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Process and system for uniformly crystallizing amorphous silicon substrate by fiber laser Grant RE48,398 - Avdokhin , et al. January 19, 2 | 2021-01-19 |
RGB projector with multi-laser broadband light source and system for dynamically controlling image contrast ratio Grant 10,409,148 - Shkurikhin , et al. Sept | 2019-09-10 |
Rgb Projector With Multi-laser Broadband Light Source And System For Dynamically Controlling Image Contrast Ratio App 20180203339 - SHKURIKHIN; Oleg ;   et al. | 2018-07-19 |
Process and system for uniformly crystallizing amorphous silicon substrate by fiber laser Grant 9,941,120 - Avdokhin , et al. April 10, 2 | 2018-04-10 |
Process And System For Uniformly Crystallizing Amorphous Silicon Substrate By Fiber Laser App 20160013057 - AVDOKHIN; Alexey ;   et al. | 2016-01-14 |
Technique for forming a FinFET device using selective ion implantation Grant 9,190,498 - Brand , et al. November 17, 2 | 2015-11-17 |
Technique For Forming A FinFET Device App 20140080276 - Brand; Adam ;   et al. | 2014-03-20 |
Method and system for forming low contact resistance device Grant 8,617,955 - Waite , et al. December 31, 2 | 2013-12-31 |
Method and system for forming low contact resistance device Grant 08617955 - | 2013-12-31 |
Doping of planar or three-dimensional structures at elevated temperatures Grant 8,598,025 - Steen , et al. December 3, 2 | 2013-12-03 |
Method And System For Forming Low Contact Resistance Device App 20130015528 - Waite; Andrew ;   et al. | 2013-01-17 |
Doping Of Planar Or Three-dimensional Structures At Elevated Temperatures App 20120135578 - Steen; Louis ;   et al. | 2012-05-31 |
Wafer bonding activated by ion implantation Grant 7,939,424 - Erokhin , et al. May 10, 2 | 2011-05-10 |
Cleave initiation using varying ion implant dose Grant 7,820,527 - Nunan , et al. October 26, 2 | 2010-10-26 |
Cleave Initiation Using Varying Ion Implant Dose App 20090209084 - Nunan; Peter ;   et al. | 2009-08-20 |
Nano-cleave A Thin-film Of Silicon For Solar Cell Fabrication App 20090181492 - Nunan; Peter ;   et al. | 2009-07-16 |
Uniformity Control For Ion Beam Assisted Etching App 20090084757 - Erokhin; Yuri ;   et al. | 2009-04-02 |
Single Wafer Implanter For Silicon-on-insulator Wafer Fabrication App 20090084988 - Blake; Julian ;   et al. | 2009-04-02 |
Wafer Bonding Activated By Ion Implantation App 20090081848 - EROKHIN; Yuri ;   et al. | 2009-03-26 |
Internal gettering in SIMOX SOI silicon substrates Grant 7,294,561 - Erokhin , et al. November 13, 2 | 2007-11-13 |
Technique For Depositing Metallic Films Using Ion Implantation Surface Modification For Catalysis Of Electroless Deposition App 20070184194 - Nunan; Peter D. ;   et al. | 2007-08-09 |
Method of producing a high resistivity SIMOX silicon substrate Grant 7,112,509 - Erokhin , et al. September 26, 2 | 2006-09-26 |
Reduction of source and drain parasitic capacitance in CMOS devices App 20060043531 - Erokhin; Yuri ;   et al. | 2006-03-02 |
Active wafer cooling during damage engineering implant to enhance buried oxide formation in SIMOX wafers Grant 6,998,353 - Erokhin , et al. February 14, 2 | 2006-02-14 |
Internal gettering in SIMOX SOI silicon substrates App 20050037596 - Erokhin, Yuri ;   et al. | 2005-02-17 |
Method Of Producing A High Resistivity Simox Silicon Substrate App 20040224477 - Erokhin, Yuri ;   et al. | 2004-11-11 |
Active wafer cooling during damage engineering implant to enchance buried oxide formation in simox wafers App 20030087504 - Erokhin, Yuri ;   et al. | 2003-05-08 |
Rutherford backscattering detection for use in Ion implantation Grant 6,255,662 - Rubin , et al. July 3, 2 | 2001-07-03 |