loadpatents
Patent applications and USPTO patent grants for Erk; Henry F..The latest application filed is for "systems for producing silane".
Patent | Date |
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Systems for producing silane Grant 9,487,406 - Gupta , et al. November 8, 2 | 2016-11-08 |
Systems For Producing Silane App 20150151977 - Gupta; Puneet ;   et al. | 2015-06-04 |
Systems for producing silane Grant 9,011,803 - Gupta , et al. April 21, 2 | 2015-04-21 |
Methods for producing silane Grant 8,974,761 - Gupta , et al. March 10, 2 | 2015-03-10 |
Methods For Producing Silane App 20140328740 - Gupta; Puneet ;   et al. | 2014-11-06 |
Fluidized bed reactor systems and distributors for use in same Grant 8,828,324 - Erk September 9, 2 | 2014-09-09 |
Methods for producing silane Grant 8,821,825 - Gupta , et al. September 2, 2 | 2014-09-02 |
Methods For Processing Abrasive Slurry App 20130118091 - Erk; Henry F. ;   et al. | 2013-05-16 |
Systems For Processing Abrasive Slurry App 20130118962 - Erk; Henry F. ;   et al. | 2013-05-16 |
Systems For Producing Silane App 20130121888 - Gupta; Puneet ;   et al. | 2013-05-16 |
Methods for etching the edge of a silicon wafer Grant 8,309,464 - Erk , et al. November 13, 2 | 2012-11-13 |
Methods For Producing Silane App 20120160702 - Gupta; Puneet ;   et al. | 2012-06-28 |
Systems For Producing Silane App 20120164033 - Gupta; Puneet ;   et al. | 2012-06-28 |
Edge etched silicon wafers Grant 8,192,822 - Erk , et al. June 5, 2 | 2012-06-05 |
Fluidized Bed Reactor Systems And Distributors For Use In Same App 20110158857 - Erk; Henry F. | 2011-06-30 |
Methods For Reducing The Deposition Of Silicon On Reactor Walls Using Peripheral Silicon Tetrachloride App 20110158888 - Erk; Henry F. | 2011-06-30 |
Silicon wafer etching compositions Grant 7,938,982 - Stinson , et al. May 10, 2 | 2011-05-10 |
Method and System for Processing Abrasive Slurry App 20110017230 - Erk; Henry F. ;   et al. | 2011-01-27 |
Edge Etched Silicon Wafers App 20090246444 - Erk; Henry F. ;   et al. | 2009-10-01 |
Edge Etching Apparatus For Etching The Edge Of A Silicon Wafer App 20090242126 - Erk; Henry F. ;   et al. | 2009-10-01 |
Methods For Etching The Edge Of A Silicon Wafer App 20090247055 - Erk; Henry F. ;   et al. | 2009-10-01 |
Silicon Wafer Etching Process And Composition App 20080099717 - Stinson; Mark G. ;   et al. | 2008-05-01 |
Silicon wafer etching process and composition Grant 7,323,421 - Stinson , et al. January 29, 2 | 2008-01-29 |
Silicon wafer etching process and composition App 20060011588 - Stinson; Mark G. ;   et al. | 2006-01-19 |
Process for etching silicon wafers App 20040108297 - Erk, Henry F. ;   et al. | 2004-06-10 |
Method and apparatus for processing a semiconductor wafer using novel final polishing method Grant 6,709,981 - Grabbe , et al. March 23, 2 | 2004-03-23 |
Method for the detection of processing-induced defects in a silicon wafer Grant 6,600,557 - Stefanescu , et al. July 29, 2 | 2003-07-29 |
Method and apparatus for a wafer carrier having an insert Grant 6,454,635 - Zhang , et al. September 24, 2 | 2002-09-24 |
Method and apparatus for processing a semiconductor wafer using novel final polishing method App 20020052064 - Grabbe, Alexis ;   et al. | 2002-05-02 |
Semiconductor wafer manufacturing process Grant 6,376,335 - Zhang , et al. April 23, 2 | 2002-04-23 |
Process for etching silicon wafers App 20020034881 - Kulkarni, Milind S. ;   et al. | 2002-03-21 |
Method of conditioning wafer polishing pads Grant 6,135,863 - Zhang , et al. October 24, 2 | 2000-10-24 |
Post-lapping cleaning process for silicon wafers Grant 5,837,662 - Chai , et al. November 17, 1 | 1998-11-17 |
Apparatus for cleaning semiconductor wafers Grant 5,626,159 - Erk , et al. May 6, 1 | 1997-05-06 |
Process and apparatus for etching semiconductor wafers Grant 5,340,437 - Erk , et al. August 23, 1 | 1994-08-23 |
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