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Patent applications and USPTO patent grants for Estoque; Marc.The latest application filed is for "edge ring centering method using ring dynamic alignment data".
Patent | Date |
---|---|
Edge ring centering method using ring dynamic alignment data Grant 10,541,168 - Tan , et al. Ja | 2020-01-21 |
Front opening ring pod Grant 10,062,589 - Wong , et al. August 28, 2 | 2018-08-28 |
Front opening ring pod Grant 10,062,590 - Wong , et al. August 28, 2 | 2018-08-28 |
Edge Ring Centering Method Using Ring Dynamic Alignment Data App 20180138069 - Tan; Ali Sucipto ;   et al. | 2018-05-17 |
Front Opening Ring Pod App 20180068879 - Wong; Scott ;   et al. | 2018-03-08 |
Front Opening Ring Pod App 20180040492 - Wong; Scott ;   et al. | 2018-02-08 |
Front opening ring pod Grant 9,881,820 - Wong , et al. January 30, 2 | 2018-01-30 |
Front Opening Ring Pod App 20180019142 - Wong; Scott ;   et al. | 2018-01-18 |
Front Opening Ring Pod App 20170117170 - Wong; Scott ;   et al. | 2017-04-27 |
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