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Defect Density Calculation Method, Defect-density Calculation Program, Defect-density Calculation Apparatus, Heat Treatment Control System And Machining Control System App 20220189833 - Kuboi; Nobuyuki ;   et al. | 2022-06-16 |
Semiconductor Device And Method For Manufacturing The Same App 20090001473 - ERIGUCHI; Koji ;   et al. | 2009-01-01 |
Semiconductor device with dummy conductors Grant 7,432,556 - Eriguchi , et al. October 7, 2 | 2008-10-07 |
Semiconductor Device And Method For Manufacturing The Same App 20070108614 - Eriguchi; Koji ;   et al. | 2007-05-17 |
Semiconductor device Grant 6,974,987 - Ogawa , et al. December 13, 2 | 2005-12-13 |
Apparatus And Method For Optical Evaluation, Apparatus And Method For Manufacturing Semiconductor Device, Method Of Controlling Apparatus For Manufacturing Semiconductor Device, And Semiconductor Device Grant 6,849,470 - Eriguchi , et al. February 1, 2 | 2005-02-01 |
Semiconductor device and method for manufacturing the same App 20050006707 - Eriguchi, Koji ;   et al. | 2005-01-13 |
Semiconductor device and its manufacturing method App 20040150025 - Ogawa, Hisashi ;   et al. | 2004-08-05 |
Device for manufacturing semiconductor device and method of manufacturing the same Grant 6,750,976 - Eriguchi June 15, 2 | 2004-06-15 |
Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same Grant 6,734,451 - Eriguchi , et al. May 11, 2 | 2004-05-11 |
Method of forming a high dielectric constant insulating film and method of producing semiconductor device using the same Grant 6,734,069 - Eriguchi May 11, 2 | 2004-05-11 |
Apparatus And Method For Optical Evaluation, Apparatus And Method For Manufacturing Semiconductor Device, Method Of Controlling Apparatus For Manufacturing Semiconductor Device, And Semiconductor Device Grant 6,727,108 - Eriguchi , et al. April 27, 2 | 2004-04-27 |
Method and apparatus for evaluating insulating film Grant 6,720,790 - Eriguchi , et al. April 13, 2 | 2004-04-13 |
Device for manufacturing semiconductor device and method of manufacturing the same Grant 6,695,947 - Eriguchi February 24, 2 | 2004-02-24 |
Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device App 20030207476 - Eriguchi, Koji ;   et al. | 2003-11-06 |
Method and apparatus for evaluating insulating film App 20030169065 - Eriguchi, Koji ;   et al. | 2003-09-11 |
Method of forming insulating film and method of producing semiconductor device App 20030092238 - Eriguchi, Koji | 2003-05-15 |
Aggregate of Semicnductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same App 20030057451 - Eriguchi, Koji ;   et al. | 2003-03-27 |
Device for manufacturing semiconductor device and method of manufacturing the same App 20020135785 - Eriguchi, Koji | 2002-09-26 |
Device for manufacturing semiconductor device and method of manufacturing the same App 20020129476 - Eriguchi, Koji | 2002-09-19 |
Method and apparatus for semiconductor device fabrication Grant 6,372,082 - Eriguchi April 16, 2 | 2002-04-16 |
Method and apparatus for evaluating insulating film App 20020024351 - Eriguchi, Koji ;   et al. | 2002-02-28 |
Method of making aggregate of semiconductor micro-needles Grant 6,177,291 - Eriguchi , et al. January 23, 2 | 2001-01-23 |
Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device Grant 6,113,733 - Eriguchi , et al. September 5, 2 | 2000-09-05 |
Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same Grant 6,087,197 - Eriguchi , et al. July 11, 2 | 2000-07-11 |
Method of manufacturing aggregate of semiconductor micro-needles Grant 6,033,928 - Eriguchi , et al. March 7, 2 | 2000-03-07 |
Semiconductor manufacturing apparatus Grant 5,985,032 - Eriguchi November 16, 1 | 1999-11-16 |
MIS device, method of manufacturing the same, and method of diagnosing the same Grant 5,903,031 - Yamada , et al. May 11, 1 | 1999-05-11 |
Method of monitoring deposit in chamber, method of plasma processing, method of dry-cleaning chamber, and semiconductor manufacturing apparatus Grant 5,897,378 - Eriguchi April 27, 1 | 1999-04-27 |
Method of presuming life time of semiconductor device Grant 5,650,336 - Eriguchi , et al. July 22, 1 | 1997-07-22 |