| Patent | Date |
|---|
Surface acoustic wave sensor
Grant 9,739,675 - Teshigahara , et al. August 22, 2 | 2017-08-22 |
Integrated device
Grant 9,478,503 - Makihata , et al. October 25, 2 | 2016-10-25 |
Multi-axis Sensor And Method For Manufacturing The Same
App 20160054352 - KANG; Pil Joong ; et al. | 2016-02-25 |
Touch sensor system
Grant 9,215,089 - Muroyama , et al. December 15, 2 | 2015-12-15 |
Surface Acoustic Wave Sensor
App 20150357551 - TESHIGAHARA; Akihiko ; et al. | 2015-12-10 |
Integrated Device
App 20150333046 - MAKIHATA; Mitsutoshi ; et al. | 2015-11-19 |
Dynamic quantity sensor and dynamic quantity sensor system
Grant 9,134,189 - Hata , et al. September 15, 2 | 2015-09-15 |
Acoustic Transducer And Package Module Including The Same
App 20150110309 - Park; Yoon Sok ; et al. | 2015-04-23 |
Sensor device having electrode draw-out portions through side of substrate
Grant 8,823,114 - Tanaka , et al. September 2, 2 | 2014-09-02 |
Wiring connection method and functional device
Grant 8,796,850 - Tanaka , et al. August 5, 2 | 2014-08-05 |
Dynamic Quantity Sensor And Dynamic Quantity Sensor System
App 20140137670 - Hata; Yoshiyuki ; et al. | 2014-05-22 |
Sheet-like tactile sensor system
Grant 8,613,231 - Muroyama , et al. December 24, 2 | 2013-12-24 |
Method for fabricating micromachine component of resin
Grant 8,481,248 - Honda , et al. July 9, 2 | 2013-07-09 |
Sensor system
Grant 8,336,399 - Muroyama , et al. December 25, 2 | 2012-12-25 |
Sheet-like Tactile Sensor System
App 20120247226 - Muroyama; Masanori ; et al. | 2012-10-04 |
Touch Sensor System
App 20120254490 - Muroyama; Masanori ; et al. | 2012-10-04 |
Wiring Connection Method And Functional Device
App 20120217638 - Tanaka; Shuji ; et al. | 2012-08-30 |
Sensor Device And Method For Producing Sensor Device
App 20120199921 - Tanaka; Shuji ; et al. | 2012-08-09 |
Sensor System
App 20110083517 - MUROYAMA; Masanori ; et al. | 2011-04-14 |
Driving mechanism using shape memory alloys including a magnetic latch
Grant 7,723,896 - Esashi , et al. May 25, 2 | 2010-05-25 |
Reactor and production thereof, reformer, and power supply system including paired channels having a heat exchanger formed thereon
Grant 7,560,081 - Takai , et al. July 14, 2 | 2009-07-14 |
Method for Fabricating Micromachine Component of Resin
App 20090035706 - Honda; Nao ; et al. | 2009-02-05 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method
Grant 7,466,065 - Sanpei , et al. December 16, 2 | 2008-12-16 |
Driving Mechanism Using Shape Memory Alloys And Devices Equipped With The Same
App 20080227060 - Esashi; Masayoshi ; et al. | 2008-09-18 |
Driving mechanism and micro-mirror device provided with the same
Grant 7,405,506 - Esashi , et al. July 29, 2 | 2008-07-29 |
Micromirror and micromirror device
Grant 7,372,620 - Esashi , et al. May 13, 2 | 2008-05-13 |
Probe Head Manufacturing Method
App 20080017609 - Takahashi; Hirokazu ; et al. | 2008-01-24 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus
Grant 7,276,707 - Iwasaki , et al. October 2, 2 | 2007-10-02 |
Micromirror and micromirror device
Grant 7,271,946 - Esashi , et al. September 18, 2 | 2007-09-18 |
Micromirror And Micromirror Device
App 20070177242 - ESASHI; Masayoshi ; et al. | 2007-08-02 |
Micromirror And Micromirror Device
App 20070171501 - ESASHI; Masayoshi ; et al. | 2007-07-26 |
Scanning mirror unit and beam scanning probe
Grant 7,236,283 - Kikuchi , et al. June 26, 2 | 2007-06-26 |
Active slender tubes and method of making the same
Grant 7,223,329 - Esashi , et al. May 29, 2 | 2007-05-29 |
Active tube and active tube system
App 20070083084 - Esashi; Masayoshi ; et al. | 2007-04-12 |
Functional multilayer film and method for manufacturing the same
Grant 7,177,519 - Someno , et al. February 13, 2 | 2007-02-13 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method
Grant 7,170,216 - Sanpei , et al. January 30, 2 | 2007-01-30 |
Piezoelectric material working method
App 20070000864 - Abe; Takashi ; et al. | 2007-01-04 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method
App 20060273692 - Sanpei; Hirokazu ; et al. | 2006-12-07 |
Method of fabricating mold for glass press
App 20060130527 - Tanaka; Shuji ; et al. | 2006-06-22 |
Active capillary
App 20060074372 - Haga; Yoichi ; et al. | 2006-04-06 |
Driving mechanism and micro-mirror device provided with the same
App 20060033389 - Esashi; Masayoshi ; et al. | 2006-02-16 |
Recording/reproducing head, method of producing the same, recording apparatus and reproducing apparatus
App 20060002273 - Takahashi; Hirokazu ; et al. | 2006-01-05 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus
App 20050263713 - Iwasaki, Yuichi ; et al. | 2005-12-01 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus
Grant 6,953,938 - Iwasaki , et al. October 11, 2 | 2005-10-11 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method
App 20050195056 - Sanpei, Hirokazu ; et al. | 2005-09-08 |
Oscillatory type pressure sensor
Grant 6,938,489 - Esashi , et al. September 6, 2 | 2005-09-06 |
Active guide wire and method of making the same
Grant 6,936,015 - Esashi , et al. August 30, 2 | 2005-08-30 |
Anticorrosive vacuum sensor
Grant 6,935,181 - Miyashita , et al. August 30, 2 | 2005-08-30 |
Recording / reproducing head, recording / reproducing head array, method of producing the same, and recording apparatus and reproducing apparatus
App 20050128928 - Takahashi, Hirokazu ; et al. | 2005-06-16 |
Connecting member, a micro-switch, a method for manufacturing a connecting member, and a method for manufacturing a micro-switch
Grant 6,903,637 - Miyazaki , et al. June 7, 2 | 2005-06-07 |
Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator
App 20050052723 - Watanabe, Shin-Ichiro ; et al. | 2005-03-10 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus
App 20050035300 - Iwasaki, Yuichi ; et al. | 2005-02-17 |
Active slender tubes and method of making the same
App 20050006009 - Esashi, Masayoshi ; et al. | 2005-01-13 |
Scanning mirror unit and beam scanning probe
App 20040262507 - Kikuchi, Naoki ; et al. | 2004-12-30 |
Reactor and production thereof, reformer, and power supply system
App 20040241061 - Takai, Yuichi ; et al. | 2004-12-02 |
Vibrating type pressure sensor
App 20040231424 - Esashi, Masayoshi ; et al. | 2004-11-25 |
Reflective moveable diaphragm unit and pressure sensor containing same
Grant 6,820,487 - Esashi , et al. November 23, 2 | 2004-11-23 |
Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method
Grant 6,818,911 - Tamamori , et al. November 16, 2 | 2004-11-16 |
Anticorrosive vacuum sensor
App 20040206185 - Miyashita, Haruzo ; et al. | 2004-10-21 |
Pressure transducer and manufacturing method thereof
Grant 6,756,248 - Ikeda , et al. June 29, 2 | 2004-06-29 |
Functional multilayer film and method for manufacturing the same
App 20040109990 - Someno, Yoshihiro ; et al. | 2004-06-10 |
Contractor, method for manufacturing the same, and probe card using the same
Grant 6,747,465 - Esashi , et al. June 8, 2 | 2004-06-08 |
Accelerometer and spherical sensor type measuring instrument
Grant 6,679,118 - Esashi , et al. January 20, 2 | 2004-01-20 |
Active slender tubes and method of making the same
Grant 6,672,338 - Esashi , et al. January 6, 2 | 2004-01-06 |
Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method
App 20030218140 - Tamamori, Kenji ; et al. | 2003-11-27 |
Capacitive vacuum sensor
Grant 6,598,483 - Miyashita , et al. July 29, 2 | 2003-07-29 |
Active guide wire and method of making the same
App 20030097080 - Esashi, Masayoshi ; et al. | 2003-05-22 |
Connecting member, a micro-switch, a method for manufacturing a connecting member, and a method for manufacturing a micro-switch
App 20030093895 - Miyazaki, Masaru ; et al. | 2003-05-22 |
Thermoelectric device and optical module made with the device and method for producing them
App 20030057560 - Tatoh, Nobuyoshi ; et al. | 2003-03-27 |
Capacitive micro sensor, gyroscope, and input device
Grant 6,536,281 - Abe , et al. March 25, 2 | 2003-03-25 |
Pressure sensor and method of manufacturing the same
App 20020162399 - Esashi, Masayoshi ; et al. | 2002-11-07 |
Microactuator, method for making the same, and magnetic head unit and magnetic recording apparatus using the same
App 20020121839 - Abe, Munemitsu ; et al. | 2002-09-05 |
Pressure transducer and manufacturing method thereof
Grant 6,441,451 - Ikeda , et al. August 27, 2 | 2002-08-27 |
Microactuator, magnetic head device, and magnetic recording apparatus
Grant 6,424,504 - Abe , et al. July 23, 2 | 2002-07-23 |
Pressure transducer and manufacturing method thereof
App 20020093038 - Ikeda, Masaharu ; et al. | 2002-07-18 |
Inclinometer
App 20020073563 - Toda, Risaku ; et al. | 2002-06-20 |
Contactor, method for manufacturing the same, and probe card using the same
App 20020057099 - Esashi, Masayoshi ; et al. | 2002-05-16 |
Anticorrosive vacuum sensor
App 20020019711 - Miyashita, Haruzo ; et al. | 2002-02-14 |
Capacitive vacuum sensor
App 20020011114 - Miyashita, Haruzo ; et al. | 2002-01-31 |
Ink Jet Head And Method Of Producing The Same
App 20020001018 - KATOH, SEIICHI ; et al. | 2002-01-03 |
Gyroscope and input unit using the same
App 20010047687 - Abe, Munemitsu ; et al. | 2001-12-06 |
Method of working piezoelectric substance and method of manufacturing composite piezoelectric substance
App 20010042291 - Esashi, Masayoshi ; et al. | 2001-11-22 |
Capacitive micro sensor, gyroscope, and input device
App 20010008089 - Abe, Munemitsu ; et al. | 2001-07-19 |
Semiconductor acceleration sensor and manufacturing method thereof
Grant 6,153,917 - Matsunaga , et al. November 28, 2 | 2000-11-28 |
Capacitive transducer having guard electrode and buffer amlifying means
Grant 6,145,384 - Ikeda , et al. November 14, 2 | 2000-11-14 |
Planar type electromagnetic relay and method of manufacturing thereof
Grant 5,872,496 - Asada , et al. February 16, 1 | 1999-02-16 |
Planar type mirror galvanometer incorpotating a displacement detection function
Grant 5,767,666 - Asada , et al. June 16, 1 | 1998-06-16 |
Planar type mirror galvanometer and method of manufacture
Grant 5,606,447 - Asada , et al. February 25, 1 | 1997-02-25 |
Electromagnetically coupled fail-safe logic circuit
Grant 5,442,303 - Asada , et al. August 15, 1 | 1995-08-15 |
Selective chemical sensitive FET transducer
Grant 4,218,298 - Shimada , et al. August 19, 1 | 1980-08-19 |
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