Eurlings; Markus Franciscus Antonius

Patent Applications and Registrations

Patent applications and USPTO patent grants for Eurlings; Markus Franciscus Antonius.The latest application filed is for "method of measuring a parameter of a patterning process, metrology apparatus, target".

Company Profile

5.43.36

Eurlings; Markus Franciscus Antonius - Tilburg NL
Eurlings; Markus Franciscus Antonius - Veldhoven NL
Eurlings; Markus Franciscus Antonius - Breda NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of measuring a parameter of a patterning process, metrology apparatus, target Grant 11,150,563 - Sokolov , et al. October 19, 2	2021-10-19
Method and device for pupil illumination in overlay and critical dimension sensors Grant 10,754,259 - Shmarev , et al. A	2020-08-25
Method Of Measuring A Parameter Of A Patterning Process, Metrology Apparatus, Target App 20200192230 - SOKOLOV; Sergei ; et al.	2020-06-18
Beam homogenizer, illumination system and metrology system Grant 10,495,889 - Eurlings , et al. De	2019-12-03
Method and Device for Pupil Illumination in Overlay and Critical Dimension Sensors App 20190155172 - SHMAREV; Yevgeniy Konstantinovich ; et al.	2019-05-23
Beam delivery for EUV lithography Grant 10,289,006 - Van Schoot , et al.	2019-05-14
Radiation source Grant 10,222,702 - Bleeker , et al.	2019-03-05
Lithographic apparatus and method Grant 10,222,703 - Mulder , et al.	2019-03-05
Radiation Source App 20180031979 - BLEEKER; Arno Jan ; et al.	2018-02-01
Radiation source Grant 9,835,950 - Eurlings , et al. December 5, 2	2017-12-05
Lithographic Apparatus And Method App 20170315450 - MULDER; Heine Melle ; et al.	2017-11-02
Lithographic apparatus and method Grant 9,778,575 - Mulder , et al. October 3, 2	2017-10-03
Beam Homogenizer, Illumination System and Metrology System App 20170248794 - EURLINGS; Markus Franciscus Antonius ; et al.	2017-08-31
Radiation source and lithographic apparatus Grant 9,645,500 - Noordman , et al. May 9, 2	2017-05-09
Radiation Source App 20160334711 - EURLINGS; Markus Franciscus Antonius ; et al.	2016-11-17
Radiation Source And Lithographic Apparatus App 20160195819 - NOORDMAN; Oscar Franciscus Jozephus ; et al.	2016-07-07
Lithographic Apparatus And Method App 20160116848 - MULDER; Heine Melle ; et al.	2016-04-28
Lithographic apparatus and method Grant 9,250,536 - Mulder , et al. February 2, 2	2016-02-02
Lithographic apparatus and method for reducing stray radiation Grant 9,188,881 - Dierichs , et al. November 17, 2	2015-11-17
Lithographic apparatus and method Grant 8,937,706 - Mulder , et al. January 20, 2	2015-01-20
Lithographic apparatus and method Grant 8,830,444 - Van Schoot , et al. September 9, 2	2014-09-09
Radiation conduit for radiation source Grant 8,680,493 - Schepers , et al. March 25, 2	2014-03-25
Lithographic apparatus and device manufacturing method Grant 8,587,766 - Mulder , et al. November 19, 2	2013-11-19
Lithographic Apparatus and Device Manufacturing Method App 20130194562 - Neerhof; Hendrik Antony Johannes ; et al.	2013-08-01
Radiation Source And Lithographic Apparatus App 20130001442 - Schepers; Maikel Adrianus Cornelis ; et al.	2013-01-03
Device manufacturing method and mask for use therein Grant 8,252,487 - Dierichs , et al. August 28, 2	2012-08-28
Lithographic Apparatus and Method App 20120147346 - VAN SCHOOT; Jan Bernard Plechelmus ; et al.	2012-06-14
Lithographic Apparatus And Method For Reducing Stray Radiation App 20120075610 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2012-03-29
Method and apparatus for performing model-based layout conversion for use with dipole illumination Grant 7,985,515 - Hsu , et al. July 26, 2	2011-07-26
Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems Grant 7,856,606 - Eurlings , et al. December 21, 2	2010-12-21
Method And Apparatus For Performing Model-based Layout Conversion For Use With Dipole Illumination App 20100167183 - HSU; Duan-Fu Stephen ; et al.	2010-07-01
Method and apparatus for performing model-based layout conversion for use with dipole illumination Grant 7,666,554 - Hsu , et al. February 23, 2	2010-02-23
Lithographic Apparatus And Device Manufacturing Method App 20090174877 - MULDER; Heine Melle ; et al.	2009-07-09
Lithographic apparatus and device manufacturing method Grant 7,525,642 - Mulder , et al. April 28, 2	2009-04-28
Lithographic apparatus and method App 20080239268 - Mulder; Heine Melle ; et al.	2008-10-02
Optical proximity correction using chamfers and rounding at corners Grant 7,355,681 - Laidig , et al. April 8, 2	2008-04-08
Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influence Grant 7,349,066 - Eurlings , et al. March 25, 2	2008-03-25
Lithographic apparatus and device manufacturing method Grant 7,333,178 - Dierichs , et al. February 19, 2	2008-02-19
Device manufacturing method, mask set for use in the method, data set for controlling a programmable patterning device, method of generating a mask pattern and a computer program Grant 7,316,870 - Eurlings , et al. January 8, 2	2008-01-08
Lithographic apparatus and device manufacturing method Grant 7,224,440 - Kruijswijk , et al. May 29, 2	2007-05-29
Optical element for use in lithography apparatus and method of conditioning radiation beam App 20070058151 - Eurlings; Markus Franciscus Antonius ; et al.	2007-03-15
Lithographic apparatus and device manufacturing method Grant 7,177,010 - Van Der Laan , et al. February 13, 2	2007-02-13
Lithographic apparatus and device manufacturing method Grant 7,148,952 - Eurlings , et al. December 12, 2	2006-12-12
Method and apparatus for performing model-based layout conversion for use with dipole illumination Grant 7,138,212 - Hsu , et al. November 21, 2	2006-11-21
Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influence App 20060250589 - Eurlings; Markus Franciscus Antonius ; et al.	2006-11-09
Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,113,261 - Dierichs , et al. September 26, 2	2006-09-26
Lithographic apparatus and device manufacturing method App 20060139599 - Kruijswijk; Stefan Geerte ; et al.	2006-06-29
Lithographic apparatus and device manufacturing method App 20060092397 - Laan; Hans Van Der ; et al.	2006-05-04
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method Grant 7,030,958 - Luijkx , et al. April 18, 2	2006-04-18
Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby Grant 7,026,082 - Eurlings , et al. April 11, 2	2006-04-11
Lithographic apparatus, device manufacturing method and device manufactured thereby, control system Grant 7,015,491 - Eurlings , et al. March 21, 2	2006-03-21
Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems App 20060010417 - Eurlings; Markus Franciscus Antonius ; et al.	2006-01-12
Optical proximity correction using chamfers and rounding at corners App 20050280800 - Laiding, Thomas ; et al.	2005-12-22
Lithographic apparatus and device manufacturing method App 20050270513 - Dierichs, Marcel Mathijs ; et al.	2005-12-08
Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby App 20050270511 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2005-12-08
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method Grant 6,927,004 - Eurlings , et al. August 9, 2	2005-08-09
Lithographic apparatus and device manufacturing method App 20050146702 - Eurlings, Markus Franciscus Antonius ; et al.	2005-07-07
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method App 20050140957 - Luijkx, Cornelis Petrus Andreas Marie ; et al.	2005-06-30
Device manufacturing method and mask for use therein App 20050136334 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2005-06-23
Method of removing assist features utilized to improve process latitude Grant 6,875,545 - Eurlings , et al. April 5, 2	2005-04-05
Device manufacturing method, mask set for use in the method, data set for controlling a programmable patterning device, method of generating a mask pattern and a computer program App 20050005257 - Eurlings, Markus Franciscus Antonius ; et al.	2005-01-06
Method and apparatus for performing model-based layout conversion for use with dipole illumination App 20040142251 - Hsu, Duan-Fu Stephen ; et al.	2004-07-22
Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby App 20040137343 - Eurlings, Markus Franciscus Antonius ; et al.	2004-07-15
Lithographic apparatus, device manufacturing method and device manufactured thereby, control system App 20040108467 - Eurlings, Markus Franciscus Antonius ; et al.	2004-06-10
Lithographic apparatus and device manufacturing method Grant 6,741,329 - Leenders , et al. May 25, 2	2004-05-25
Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product Grant 6,737,662 - Mulder , et al. May 18, 2	2004-05-18
Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby Grant 6,710,856 - Van Der Laan , et al. March 23, 2	2004-03-23
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method App 20030180632 - Eurlings, Markus Franciscus Antonius ; et al.	2003-09-25
Method of removing assist features utilized to improve process latitude App 20030170565 - Eurlings, Markus Franciscus Antonius ; et al.	2003-09-11
Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product App 20030038225 - Mulder, Heine Melle ; et al.	2003-02-27
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020036763 - Krikke, Jan Jaap ; et al.	2002-03-28
Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby App 20020027648 - Van Der Laan, Hans ; et al.	2002-03-07

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.