Ershov; Alexander I.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ershov; Alexander I..The latest application filed is for "method of and apparatus for in-situ repair of reflective optic".
Company Profile
7.143.124
- Ershov; Alexander I. - Escondido CA
- Ershov; Alexander I. - San Diego CA
- Ershov; Alexander I - San Diego CA
Patent Activity
| Patent | Date |
|---|---|
| Method Of And Apparatus For In-situ Repair Of Reflective Optic App 20210055665 - Ershov; Alexander I. | 2021-02-25 |
| Faceted EUV optical element Grant 10,635,002 - Brandt , et al. | 2020-04-28 |
| Apparatus for and method of active cleaning of EUV optic with RF plasma field Grant 10,493,504 - Ershov De | 2019-12-03 |
| Method of controlling debris in an EUV light source Grant 10,490,313 - Ershov , et al. Nov | 2019-11-26 |
| Apparatus for and method of source material delivery in a laser produced plasma EUV light source Grant 10,237,960 - Ershov , et al. | 2019-03-19 |
| Method Of Controlling Debris In An Euv Light Source App 20190080811 - ERSHOV; Alexander I. ; et al. | 2019-03-14 |
| Harsh environment optical element protection Grant 10,185,234 - Ershov , et al. Ja | 2019-01-22 |
| Apparatus For And Method Of Controlling Debris In An Euv Light Source App 20180330841 - Ershov; Alexander I. ; et al. | 2018-11-15 |
| Apparatus for and method of controlling debris in an EUV light source Grant 10,128,017 - Ershov , et al. November 13, 2 | 2018-11-13 |
| Apparatus For And Method Of Source Material Delivery In A Laser Produced Plasma Euv Light Source App 20180027642 - Ershov; Alexander I ; et al. | 2018-01-25 |
| Light collector mirror carrier Grant 9,844,804 - De Dea , et al. December 19, 2 | 2017-12-19 |
| Apparatus for and method of source material delivery in a laser produced plasma EUV light source Grant 9,795,023 - Ershov , et al. October 17, 2 | 2017-10-17 |
| Drive laser for EUV light source Grant 9,735,535 - Ershov , et al. August 15, 2 | 2017-08-15 |
| Apparatus For And Method Of Active Cleaning Of Euv Optic With Rf Plasma Field App 20170095843 - ERSHOV; Alexander I. | 2017-04-06 |
| Faceted Euv Optical Element App 20170097572 - Brandt; David C. ; et al. | 2017-04-06 |
| Transport system for an extreme ultraviolet light source Grant 9,560,730 - De Dea , et al. January 31, 2 | 2017-01-31 |
| Transport system for an extreme ultraviolet light source Grant 9,557,650 - De Dea , et al. January 31, 2 | 2017-01-31 |
| Faceted EUV optical element Grant 9,541,840 - Brandt , et al. January 10, 2 | 2017-01-10 |
| Method of temperature compensation in high power focusing system for EUV LPP source Grant 9,541,838 - Ershov January 10, 2 | 2017-01-10 |
| Apparatus for and method of active cleaning of EUV optic with RF plasma field Grant 9,539,622 - Ershov January 10, 2 | 2017-01-10 |
| Systems and methods for buffer gas flow stabilization in a laser produced plasma light source Grant 9,516,730 - Fleurov , et al. December 6, 2 | 2016-12-06 |
| Faceted Euv Optical Element App 20160179012 - BRANDT; David C. ; et al. | 2016-06-23 |
| Apparatus For And Method Of Source Material Delivery In A Laser Produced Plasma Euv Light Source App 20160174352 - Ershov; Alexander I. ; et al. | 2016-06-16 |
| Apparatus For And Method Of Temperature Compensation In High Power Focusing System For Euv Lpp Source App 20160161855 - ERSHOV; Alexander I. | 2016-06-09 |
| Method Of And Apparatus For In-situ Repair Of Reflective Optic App 20160091803 - ERSHOV; Alexander I. | 2016-03-31 |
| Apparatus for and method of source material delivery in a laser produced plasma EUV light source Grant 9,301,382 - Ershov , et al. March 29, 2 | 2016-03-29 |
| Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source Grant 9,280,053 - Ershov March 8, 2 | 2016-03-08 |
| Light Collector Mirror Carrier App 20150273542 - De Dea; Silvia ; et al. | 2015-10-01 |
| Transport System For An Extreme Ultraviolet Light Source App 20150282287 - De Dea; Silvia ; et al. | 2015-10-01 |
| Apparatus For And Method Of Active Cleaning Of Euv Optic With Rf Plasma Field App 20150266067 - ERSHOV; Alexander I. | 2015-09-24 |
| System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output Grant 9,119,278 - Chrobak , et al. August 25, 2 | 2015-08-25 |
| Light collector mirror cleaning Grant 9,073,098 - De Dea , et al. July 7, 2 | 2015-07-07 |
| Systems and methods for cooling an optic Grant 9,066,412 - Ershov , et al. June 23, 2 | 2015-06-23 |
| Apparatus For And Method Of Source Material Delivery In A Laser Produced Plasma Euv Light Source App 20150156855 - ERSHOV; Alexander I. ; et al. | 2015-06-04 |
| Systems and methods for optics cleaning in an EUV light source Grant 9,000,404 - Bykanov , et al. April 7, 2 | 2015-04-07 |
| Transport System For An Extreme Ultraviolet Light Source App 20150069273 - De Dea; Silvia ; et al. | 2015-03-12 |
| Apparatus For And Method Of Temperature Compensation In High Power Focusing System For Euv Lpp Source App 20150062544 - ERSHOV; Alexander I. | 2015-03-05 |
| Laser system Grant 8,908,735 - Ershov , et al. December 9, 2 | 2014-12-09 |
| Apparatus for protecting EUV optical elements Grant 8,901,523 - Ershov , et al. December 2, 2 | 2014-12-02 |
| Drive laser delivery systems for EUV light source Grant 8,829,478 - Ershov September 9, 2 | 2014-09-09 |
| Laser-produced-plasma EUV light source Grant 8,785,892 - Ershov , et al. July 22, 2 | 2014-07-22 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20140110609 - Bykanov; Alexander N. ; et al. | 2014-04-24 |
| System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output App 20140103229 - Chroback; Christopher C. ; et al. | 2014-04-17 |
| Method Of And Apparatus For In-situ Repair Of Reflective Optic App 20140102881 - ERSHOV; Alexander I. | 2014-04-17 |
| Harsh Environment Optical Element Protection App 20140098413 - ERSHOV; Alexander I. ; et al. | 2014-04-10 |
| Drive Laser Delivery Systems For Euv Light Source App 20140077104 - Ershov; Alexander I. | 2014-03-20 |
| System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output Grant 8,653,491 - Partlo , et al. February 18, 2 | 2014-02-18 |
| Systems and methods for optics cleaning in an EUV light source Grant 8,633,459 - Bykanov , et al. January 21, 2 | 2014-01-21 |
| Drive laser delivery systems for EUV light source Grant 8,604,452 - Ershov December 10, 2 | 2013-12-10 |
| Drive Laser For Euv Light Source App 20130321901 - Ershov; Alexander I. ; et al. | 2013-12-05 |
| Light Collector Mirror Cleaning App 20130306110 - De Dea; Silvia ; et al. | 2013-11-21 |
| Debris protection system having a magnetic field for an EUV light source Grant 8,519,366 - Bykanov , et al. August 27, 2 | 2013-08-27 |
| Drive laser for EUV light source Grant 8,514,486 - Ershov , et al. August 20, 2 | 2013-08-20 |
| LPP EUV light source drive laser system Grant 8,461,560 - Ershov , et al. June 11, 2 | 2013-06-11 |
| Systems And Methods For Buffer Gas Flow Stabilization In A Laser Produced Plasma Light Source App 20120313016 - Fleurov; Vladimir B. ; et al. | 2012-12-13 |
| Laser-Produced-Plasma EUV Light Source App 20120305810 - Ershov; Alexander I. ; et al. | 2012-12-06 |
| EUV light producing system and method utilizing an alignment laser Grant 8,304,752 - Fomenkov , et al. November 6, 2 | 2012-11-06 |
| Drive Laser Delivery Systems For Euv Light Source App 20120235066 - Ershov; Alexander I. | 2012-09-20 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20120223256 - Bykanov; Alexander N. ; et al. | 2012-09-06 |
| Gas management system for a laser-produced-plasma EUV light source Grant 8,198,615 - Bykanov , et al. June 12, 2 | 2012-06-12 |
| Laser system Grant 8,170,078 - Ershov , et al. May 1, 2 | 2012-05-01 |
| Laser produced plasma EUV light source Grant 8,158,960 - Vaschenko , et al. April 17, 2 | 2012-04-17 |
| System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber Grant 8,138,487 - Vaschenko , et al. March 20, 2 | 2012-03-20 |
| Laser System App 20120002687 - Ershov; Alexander I. ; et al. | 2012-01-05 |
| EUV collector debris management Grant 8,075,732 - Partlo , et al. December 13, 2 | 2011-12-13 |
| Systems And Methods For Cooling An Optic App 20110253349 - Ershov; Alexander I. ; et al. | 2011-10-20 |
| Laser produced plasma EUV light source Grant 8,035,092 - Bykanov , et al. October 11, 2 | 2011-10-11 |
| Drive laser delivery systems for EUV light source Grant 8,017,924 - Bykanov , et al. September 13, 2 | 2011-09-13 |
| Laser system Grant 7,999,915 - Ershov , et al. August 16, 2 | 2011-08-16 |
| LPP EUV Light Source Drive Laser System App 20110192995 - Ershov; Alexander I. ; et al. | 2011-08-11 |
| Control system for a two chamber gas discharge laser system Grant RE42,588 - Fallon , et al. August 2, 2 | 2011-08-02 |
| Laser System App 20110102759 - Ershov; Alexander I. ; et al. | 2011-05-05 |
| LPP EUV light source drive laser system Grant 7,928,417 - Ershov , et al. April 19, 2 | 2011-04-19 |
| Drive laser for EUV light source App 20110058588 - Ershov; Alexander I. ; et al. | 2011-03-10 |
| Laser system Grant 7,885,309 - Ershov , et al. February 8, 2 | 2011-02-08 |
| Systems and methods for target material delivery in a laser produced plasma EUV light source Grant 7,872,245 - Vaschenko , et al. January 18, 2 | 2011-01-18 |
| Alignment Laser App 20100327192 - Fomenkov; Igor V. ; et al. | 2010-12-30 |
| Timing control for two-chamber gas discharge laser system Grant 7,852,899 - Ershov , et al. December 14, 2 | 2010-12-14 |
| Laser Produced Plasma EUV Light Source App 20100294953 - Vaschenko; Georgiy O. ; et al. | 2010-11-25 |
| Method and apparatus for EUV plasma source target delivery Grant 7,838,854 - Algots , et al. November 23, 2 | 2010-11-23 |
| Laser system Grant 7,822,092 - Ershov , et al. October 26, 2 | 2010-10-26 |
| System, Method And Apparatus For Aligning And Synchronizing Target Material For Optimum Extreme Ultraviolet Light Output App 20100258750 - Partlo; William N. ; et al. | 2010-10-14 |
| System, Method And Apparatus For Droplet Catcher For Prevention Of Backsplash In A Euv Generation Chamber App 20100258748 - Vaschenko; Georgiy O. ; et al. | 2010-10-14 |
| Laser system Grant 7,778,302 - Ershov , et al. August 17, 2 | 2010-08-17 |
| Laser system Grant 7,746,913 - Ershov , et al. June 29, 2 | 2010-06-29 |
| Gas management system for a laser-produced-plasma EUV light source App 20100140514 - Bykanov; Alexander N. ; et al. | 2010-06-10 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Grant 7,732,793 - Ershov , et al. June 8, 2 | 2010-06-08 |
| Laser produced plasma EUV light source App 20100127186 - Bykanov; Alexander N. ; et al. | 2010-05-27 |
| Laser system App 20100108913 - Ershov; Alexander I. ; et al. | 2010-05-06 |
| Immersion lithography laser light source with pulse stretcher App 20100074295 - Partlo; William N. ; et al. | 2010-03-25 |
| Laser produced plasma EUV light source Grant 7,671,349 - Bykanov , et al. March 2, 2 | 2010-03-02 |
| Debris protection system having a magnetic field for an EUV light source App 20100032590 - Bykanov; Alexander N. ; et al. | 2010-02-11 |
| Laser produced plasma euv light source App 20100024980 - Ershov; Alexander I. ; et al. | 2010-02-04 |
| Gas management system for a laser-produced-plasma EUV light source Grant 7,655,925 - Bykanov , et al. February 2, 2 | 2010-02-02 |
| Immersion lithography laser light source with pulse stretcher Grant 7,643,528 - Partlo , et al. January 5, 2 | 2010-01-05 |
| Laser system Grant 7,630,424 - Ershov , et al. December 8, 2 | 2009-12-08 |
| Drive laser delivery systems for euv light source App 20090267005 - Bykanov; Alexander N. ; et al. | 2009-10-29 |
| Laser produced plasma EUV light source Grant 7,598,509 - Ershov , et al. October 6, 2 | 2009-10-06 |
| Control system for a two chamber gas discharge laser Grant 7,596,164 - Fallon , et al. September 29, 2 | 2009-09-29 |
| Systems and methods for target material delivery in a laser produced plasma EUV light source App 20090230326 - Vaschenko; Georgiy O. ; et al. | 2009-09-17 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,567,607 - Knowles , et al. July 28, 2 | 2009-07-28 |
| High power excimer laser with a pulse stretcher Grant 7,564,888 - Ershov , et al. July 21, 2 | 2009-07-21 |
| Drive laser for EUV light source App 20090161201 - Ershov; Alexander I. ; et al. | 2009-06-25 |
| Laser system App 20090122825 - Ershov; Alexander I. ; et al. | 2009-05-14 |
| LPP EUV light source drive laser system App 20090095925 - Ershov; Alexander I. ; et al. | 2009-04-16 |
| Immersion lithography laser light source with pulse stretcher App 20090080476 - Partlo; William N. ; et al. | 2009-03-26 |
| Gas management system for a laser-produced-plasma EUV light source App 20090057567 - Bykanov; Alexander N. ; et al. | 2009-03-05 |
| Drive laser delivery systems for EUV light source Grant 7,491,954 - Bykanov , et al. February 17, 2 | 2009-02-17 |
| LPP EUV light source drive laser system Grant 7,482,609 - Ershov , et al. January 27, 2 | 2009-01-27 |
| Method and apparatus for EUV plasma source target delivery App 20080283776 - Algots; J. Martin ; et al. | 2008-11-20 |
| EUV light source Grant 7,449,704 - Fomenkov , et al. November 11, 2 | 2008-11-11 |
| Laser system App 20080267242 - Ershov; Alexander I. ; et al. | 2008-10-30 |
| LPP EUV light source drive laser system Grant 7,439,530 - Ershov , et al. October 21, 2 | 2008-10-21 |
| Laser system App 20080225908 - Ershov; Alexander I. ; et al. | 2008-09-18 |
| EUV light source Grant 7,411,203 - Fomenkov , et al. August 12, 2 | 2008-08-12 |
| Laser produced plasma EUV light source App 20080179548 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| Method and apparatus for EUV plasma source target delivery Grant 7,405,416 - Algots , et al. July 29, 2 | 2008-07-29 |
| Laser system App 20080165337 - Ershov; Alexander I. ; et al. | 2008-07-10 |
| Laser system App 20080144671 - Ershov; Alexander I. ; et al. | 2008-06-19 |
| EUV light source Grant 7,388,220 - Fomenkov , et al. June 17, 2 | 2008-06-17 |
| Laser output light pulse stretcher Grant 7,369,597 - Smith , et al. May 6, 2 | 2008-05-06 |
| EUV light source collector lifetime improvements Grant 7,365,349 - Partlo , et al. April 29, 2 | 2008-04-29 |
| Drive laser delivery systems for EUV light source App 20080087847 - Bykanov; Alexander N. ; et al. | 2008-04-17 |
| EUV light source Grant 7,323,703 - Oliver , et al. January 29, 2 | 2008-01-29 |
| EUV light source App 20080017801 - Fomenkov; Igor V. ; et al. | 2008-01-24 |
| LPP EUV light source Grant 7,317,196 - Partlo , et al. January 8, 2 | 2008-01-08 |
| Drive laser for EUV light source App 20070291350 - Ershov; Alexander I. ; et al. | 2007-12-20 |
| High power excimer laser with a pulse stretcher App 20070280308 - Ershov; Alexander I. ; et al. | 2007-12-06 |
| Collector for EUV light source Grant 7,288,778 - Partio , et al. October 30, 2 | 2007-10-30 |
| Collector for EUV light source Grant 7,288,777 - Partlo , et al. October 30, 2 | 2007-10-30 |
| High power gas discharge laser with helium purged line narrowing unit Grant 7,277,466 - Partlo , et al. October 2, 2 | 2007-10-02 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20070187627 - Ershov; Alexander I. ; et al. | 2007-08-16 |
| EUV light source optical elements App 20070170378 - Bowering; Norbert R. ; et al. | 2007-07-26 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris Grant 7,247,870 - Ershov , et al. July 24, 2 | 2007-07-24 |
| EUV light source App 20070158596 - Oliver; I. Roger ; et al. | 2007-07-12 |
| EUV light source App 20070158597 - Fomenkov; Igor V. ; et al. | 2007-07-12 |
| Lithography laser with beam delivery and beam pointing control Grant 7,230,964 - Das , et al. June 12, 2 | 2007-06-12 |
| EUV light source App 20070125970 - Fomenkov; Igor V. ; et al. | 2007-06-07 |
| Collector for EUV light source App 20070114468 - Partlo; William N. ; et al. | 2007-05-24 |
| Collector for EUV light source App 20070114469 - Partlo; William N. ; et al. | 2007-05-24 |
| Line selected F.sub.2 two chamber laser system Grant 7,218,661 - Knowles , et al. May 15, 2 | 2007-05-15 |
| Collector for EUV light source Grant 7,217,940 - Partlo , et al. May 15, 2 | 2007-05-15 |
| Timing control for two-chamber gas discharge laser system Grant 7,203,216 - Ershov , et al. April 10, 2 | 2007-04-10 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Grant 7,196,342 - Ershov , et al. March 27, 2 | 2007-03-27 |
| EUV light source optical elements Grant 7,193,228 - Bowering , et al. March 20, 2 | 2007-03-20 |
| EUV light source collector erosion mitigation Grant 7,180,083 - Partlo , et al. February 20, 2 | 2007-02-20 |
| EUV light source collector lifetime improvements App 20070023705 - Partlo; William N. ; et al. | 2007-02-01 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris App 20070018122 - Ershov; Alexander I. ; et al. | 2007-01-25 |
| EUV light source Grant 7,164,144 - Partlo , et al. January 16, 2 | 2007-01-16 |
| LPP EUV light source drive laser system App 20070001131 - Ershov; Alexander I. ; et al. | 2007-01-04 |
| Euv Light Source Collector Erosion Mitigation App 20060289808 - Partlo; William N. ; et al. | 2006-12-28 |
| Laser output beam wavefront splitter for bandwidth spectrum control Grant 7,154,928 - Sandstrom , et al. December 26, 2 | 2006-12-26 |
| EUV light source collector erosion mitigation Grant 7,141,806 - Partlo , et al. November 28, 2 | 2006-11-28 |
| Timing control for two-chamber gas discharge laser system App 20060251135 - Ershov; Alexander I. ; et al. | 2006-11-09 |
| Laser produced plasma EUV light source App 20060219957 - Ershov; Alexander I. ; et al. | 2006-10-05 |
| Control system for a two chamber gas discharge laser App 20060209917 - Fallon; John P. ; et al. | 2006-09-21 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris Grant 7,109,503 - Bowering , et al. September 19, 2 | 2006-09-19 |
| Systems For Protecting Internal Components Of An Euv Light Source From Plasma-generated Debris App 20060192151 - Bowering; Norbert R. ; et al. | 2006-08-31 |
| Method and apparatus for EUV plasma source target delivery App 20060192154 - Algots; J. Martin ; et al. | 2006-08-31 |
| LPP EUV light source drive laser system App 20060192152 - Ershov; Alexander I. ; et al. | 2006-08-31 |
| Relax gas discharge laser lithography light source Grant 7,088,758 - Sandstrom , et al. August 8, 2 | 2006-08-08 |
| Control system for a two chamber gas discharge laser Grant 7,079,564 - Fallon , et al. July 18, 2 | 2006-07-18 |
| LLP EUV drive laser App 20060146906 - Brown; Daniel J.W. ; et al. | 2006-07-06 |
| Collector for EUV light source App 20060131515 - Partlo; William N. ; et al. | 2006-06-22 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system App 20060126697 - Knowles; David S. ; et al. | 2006-06-15 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,061,961 - Knowles , et al. June 13, 2 | 2006-06-13 |
| Line selected F2 two chamber laser system Grant 7,058,107 - Knowles , et al. June 6, 2 | 2006-06-06 |
| EUV collector debris management App 20060091109 - Partlo; William N. ; et al. | 2006-05-04 |
| Control system for a two chamber gas discharge laser Grant 7,039,086 - Fallon , et al. May 2, 2 | 2006-05-02 |
| Very narrow band, two chamber, high reprate gas discharge laser system Grant 6,985,508 - Knowles , et al. January 10, 2 | 2006-01-10 |
| Laser output beam wavefront splitter for bandwidth spectrum control App 20050286598 - Sandstrom, Richard L. ; et al. | 2005-12-29 |
| Very Narrow Band, Two Chamber, High Rep-rate Gas Discharge Laser System App 20050271109 - Knowles, David S. ; et al. | 2005-12-08 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20050269529 - Ershov, Alexander I. ; et al. | 2005-12-08 |
| Control system for a two chamber gas discharge laser App 20050265417 - Fallon, John P. ; et al. | 2005-12-01 |
| Automatic gas control system for a gas discharge laser Grant 6,963,595 - Rule , et al. November 8, 2 | 2005-11-08 |
| LPP EUV light source App 20050205811 - Partlo, William N. ; et al. | 2005-09-22 |
| EUV light source App 20050199829 - Partlo, William N. ; et al. | 2005-09-15 |
| EUV light source optical elements App 20050199830 - Bowering, Norbert R. ; et al. | 2005-09-15 |
| Six to ten KHz, or greater gas discharge laser system Grant 6,914,919 - Watson , et al. July 5, 2 | 2005-07-05 |
| High power deep ultraviolet laser with long life optics Grant 6,904,073 - Yager , et al. June 7, 2 | 2005-06-07 |
| Laser output light pulse stretcher App 20050105579 - Smith, Scot T. ; et al. | 2005-05-19 |
| Relax gas discharge laser lithography light source App 20050083983 - Sandstrom, Richard L. ; et al. | 2005-04-21 |
| Timing control for two-chamber gas discharge laser system Grant 6,865,210 - Ershov , et al. March 8, 2 | 2005-03-08 |
| Timing control for two-chamber gas discharge laser system App 20050018739 - Ershov, Alexander I. ; et al. | 2005-01-27 |
| Line selected F2 two chamber laser system App 20040258122 - Knowles, David S. ; et al. | 2004-12-23 |
| Line selected F2 two chamber laser system Grant 6,801,560 - Knowles , et al. October 5, 2 | 2004-10-05 |
| High power gas discharge laser with helium purged line narrowing unit App 20040190578 - Partlo, William N. ; et al. | 2004-09-30 |
| Line selected F2 two chamber laser system App 20040174919 - Knowles, David S. ; et al. | 2004-09-09 |
| High power gas discharge laser with helium purged line narrowing unit Grant 6,778,584 - Partlo , et al. August 17, 2 | 2004-08-17 |
| Line narrowed laser with bidirection beam expansion Grant 6,738,410 - Partlo , et al. May 18, 2 | 2004-05-18 |
| High power gas discharge laser with line narrowing unit Grant 6,735,236 - Cybulski , et al. May 11, 2 | 2004-05-11 |
| High resolution spectral measurement device Grant 6,713,770 - Sandstrom , et al. March 30, 2 | 2004-03-30 |
| Control system for a two chamber gas discharge laser App 20040057489 - Fallon, John P. ; et al. | 2004-03-25 |
| Very narrow band, two chamber, high reprate gas discharge laser system App 20040047385 - Knowles, David S. ; et al. | 2004-03-11 |
| Lithography laser system with in-place alignment tool Grant 6,704,340 - Ershov , et al. March 9, 2 | 2004-03-09 |
| Lithography laser with beam delivery and beam pointing control Grant 6,704,339 - Lublin , et al. March 9, 2 | 2004-03-09 |
| Control system for a two chamber gas discharge laser Grant 6,690,704 - Fallon , et al. February 10, 2 | 2004-02-10 |
| Lithography laser with beam delivery and beam pointing control App 20040022291 - Das, Plash P. ; et al. | 2004-02-05 |
| Automatic gas control system for a gas discharge laser App 20040022293 - Rule, John A. ; et al. | 2004-02-05 |
| High power deep ultraviolet laser with long life optics App 20030219056 - Yager, Thomas A. ; et al. | 2003-11-27 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,625,191 - Knowles , et al. September 23, 2 | 2003-09-23 |
| Convolution method for measuring laser bandwidth Grant 6,603,549 - Haas , et al. August 5, 2 | 2003-08-05 |
| Injection seeded F2 laser with line selection and discrimination Grant 6,590,922 - Onkels , et al. July 8, 2 | 2003-07-08 |
| Timing control for two-chamber gas discharge laser system App 20030099269 - Ershov, Alexander I. ; et al. | 2003-05-29 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,567,450 - Myers , et al. May 20, 2 | 2003-05-20 |
| Lithography laser system with in-place alignment tool App 20030091087 - Ershov, Alexander I. ; et al. | 2003-05-15 |
| Line narrowed laser with spatial filter Grant 6,556,612 - Ershov , et al. April 29, 2 | 2003-04-29 |
| ArF laser with low pulse energy and high rep rate Grant 6,553,049 - Besaucele , et al. April 22, 2 | 2003-04-22 |
| Injection seeded laser with precise timing control Grant 6,549,551 - Ness , et al. April 15, 2 | 2003-04-15 |
| High resolution etalon-grating spectrometer Grant 6,538,737 - Sandstrom , et al. March 25, 2 | 2003-03-25 |
| Gas discharge laser with pulse multiplier Grant 6,535,531 - Smith , et al. March 18, 2 | 2003-03-18 |
| Lithography laser with beam delivery and beam pointing control App 20030043876 - Lublin, Leonard ; et al. | 2003-03-06 |
| Protective overcoat for replicated diffraction gratings Grant 6,529,321 - Pan , et al. March 4, 2 | 2003-03-04 |
| Control system for a two chamber gas discharge laser App 20030031216 - Fallon, John P. ; et al. | 2003-02-13 |
| Six to ten KHz, or greater gas discharge laser system App 20030012234 - Watson, Tom A. ; et al. | 2003-01-16 |
| Injection seeded F2 laser with wavelength control App 20020186739 - Sandstrom, Richard L. ; et al. | 2002-12-12 |
| Line selected F2 two chamber laser system App 20020154671 - Knowles, David S. ; et al. | 2002-10-24 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020154668 - Knowles, David S. ; et al. | 2002-10-24 |
| Large diffraction grating for gas discharge laser App 20020127497 - Brown, Daniel J. W. ; et al. | 2002-09-12 |
| Convolution method for measuring laser bandwidth App 20020122176 - Haas, Steven F. ; et al. | 2002-09-05 |
| High resolution spectral measurement device App 20020121608 - Sandstrom, Richard L. ; et al. | 2002-09-05 |
| Injection seeded F2 laser with line selection and discrimination App 20020114370 - Onkels, Eckehard D. ; et al. | 2002-08-22 |
| High resolution etalon-grating monochromator App 20020101588 - Sandstrom, Richard L. ; et al. | 2002-08-01 |
| High resolution etalon-grating spectrometer App 20020101589 - Sandstrom, Richard L. ; et al. | 2002-08-01 |
| Injection seeded laser with precise timing control App 20020085606 - Ness, Richard M. ; et al. | 2002-07-04 |
| Injection seeded F2 laser with pre-injection filter App 20020071468 - Sandstrom, Richard L. ; et al. | 2002-06-13 |
| Very narrow band injection seeded F2 lithography laser Grant 6,381,257 - Ershov , et al. April 30, 2 | 2002-04-30 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020044586 - Myers, David W. ; et al. | 2002-04-18 |
| Injection seeded F2 lithography laser Grant 6,370,174 - Onkels , et al. April 9, 2 | 2002-04-09 |
| Line Narrowed Laser With Spatial Filter App 20020034209 - ERSHOV, ALEXANDER I. ; et al. | 2002-03-21 |
| High Power Gas Discharge Laser With Line Narrowing Unit App 20020006147 - CYBULSKI, RAYMOND F. ; et al. | 2002-01-17 |
| Protective overcoat for replicated diffraction gratings App 20020001672 - Pan, Xiaojiang J. ; et al. | 2002-01-03 |
| Line narrowed laser with bidirection beam expansion App 20010014110 - Partlo, William N. ; et al. | 2001-08-16 |
| Double pass double etalon spectrometer App 20010013933 - Smith, Scott T. ; et al. | 2001-08-16 |
| Protective overcoat for replicated diffraction gratings App 20010003016 - Pan, Xiaojiang J. ; et al. | 2001-06-07 |
| Double pass etalon spectrometer Grant 6,243,170 - Ershov June 5, 2 | 2001-06-05 |
| Line narrowed F2 laser with etalon based output coupler Grant 6,240,110 - Ershov May 29, 2 | 2001-05-29 |
| Narrow band laser with fine wavelength control Grant 6,192,064 - Algots , et al. February 20, 2 | 2001-02-20 |
| Durable etalon based output coupler Grant 6,137,821 - Ershov October 24, 2 | 2000-10-24 |
| Reliable modular production quality narrow-band high REP rate excimer laser Grant 6,128,323 - Myers , et al. October 3, 2 | 2000-10-03 |
| Grating assembly with bi-directional bandwidth control Grant 6,094,448 - Fomenkov , et al. July 25, 2 | 2000-07-25 |
| Compact high resolution grating spectrometer Grant 6,061,129 - Ershov , et al. May 9, 2 | 2000-05-09 |
| Narrow band laser with etalon based output coupler Grant 6,028,879 - Ershov February 22, 2 | 2000-02-22 |
| Narrow band excimer laser with gas additive Grant 6,014,398 - Hofmann , et al. January 11, 2 | 2000-01-11 |
| Reliable. modular, production quality narrow-band KRF excimer laser Grant 5,991,324 - Knowles , et al. November 23, 1 | 1999-11-23 |
| Narrow band excimer laser Grant 5,982,800 - Ishihara , et al. November 9, 1 | 1999-11-09 |
| Very narrow band laser Grant 5,970,082 - Ershov October 19, 1 | 1999-10-19 |
| Line narrowing device with double duty grating Grant 5,917,849 - Ershov June 29, 1 | 1999-06-29 |
| Narrow band laser with etalon based output coupler Grant 5,901,163 - Ershov May 4, 1 | 1999-05-04 |
| Very narrow band laser Grant 5,856,991 - Ershov January 5, 1 | 1999-01-05 |
| Laser with line narrowing output coupler Grant 5,852,627 - Ershov December 22, 1 | 1998-12-22 |
| Very narrow band KrF laser Grant 5,835,520 - Das , et al. November 10, 1 | 1998-11-10 |
| Multi-pass spectrometer Grant 5,835,210 - Ershov November 10, 1 | 1998-11-10 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 