ETO; Hideo

Patent Applications and Registrations

Patent applications and USPTO patent grants for ETO; Hideo.The latest application filed is for "bonding apparatus and bonding method".

Company Profile

1.22.35

ETO; Hideo - Yokkaichi JP
Eto; Hideo - Mie JP
ETO; Hideo - Yokkaichi-shi JP
Eto; Hideo - Mie-ken JP
Eto; Hideo - Yokohama JP
ETO; Hideo - Kanagawa-ken JP
Eto; Hideo - Yokohama-shi JP
Eto; Hideo - Kanagawa JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Bonding Apparatus And Bonding Method App 20210287926 - ETO; Hideo	2021-09-16
Substrate supporting device and plasma processing apparatus Grant 11,094,574 - Eto August 17, 2	2021-08-17
Plasma processing-apparatus processing object support platform, plasma processing apparatus, and plasma processing method Grant 10,818,535 - Eto October 27, 2	2020-10-27
Substrate Supporting Device And Plasma Processing Apparatus App 20200035536 - ETO; Hideo	2020-01-30
Silicon carbide member for plasma processing apparatus Grant 10,280,121 - Okesaku , et al.	2019-05-07
Plasma Processing-apparatus Processing Object Support Platform, Plasma Processing Apparatus, And Plasma Processing Method App 20190096731 - ETO; Hideo	2019-03-28
Substrate processing apparatus and control method of substrate processing apparatus Grant 10,115,615 - Eto October 30, 2	2018-10-30
Sensing System, Sensing Wafer, And Plasma Processing Apparatus App 20180261481 - ETO; Hideo	2018-09-13
Silicon Carbide Member For Plasma Processing Apparatus, And Production Method Therefor App 20180072629 - OKESAKU; Masahiro ; et al.	2018-03-15
Plasma Processing-apparatus Processing Object Support Platform, Plasma Processing Apparatus, And Plasma Processing Method App 20180012784 - ETO; Hideo	2018-01-11
Substrate Processing Apparatus And Control Method Of Substrate Processing Apparatus App 20170263477 - ETO; Hideo	2017-09-14
Upper Electrode, Edge Ring, And Plasma Processing Apparatus App 20160284522 - ETO; Hideo ; et al.	2016-09-29
Electrostatic chuck, mount plate support, and manufacturing method of electrostatic chuck Grant 9,370,920 - Eto , et al. June 21, 2	2016-06-21
Gas supply member, plasma treatment method, and method of forming yttria-containing film Grant 9,236,229 - Eto , et al. January 12, 2	2016-01-12
Seal member, etching apparatus, and a method of manufacturing a semiconductor device Grant 9,111,969 - Eto , et al. August 18, 2	2015-08-18
Substrate Processing Apparatus And Control Method App 20150143146 - ETO; Hideo ; et al.	2015-05-21
Electrostatic Chuck, Mount Plate Support, And Manufacturing Method Of Electrostatic Chuck App 20150043122 - ETO; Hideo ; et al.	2015-02-12
Pressure controlling apparatus Grant 8,833,388 - Eto , et al. September 16, 2	2014-09-16
Gas Supply Member, Plasma Processing Apparatus And Method Of Fabricating Gas Supply Member App 20140231251 - Hashiguchi; Hisashi ; et al.	2014-08-21
Plasma Processing Apparatus App 20140231018 - AOKI; Yoshifumi ; et al.	2014-08-21
Electrode For Plasma Processing Apparatus, Method For Manufacturing The Same, And Plasma Processing Apparatus App 20140217891 - ETO; Hideo ; et al.	2014-08-07
Power supply control device, plasma processing device, and plasma processing method Grant 8,760,053 - Eto , et al. June 24, 2	2014-06-24
Flow sensor, mass flow controller, and method for manufacturing flow sensor Grant 8,689,623 - Eto , et al. April 8, 2	2014-04-08
Mass flow controller, mass flow controller system, substrate processing device, and gas flow rate adjusting method Grant 8,651,135 - Eto , et al. February 18, 2	2014-02-18
Seal Member, Etching Apparatus, And A Method Of Manufacturing A Semiconductor Device App 20130330929 - ETO; Hideo ; et al.	2013-12-12
Etching Device And Focus Ring App 20130168020 - HASHIGUCHI; Hisashi ; et al.	2013-07-04
Flow Sensor, Mass Flow Controller, And Method For Manufacturing Flow Sensor App 20130074593 - ETO; Hideo ; et al.	2013-03-28
Coaxial Cable And Substrate Processing Apparatus App 20130008603 - Eto; Hideo ; et al.	2013-01-10
Plasma Treatment Apparatus App 20120247667 - HASHIGUCHI; Hisashi ; et al.	2012-10-04
Pressure Controlling Apparatus App 20120227830 - Eto; Hideo ; et al.	2012-09-13
Plasma Processing Apparatus App 20120216955 - ETO; Hideo ; et al.	2012-08-30
Protective Film, Method For Forming The Same, Semiconductor Manufacturing Apparatus, And Plasma Treatment Apparatus App 20120040132 - ETO; Hideo ; et al.	2012-02-16
Power Supply Control Device, Plasma Processing Device, And Plasma Processing Method App 20120038277 - ETO; Hideo ; et al.	2012-02-16
Gas Supply Member, Plasma Treatment Method, And Method Of Forming Yttria-containing Film App 20120037596 - ETO; Hideo ; et al.	2012-02-16
Mass Flow Controller, Mass Flow Controller System, Substrate Processing Device, And Gas Flow Rate Adjusting Method App 20120000542 - ETO; Hideo ; et al.	2012-01-05
Mass Flow Control System, Plasma Processing Apparatus, And Flow Control Method App 20120000607 - Ito; Atsushi ; et al.	2012-01-05
Plasma Treatment Apparatus And Plasma Treatment Method App 20120000887 - Eto; Hideo ; et al.	2012-01-05
Optical biosensor Grant 7,678,567 - Uematsu , et al. March 16, 2	2010-03-16
Machining Electrode, Electrochemical Machining Apparatus, Electrochemical Machining Method And Method For Manufacturing Structure Body App 20100051475 - ETO; Hideo ; et al.	2010-03-04
Concentration measuring method, concentration measuring kit, and sensor chip for use in the method Grant 7,498,145 - Uchiyama , et al. March 3, 2	2009-03-03
Optical waveguide type iontophoresis sensor chip and method for packaging sensor chip Grant 7,410,614 - Uchiyama , et al. August 12, 2	2008-08-12
Concentration measuring method, concentration measuring kit, and sensor chip for use in the method App 20060194345 - Uchiyama; Kenichi ; et al.	2006-08-31
Optical waveguide sensor, device, system and method for glucose measurement Grant 7,054,514 - Uchiyama , et al. May 30, 2	2006-05-30
Optical waveguide type iontophoresis sensor chip and method for packaging sensor chip App 20060063984 - Uchiyama; Kenichi ; et al.	2006-03-23
Optical biosensor App 20060019374 - Uematsu; Ikuo ; et al.	2006-01-26
Optical waveguide sensor, device, system and method for glucose measurement App 20050147342 - Uchiyama, Kenichi ; et al.	2005-07-07
Optical waveguide sensor, device, system and method for glucose measurement Grant 6,903,815 - Uchiyama , et al. June 7, 2	2005-06-07
Antigen measuring device and method thereof, an antibody chip package and a pallet App 20050084909 - Uchiyama, Kenichi ; et al.	2005-04-21
Ink jet head having a nozzle plate Grant 6,767,078 - Sato , et al. July 27, 2	2004-07-27
Optical waveguide sensor, device, system and method for glucose measurement App 20030225322 - Uchiyama, Kenichi ; et al.	2003-12-04
Ink jet head manufacturing method, ink jet head, ink applying apparatus, ink applying method, and organic electro luminescence display apparatus and method of manufacturing the same App 20030030696 - Sato, Akira ; et al.	2003-02-13

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