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Patent applications and USPTO patent grants for Everett; Patrick N..The latest application filed is for "method and system for interference lithography utilizing phase-locked scanning beams".
Patent | Date |
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Method and system for interference lithography utilizing phase-locked scanning beams Grant 6,882,477 - Schattenburg , et al. April 19, 2 | 2005-04-19 |
Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction Grant 6,522,411 - Moon , et al. February 18, 2 | 2003-02-18 |
Optical interference alignment and gapping apparatus Grant 6,088,103 - Everett , et al. July 11, 2 | 2000-07-11 |
Optical alignment apparatus having multiple parallel alignment marks Grant 5,808,742 - Everett , et al. September 15, 1 | 1998-09-15 |
Device and method for the alignment of masks Grant 5,160,959 - Everett , et al. November 3, 1 | 1992-11-03 |
Laser mode locking, Q-switching and dumping system Grant 4,375,684 - Everett March 1, 1 | 1983-03-01 |
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