Ewert; Maurice E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ewert; Maurice E..The latest application filed is for "cooled reflective adapter plate for a deposition chamber".

Company Profile

1.13.14

Ewert; Maurice E. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cooled reflective adapter plate for a deposition chamber Grant 10,903,067 - Goel , et al. January 26, 2	2021-01-26
Cooled Reflective Adapter Plate For A Deposition Chamber App 20200098559 - GOEL; Ashish ; et al.	2020-03-26
Cooled reflective adapter plate for a deposition chamber Grant 10,504,719 - Goel , et al. Dec	2019-12-10
Off-angled heating of the underside of a substrate using a lamp assembly Grant 9,863,038 - Ewert , et al. January 9, 2	2018-01-09
Off-angled heating of the underside of a substrate using a lamp assembly Grant 9,818,587 - Ewert , et al. November 14, 2	2017-11-14
Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target Grant 8,992,741 - Wang , et al. March 31, 2	2015-03-31
Mechanism for continuously varying radial position of a magnetron Grant 8,685,215 - Miller , et al. April 1, 2	2014-04-01
Cooled Reflective Adapter Plate For A Deposition Chamber App 20130284096 - GOEL; Ashish ; et al.	2013-10-31
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20130270107 - EWERT; MAURICE E. ; et al.	2013-10-17
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20130196514 - EWERT; Maurice E. ; et al.	2013-08-01
Off-angled heating of the underside of a substrate using a lamp assembly Grant 8,404,048 - Ewert , et al. March 26, 2	2013-03-26
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20120231633 - Ewert; Maurice E. ; et al.	2012-09-13
Mechanism for continuously varying radial position of a magnetron App 20100243440 - Miller; Keith A. ; et al.	2010-09-30
Magnetron having continuously variable radial position Grant 7,736,473 - Miller , et al. June 15, 2	2010-06-15
Method For Ultra-uniform Sputter Deposition Using Simultaneous Rf And Dc Power On Target App 20100032289 - WANG; RONGJUN ; et al.	2010-02-11
Wafer Processing Deposition Shielding Components App 20090308739 - Riker; Martin Lee ; et al.	2009-12-17
Apparatus And Method For Uniform Deposition App 20090308732 - Cao; Yong ; et al.	2009-12-17
Magnetron having continuously variable radial position App 20060076232 - Miller; Keith A. ; et al.	2006-04-13
Selectable dual position magnetron Grant 7,018,515 - Gung , et al. March 28, 2	2006-03-28
Selectable dual position magnetron App 20050211548 - Gung, Tza-Jing ; et al.	2005-09-29

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