electron microscope App 20050139773 - Ose, Yoichi ; et al. | 2005-06-30 |
| Scanning electron microscope App 20050133719 - Todokoro, Hideo ; et al. | 2005-06-23 |
| Scanning electron microscope Grant 6,885,001 - Ose , et al. April 26, 2 | 2005-04-26 |
| Scanning electron microscope Grant 6,872,944 - Todokoro , et al. March 29, 2 | 2005-03-29 |
| Charged particle beam alignment method and charged particle beam apparatus Grant 6,864,493 - Sato , et al. March 8, 2 | 2005-03-08 |
| Scanning electron microscope Grant 6,847,038 - Todokoro , et al. January 25, 2 | 2005-01-25 |
| Sample electrification measurement method and charged particle beam apparatus App 20040211899 - Ezumi, Makoto ; et al. | 2004-10-28 |
| Monochromator and scanning electron microscope using the same App 20040188607 - Ose, Yoichi ; et al. | 2004-09-30 |
| Scanning electron microscope App 20040188612 - Ose, Yoichi ; et al. | 2004-09-30 |
| Scanning electron microscope Grant 6,787,772 - Ose , et al. September 7, 2 | 2004-09-07 |
| Charged particle beam alignment method and charged particle beam apparatus App 20040124364 - Sato, Mitsugu ; et al. | 2004-07-01 |
| Charged particle beam apparatus and charged particle beam irradiation method App 20040119022 - Sato, Mitsugu ; et al. | 2004-06-24 |
| Scanning electron microscope App 20040089805 - Todokoro, Hideo ; et al. | 2004-05-13 |
| Charged particle beam apparatus App 20040069956 - Takane, Atsushi ; et al. | 2004-04-15 |
| Scanning electron microscope App 20040051041 - Todokoro, Hideo ; et al. | 2004-03-18 |
| Method for measuring dimensions of sample and scanning electron microscope App 20040051040 - Nasu, Osamu ; et al. | 2004-03-18 |
| Scanning electron microscope App 20040036021 - Todokoro, Hideo ; et al. | 2004-02-26 |
| Scanning electron microscope Grant 6,667,476 - Todokoro , et al. December 23, 2 | 2003-12-23 |
| Charged particle beam apparatus Grant 6,653,633 - Takane , et al. November 25, 2 | 2003-11-25 |
| Scanning electron microscope Grant 6,646,262 - Todokoro , et al. November 11, 2 | 2003-11-11 |
| Scanning electron microscope with voltage applied to the sample Grant 6,635,873 - Todokoro , et al. October 21, 2 | 2003-10-21 |
| Charged particle beam apparatus App 20030136907 - Takane, Atsushi ; et al. | 2003-07-24 |
| Scanning Electron Microscope App 20030127604 - TODOKORO, HIDEO ; et al. | 2003-07-10 |
| Image-formation apparatus using charged particle beams under various focus conditions Grant 6,538,249 - Takane , et al. March 25, 2 | 2003-03-25 |
| Charged particle beam alignment method and charged particle beam apparatus App 20020179851 - Sato, Mitsugu ; et al. | 2002-12-05 |
| Scanning electron microscope App 20020148960 - Todokoro, Hideo ; et al. | 2002-10-17 |
| Scanning electron microscope App 20010010357 - Ose, Yoichi ; et al. | 2001-08-02 |
| Scanning electron microscope Grant 6,084,238 - Todokoro , et al. July 4, 2 | 2000-07-04 |
| Scanning electron microscope Grant 5,900,629 - Todokoro , et al. May 4, 1 | 1999-05-04 |
| Scanning electron microscope Grant 5,872,358 - Todokoro , et al. February 16, 1 | 1999-02-16 |
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