Patent | Date |
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Optical Element And Lithography System App 20220299731 - Eva; Eric | 2022-09-22 |
Component for a mirror array for EUV lithography Grant 11,126,087 - Eva September 21, 2 | 2021-09-21 |
Method for repairing reflective optical elements for EUV lithography Grant 11,099,484 - Meier , et al. August 24, 2 | 2021-08-24 |
Substrate For A Reflective Optical Element App 20210116616 - EVA; Eric | 2021-04-22 |
Optical manipulator, projection lens and projection exposure apparatus Grant 10,976,667 - Eva April 13, 2 | 2021-04-13 |
Reflective optical element for EUV lithography Grant 10,649,340 - Ehm , et al. | 2020-05-12 |
Method For Repairing Reflective Otpical Elements For Euv Lithography App 20190302628 - MEIER; Robert ;   et al. | 2019-10-03 |
Method for loading a blank composed of fused silica with hydrogen, lens element and projection lens Grant 10,427,965 - Eva October 1, 2 | 2019-10-01 |
Component For A Mirror Array For Euv Lithography App 20190212654 - EVA; Eric | 2019-07-11 |
Reflective Optical Element For Euv Lithography App 20190171108 - EHM; Dirk Heinrich ;   et al. | 2019-06-06 |
Optical Manipulator, Projection Lens And Projection Exposure Apparatus App 20170108780 - EVA; Eric | 2017-04-20 |
Method For Loading A Blank Composed Of Fused Silica With Hydrogen, Lens Element And Projection Lens App 20160145137 - EVA; Eric | 2016-05-26 |
Method and apparatus for determining the absorption in a blank Grant 9,036,152 - Eva May 19, 2 | 2015-05-19 |
Optical element and method Grant 8,891,172 - Eva , et al. November 18, 2 | 2014-11-18 |
Lens blank and lens elements as well as method for their production Grant 8,780,448 - Eva July 15, 2 | 2014-07-15 |
Method And Apparatus For Determining The Absorption In A Blank App 20140192344 - EVA; Eric | 2014-07-10 |
Optical element and method Grant 8,508,854 - Eva , et al. August 13, 2 | 2013-08-13 |
Lens Blank And Lens Elements As Well As Method For Their Production App 20120218643 - EVA; Eric | 2012-08-30 |
Lens blank and lens elements as well as method for their production Grant 8,174,771 - Eva May 8, 2 | 2012-05-08 |
Method For Manufacturing A Lens Of Synthetic Quartz Glass With Increased H2 Content App 20110203320 - EVA; Eric | 2011-08-25 |
Method for manufacturing a lens of synthetic quartz glass with increased H.sub.2 content Grant 7,934,390 - Eva May 3, 2 | 2011-05-03 |
Optical Element And Method App 20110080569 - Eva; Eric ;   et al. | 2011-04-07 |
Optical composite material and method for its production Grant 7,907,347 - Eva , et al. March 15, 2 | 2011-03-15 |
Lens Blank And Lens Elements As Well As Method For Their Production App 20100296160 - EVA; Eric | 2010-11-25 |
Lens blank and lens elements as well as method for their production Grant 7,791,811 - Eva September 7, 2 | 2010-09-07 |
Projection Lens For Microlithography And Corresponding Terminal Element App 20100149500 - Eva; Eric | 2010-06-17 |
Optical Element And Method App 20090257032 - Eva; Eric ;   et al. | 2009-10-15 |
Optical composite material and method for its production App 20090036289 - Eva; Eric ;   et al. | 2009-02-05 |
Method and apparatus for setting optical imaging properties by means of radiation treatment Grant 7,352,452 - Wegmann , et al. April 1, 2 | 2008-04-01 |
Lens Blank And Lens Elements As Well As Method For Their Production App 20080018992 - Eva; Eric | 2008-01-24 |
Method For Manufacturing A Lens Of Synthetic Quartz Glass With Increased H2 Content App 20070266733 - Eva; Eric | 2007-11-22 |
Projection lens and method for performing microlithography App 20070195307 - Schuster; Karl-Heinz ;   et al. | 2007-08-23 |
Attenuating filter for ultraviolet light Grant 7,196,842 - Weigl , et al. March 27, 2 | 2007-03-27 |
Method and apparatus for setting optical imaging properties by means of radiation treatment App 20060118703 - Wegmann; Ulrich ;   et al. | 2006-06-08 |
Device for reducing the peak power of a pulsed laser light source Grant 6,996,141 - Schuster , et al. February 7, 2 | 2006-02-07 |
Projection optical system Grant 6,992,753 - Krahmer , et al. January 31, 2 | 2006-01-31 |
Attenuating filter for ultraviolet light App 20050179996 - Weigl, Bernhard ;   et al. | 2005-08-18 |
Projection optical system App 20050140954 - Krahmer, Daniel ;   et al. | 2005-06-30 |
Method for producing radiation-resistant quartz glass material, and quartz glass material App 20040250572 - Lindner, Ralf ;   et al. | 2004-12-16 |
Method of making a fracture-resistant calcium fluoride single crystal and its use Grant 6,740,159 - Kandler , et al. May 25, 2 | 2004-05-25 |
Method of making a fracture-resistant calcium fluoride single crystal and its use App 20030101923 - Kandler, Joerg ;   et al. | 2003-06-05 |
Attenuating filter for ultraviolet light App 20020191310 - Weigl, Bernhard ;   et al. | 2002-12-19 |