| Patent | Date |
|---|
Apparatus For Processing Substrate With Plasma
App 20220277931 - CHOI; Yoon Seok | 2022-09-01 |
Method For Removing Impurities In Thin Film And Substrate Processing Apparatus
App 20220230875 - CHOI; Kyu Jin ; et al. | 2022-07-21 |
System For Processing Substrate
App 20220165588 - KIM; Chang Dol ; et al. | 2022-05-26 |
Batch Type Substrate Processing Apparatus
App 20220130647 - JO; Jeong Hee ; et al. | 2022-04-28 |
Apparatus For Processing Substrate
App 20220093445 - HWANG; Ryong ; et al. | 2022-03-24 |
Substrate Processing Apparatus And Operation Method For Substrate Processing Apparatus
App 20220076963 - YANG; Seung Kook ; et al. | 2022-03-10 |
Method For Forming A Thin Film
App 20220049349 - KIM; Jin Woong ; et al. | 2022-02-17 |
Substrate processing system
Grant 11,251,056 - Kang , et al. February 15, 2 | 2022-02-15 |
Showerhead and substrate processing apparatus including the same
Grant 11,242,601 - Je , et al. February 8, 2 | 2022-02-08 |
Plasma Processing Apparatus
App 20220028658 - JO; Jeong Hee ; et al. | 2022-01-27 |
Batch type plasma substrate processing apparatus
Grant 11,183,372 - Kang , et al. November 23, 2 | 2021-11-23 |
Apparatus for processing substrate
Grant 11,111,580 - Kang , et al. September 7, 2 | 2021-09-07 |
Batch type substrate processing apparatus
Grant 11,031,214 - Jo June 8, 2 | 2021-06-08 |
Thin Film Deposition Apparatus And Thin Film Deposition Method
App 20210102287 - LEE; Kwang Woon ; et al. | 2021-04-08 |
Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substrates
Grant 10,961,626 - Jo , et al. March 30, 2 | 2021-03-30 |
Batch-type Substrate Processing Apparatus And Operation Method Thereof
App 20210017644 - KIM; Hee Seok ; et al. | 2021-01-21 |
ICP antenna and substrate processing device including the same
Grant 10,892,139 - Choi January 12, 2 | 2021-01-12 |
Apparatus And Method Of Processing A Substrate
App 20200392619 - JUNG; Min Jin ; et al. | 2020-12-17 |
Substrate processing apparatus and method for assembling tube assembly
Grant 10,840,118 - Yoo , et al. November 17, 2 | 2020-11-17 |
Batch Type Substrate Processing Apparatus
App 20200350143 - JO; Jeong Hee | 2020-11-05 |
Batch Type Substrate Processing Apparatus
App 20200350145 - JO; Jeong Hee | 2020-11-05 |
Substrate processing apparatus and substrate processing method using the same
Grant 10,793,949 - Hyon , et al. October 6, 2 | 2020-10-06 |
Method for forming epitaxial layer at low temperature
Grant 10,796,915 - Ryu , et al. October 6, 2 | 2020-10-06 |
Showerhead And Substrate Processing Apparatus Including The Same
App 20200263303 - JE; Sung Tae ; et al. | 2020-08-20 |
Substrate processing apparatus
Grant 10,741,396 - Jung , et al. A | 2020-08-11 |
Plasma Processing Apparatus
App 20200243301 - JO; Jeong Hee ; et al. | 2020-07-30 |
Substrate processing apparatus
Grant 10,692,745 - Choi | 2020-06-23 |
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
Grant 10,622,228 - Lee , et al. | 2020-04-14 |
Method for substrate processing using exhaust ports
Grant 10,593,545 - Yang , et al. | 2020-03-17 |
Icp Antenna And Substrate Processing Device Including The Same
App 20190385814 - CHOI; Yoon-Seok | 2019-12-19 |
Substrate Processing System
App 20190341278 - KANG; Sung Ho ; et al. | 2019-11-07 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20190316254 - KANG; Sung Ho ; et al. | 2019-10-17 |
Method For Forming Epitaxial Layer At Low Temperature
App 20190304785 - RYU; Doo Yeol ; et al. | 2019-10-03 |
Substrate processing apparatus
Grant 10,392,702 - Jung , et al. A | 2019-08-27 |
Substrate processing apparatus
Grant 10,364,494 - Yoo , et al. | 2019-07-30 |
Substrate processing apparatus
Grant 10,337,103 - Hyon , et al. | 2019-07-02 |
Substrate processing device
Grant 10,287,687 - Je , et al. | 2019-05-14 |
Multiple gases providing method and multiple gases providing apparatus
Grant 10,283,391 - Hyon , et al. | 2019-05-07 |
Batch Type Plasma Substrate Processing Apparatus
App 20190108985 - KANG; Sung Ho ; et al. | 2019-04-11 |
Method for forming amorphous thin film
Grant 10,246,773 - Shin , et al. | 2019-04-02 |
Batch Type Plasma Substrate Processing Apparatus
App 20190085456 - JO; Jeong Hee ; et al. | 2019-03-21 |
Substrate treatment apparatus
Grant 10,229,845 - Hyon , et al. | 2019-03-12 |
Substrate processing apparatus
Grant 10,199,225 - Jung , et al. Fe | 2019-02-05 |
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
Grant 10,192,760 - Lee , et al. Ja | 2019-01-29 |
Substrate processing apparatus
Grant 10,161,036 - Hyon , et al. Dec | 2018-12-25 |
Apparatus For Processing Substrate
App 20180355481 - KANG; Sung Ho ; et al. | 2018-12-13 |
Substrate processing apparatus and substrate processing method
Grant 10,145,012 - Je , et al. De | 2018-12-04 |
Substrate Processing Apparatus
App 20180298493 - YOO; Cha Young ; et al. | 2018-10-18 |
Substrate Processing Apparatus
App 20180277411 - CHOI; Sung Ha | 2018-09-27 |
Substrate Processing Apparatus And Method For Assembling Tube Assembly
App 20180240696 - YOO; Cha Young ; et al. | 2018-08-23 |
Method and apparatus for manufacturing three-dimensional-structure memory device
Grant 10,006,121 - Cho , et al. June 26, 2 | 2018-06-26 |
Substrate Processing Apparatus
App 20180122638 - JUNG; Woo Duck ; et al. | 2018-05-03 |
Method For Forming Amorphous Thin Film
App 20180112307 - SHIN; Seung-Woo ; et al. | 2018-04-26 |
Substrate processing apparatus including heat-shield plate
Grant 9,953,850 - Yang , et al. April 24, 2 | 2018-04-24 |
Equipment For Manufacturing Semiconductor
App 20180105951 - KIM; Young Dae ; et al. | 2018-04-19 |
Substrate Processing Apparatus And Method For Cleaning Chamber
App 20180105933 - JUNG; Woo Duck ; et al. | 2018-04-19 |
Substrate Processing Apparatus
App 20180090323 - JUNG; Woo Duck ; et al. | 2018-03-29 |
Substrate Processing Apparatus
App 20180090322 - JUNG; Woo Duck ; et al. | 2018-03-29 |
Substrate processing apparatus including exhaust ports and substrate processing method
Grant 9,875,895 - Yang , et al. January 23, 2 | 2018-01-23 |
Substrate processing apparatus including processing unit
Grant 9,869,019 - Yang , et al. January 16, 2 | 2018-01-16 |
Multiple Gases Providing Method And Multiple Gases Providing Apparatus
App 20170372929 - HYON; Jun-Jin ; et al. | 2017-12-28 |
Method for depositing insulating film on recessed portion having high aspect ratio
Grant 9,818,604 - Kim , et al. November 14, 2 | 2017-11-14 |
Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit
Grant 9,761,473 - Kim , et al. September 12, 2 | 2017-09-12 |
Substrate treatment apparatus, and method for controlling temperature of heater
Grant 9,758,870 - Je , et al. September 12, 2 | 2017-09-12 |
Method And Apparatus For Depositing Amorphous Silicon Film
App 20170256410 - SHIN; Seung-Woo ; et al. | 2017-09-07 |
Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device
Grant 9,741,574 - Kim , et al. August 22, 2 | 2017-08-22 |
Method for forming polysilicon film
Grant 9,741,562 - Shin , et al. August 22, 2 | 2017-08-22 |
Method and apparatus for depositing amorphous silicon film
Grant 9,721,798 - Shin , et al. August 1, 2 | 2017-08-01 |
Substrate Processing Apparatus
App 20170183771 - YOO; Cha Young ; et al. | 2017-06-29 |
Method For Forming Polysilicon Film
App 20170178906 - SHIN; Seung-Woo ; et al. | 2017-06-22 |
Substrate Processing Apparatus Including Exhaust Ports And Substrate Processing Method
App 20170148649 - YANG; IL-KWANG ; et al. | 2017-05-25 |
Method For Depositing Insulating Film On Recessed Portion Having High Aspect Ratio
App 20170148625 - KIM; Hai-Won ; et al. | 2017-05-25 |
Substrate Processing Apparatus And Substrate Processing Method Using The Same
App 20170137938 - HYON; Jun Jin ; et al. | 2017-05-18 |
Heater moving type substrate processing apparatus
Grant 9,644,895 - Yang , et al. May 9, 2 | 2017-05-09 |
Substrate Supporting Unit, Substrate Processing Apparatus, And Method Of Manufacturing Substrate Supporting Unit
App 20170110347 - LEE; Dong-Keun ; et al. | 2017-04-20 |
Apparatus for processing substrate for supplying reaction gas having phase difference
Grant 9,620,395 - Yang , et al. April 11, 2 | 2017-04-11 |
Substrate Processing Apparatus
App 20170073813 - HYON; Jun Jin ; et al. | 2017-03-16 |
Substrate Processing Apparatus
App 20170073810 - HYON; Jun Jin ; et al. | 2017-03-16 |
Showerhead having cooling system and substrate processing apparatus including the showerhead
Grant 9,593,418 - Yang , et al. March 14, 2 | 2017-03-14 |
Substrate processing apparatus including auxiliary gas supply port
Grant 9,593,415 - Yang , et al. March 14, 2 | 2017-03-14 |
Plasma treatment apparatus and plasma antenna
Grant 9,564,294 - Woo , et al. February 7, 2 | 2017-02-07 |
Substrate Processing Apparatus
App 20170025293 - JUNG; Woo Duck ; et al. | 2017-01-26 |
Shower head unit and chemical vapor deposition apparatus
Grant 9,493,875 - Um November 15, 2 | 2016-11-15 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160289831 - JE; Sung-Tae ; et al. | 2016-10-06 |
Substrate Processing Device
App 20160289834 - JE; Sung-Tae ; et al. | 2016-10-06 |
Method and apparatus for manufacturing three-dimensional-structure memory device
Grant 9,425,057 - Cho , et al. August 23, 2 | 2016-08-23 |
Substrate processing device equipped with semicircle shaped antenna
Grant 9,416,451 - Je , et al. August 16, 2 | 2016-08-16 |
Method And Apparatus For Depositing Amorphous Silicon Film
App 20160211141 - SHIN; Seung-Woo ; et al. | 2016-07-21 |
Method and apparatus for manufacturing three-dimensional-structure memory device
Grant 9,396,954 - Cho , et al. July 19, 2 | 2016-07-19 |
Substrate Treatment Apparatus
App 20160195331 - HYON; Jun-Jin ; et al. | 2016-07-07 |
Substrate processing device with connection space
Grant 9,368,380 - Yang , et al. June 14, 2 | 2016-06-14 |
Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device
Grant 9,312,125 - Kim , et al. April 12, 2 | 2016-04-12 |
Substrate Supporting Unit, Substrate Processing Apparatus, And Method Of Manufacturing Substrate Supporting Unit
App 20160049317 - LEE; Dong-Keun ; et al. | 2016-02-18 |
Substrate Processing Device
App 20160013086 - YANG; Il-Kwang ; et al. | 2016-01-14 |
Apparatus For Processing Substrate
App 20150380284 - YANG; Il-Kwang ; et al. | 2015-12-31 |
Apparatus For Processing Substrate
App 20150369539 - YANG; Il-Kwang ; et al. | 2015-12-24 |
Substrate-processing Device
App 20150337460 - YANG; Il-Kwang ; et al. | 2015-11-26 |
Substrate Treatment Apparatus, And Method For Controlling Temperature Of Heater
App 20150299860 - JE; Sung-Tae ; et al. | 2015-10-22 |
Purge Chamber, And Substrate-processing Apparatus Including Same
App 20150267291 - Yang; Il-Kwang ; et al. | 2015-09-24 |
Substrate Processing Apparatus
App 20150252476 - Yang; Il-Kwang ; et al. | 2015-09-10 |
Fume Removal Device And Substrate Treatment Device
App 20150228518 - Hyon; Jun-Jin | 2015-08-13 |
Substrate Transfer Robot and Substrate Processing Apparatus Using The Same
App 20150228520 - Hyon; Jun-Jin ; et al. | 2015-08-13 |
Substrate Processing Device
App 20150211116 - Yang; Il-Kwang ; et al. | 2015-07-30 |
Substrate Processing Device
App 20150191821 - Yang; Il-Kwang ; et al. | 2015-07-09 |
Cyclic Deposition Method for Thin Film Formation, Semiconductor Manufacturing Method, and Semiconductor Device
App 20150187560 - Kim; Hai-Won ; et al. | 2015-07-02 |
Substrate Processing Module, Substrate Processing Apparatus Including the same, and Substrate Transferring Method
App 20150179489 - Hyon; Jun-Jin ; et al. | 2015-06-25 |
Substrate Processing Apparatus
App 20150176128 - Song; Byoung-Gyu ; et al. | 2015-06-25 |
Apparatus For Processing Substrate
App 20150136026 - Yang; Il-Kwang ; et al. | 2015-05-21 |
Apparatus For Processing Substrate
App 20150122177 - Yang; Il-Kwang ; et al. | 2015-05-07 |
Heater Moving Type Substrate Processing Apparatus
App 20150044622 - Yang; Il-Kwang ; et al. | 2015-02-12 |
Production method for semiconductor device
Grant 8,937,012 - Kim , et al. January 20, 2 | 2015-01-20 |
Substrate Processing Apparatus Including Auxiliary Gas Supply Port
App 20150013909 - Yang; Il-Kwang ; et al. | 2015-01-15 |
Apparatus For Processing Substrate For Supplying Reaction Gas Having Phase Difference
App 20140345801 - Yang; Il-Kwang ; et al. | 2014-11-27 |
Substrate Processing Apparatus Including Processing Unit
App 20140345528 - Yang; Il-Kwang ; et al. | 2014-11-27 |
Substrate Processing Apparatus Including Heat-shield Plate
App 20140348617 - Yang; Il-Kwang ; et al. | 2014-11-27 |
Substrate Processing Module And Substrate Processing Apparatus Including The Same
App 20140341682 - Yang; Il-Kwang ; et al. | 2014-11-20 |
Apparatus For Processing Apparatus Having Side Pumping Type
App 20140331933 - Yang; Il-Kwang ; et al. | 2014-11-13 |
Chemical vapor deposition apparatus for equalizing heating temperature
Grant 8,876,976 - Um November 4, 2 | 2014-11-04 |
Substrate Processing Apparatus Including Exhaust Ports And Substrate Processing Method
App 20140315375 - Yang; Il-Kwang ; et al. | 2014-10-23 |
Showerhead Having Cooling System And Substrate Processing Apparatus Including The Showerhead
App 20140311411 - Yang; Il-Kwang ; et al. | 2014-10-23 |
Method And Apparatus For Manufacturing Three-dimensional-structure Memory Device
App 20140261186 - CHO; Sung Kil ; et al. | 2014-09-18 |
Method for depositing cyclic thin film
Grant 8,828,890 - Kim , et al. September 9, 2 | 2014-09-09 |
Equipment For Manufacturing Semiconductor
App 20140209024 - Kim; Young Dae ; et al. | 2014-07-31 |
Shower Head Unit And Chemical Vapor Deposition Apparatus
App 20140202388 - UM; Pyung-yong | 2014-07-24 |
Equipment For Manufacturing Semiconductor
App 20140190410 - Kim; Young Dae ; et al. | 2014-07-10 |
Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion plates
Grant 8,771,418 - Je , et al. July 8, 2 | 2014-07-08 |
Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unit
Grant 8,771,417 - Yoon , et al. July 8, 2 | 2014-07-08 |
Equipment For Manufacturing Semiconductor
App 20140174357 - Kim; Young Dae ; et al. | 2014-06-26 |
Substrate Supporting Unit And Substrate Processing Apparatus Manufacturing Method Of The Substrate Supporting Unit
App 20140174356 - Kim; Hai Won ; et al. | 2014-06-26 |
Equipment For Manufacturing Semiconductor
App 20140144375 - Kim; Young Dae ; et al. | 2014-05-29 |
CVD apparatus having a rotating heater
Grant 8,585,823 - Um November 19, 2 | 2013-11-19 |
Substrate processing apparatus and method
Grant 8,528,499 - Je , et al. September 10, 2 | 2013-09-10 |
Substrate Processing Device For Supplying Reaction Gas Through Symmetry-type Inlet And Outlet
App 20130186337 - Je; Sung Tae ; et al. | 2013-07-25 |
Substrate Processing Device Equipped With Semicircle Shaped Antenna
App 20130180453 - Je; Sung Tae ; et al. | 2013-07-18 |
Method And Apparatus For Manufacturing Three-dimensional-structure Memory Device
App 20130178066 - Cho; Sung Kil ; et al. | 2013-07-11 |
Method And Apparatus For Manufacturing Three-dimensional-structure Memory Device
App 20130171827 - Cho; Sung Kil ; et al. | 2013-07-04 |
Substrate-processing Apparatus And Substrate-transferring Method
App 20130149078 - Je; Sung Tae ; et al. | 2013-06-13 |
Method For Manufacturing A Semiconductor Device
App 20130130480 - Kim; Hai Won ; et al. | 2013-05-23 |
Method For Depositing Cyclic Thin Film
App 20130115783 - Kim; Hai Won ; et al. | 2013-05-09 |
Method For Depositing Cyclic Thin Film
App 20130101752 - Kim; Hai Won ; et al. | 2013-04-25 |
Substrate processing apparatus and method
Grant 8,312,840 - Yang November 20, 2 | 2012-11-20 |
Partition-type heating apparatus
Grant 8,030,597 - Um October 4, 2 | 2011-10-04 |
Substrate Processing Apparatus And Method
App 20110028001 - Je; Sung-Tae ; et al. | 2011-02-03 |
Substrate Processing Apparatus And Method
App 20110021034 - Yang; Il-Kwang | 2011-01-27 |
Apparatus And Method For Processing Substrate
App 20110014397 - Yang; Il-Kwang | 2011-01-20 |
Apparatus And Method For Processing Substrate
App 20110000618 - Yang; Il-Kwang | 2011-01-06 |
Apparatus And Method For Processing Substrate
App 20100330301 - Yang; Il-Kwang | 2010-12-30 |
Plasma Processing Apparatus And Plasma Processing Method
App 20100319621 - Woo; Sang-Ho ; et al. | 2010-12-23 |
Substrate Supporting Unit, Substrate Processing Apparatus, And Method Of Manufacturing Substrate Supporting Unit
App 20100319855 - Lee; Dong-Keun ; et al. | 2010-12-23 |
Plasma Processing Apparatus And Method
App 20100276393 - Woo; Sang-Ho ; et al. | 2010-11-04 |
Exhaust Unit, Exhaust Method Using The Exhaust Unit, And Substrate Processing Apparatus Including The Exhaust Unit
App 20100206231 - Yoon; Song Keun ; et al. | 2010-08-19 |
Showerhead, Substrate Processing Apparatus Including The Showerhead, And Plasma Supplying Method Using The Showerhead
App 20100196625 - Yoon; Song Keun ; et al. | 2010-08-05 |
Substrate Processing Apparatus
App 20100175622 - Yoon; Song Keun ; et al. | 2010-07-15 |
Method Of Fabricating Polycrystalline Silicon Thin Film
App 20100035417 - Um; Pyung-Yong | 2010-02-11 |
Partition-type Heating Apparatus
App 20090218331 - Um; Pyung-yong | 2009-09-03 |
Method for depositing nitride film using chemical vapor deposition apparatus of single chamber type
Grant 7,326,438 - Um February 5, 2 | 2008-02-05 |
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