Epsilon Technology, Inc.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Epsilon Technology, Inc..The latest application filed is for "substrate supporting apparatus".
- Epsilon Technology, Inc. - Phoenix AZ
- Epsilon Technology, Inc. - Tempe AZ
| Patent | Date |
|---|---|
| Substrate supporting apparatus Grant 5,318,634 - deBoer , et al. * June 7, 1 | 1994-06-07 |
| Reaction chambers for CVD systems Grant 5,261,960 - Ozias * November 16, 1 | 1993-11-16 |
| Gas injectors for reaction chambers in CVD systems Grant 5,221,556 - Hawkins , et al. June 22, 1 | 1993-06-22 |
| Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment Grant 5,198,034 - deBoer , et al. March 30, 1 | 1993-03-30 |
| Method for improving the reactant gas flow in a reaction chamber Grant 5,096,534 - Ozias March 17, 1 | 1992-03-17 |
| Substrate loading apparatus for a CVD process Grant 5,092,728 - Crabb , et al. March 3, 1 | 1992-03-03 |
| Wafer handling system with Bernoulli pick-up Grant 5,080,549 - Goodwin , et al. January 14, 1 | 1992-01-14 |
| Substrate handling and transporting apparatus Grant 5,020,475 - Crabb , et al. June 4, 1 | 1991-06-04 |
| Rotatable substrate supporting susceptor with temperature sensors Grant 4,996,942 - deBoer , et al. * March 5, 1 | 1991-03-05 |
| Susceptor with temperature sensing device Grant 4,993,355 - deBoer , et al. * February 19, 1 | 1991-02-19 |
| Heating system for substrates Grant 4,975,561 - Robinson , et al. December 4, 1 | 1990-12-04 |
| Reaction chambers for CVD systems Grant 4,846,102 - Ozias July 11, 1 | 1989-07-11 |
| Heating system for reaction chamber of chemical vapor deposition equipment Grant 4,836,138 - Robinson , et al. June 6, 1 | 1989-06-06 |
| Chemical vapor deposition system Grant 4,828,224 - Crabb , et al. May 9, 1 | 1989-05-09 |
| Apparatus and method for automated wafer handling Grant 4,813,732 - Klem March 21, 1 | 1989-03-21 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 