Epion Corporation

Patent Applications and Registrations

Patent applications and USPTO patent grants for Epion Corporation.The latest application filed is for "method and apparatus for scanning a workpiece through an ion beam".

Company Profile

0.28.24

Epion Corporation - Billerica MA
Epion Corporation - 37 Manning Road Billerica MA
Epion Corporation -
Epion Corporation - Bedford MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method And Apparatus For Scanning A Workpiece Through An Ion Beam App 20070262267 - Freytsis; Avrum ; et al.	2007-11-15
Ionizer and method for gas-cluster ion-beam formation Grant 7,173,252 - Mack February 6, 2	2007-02-06
Replacement gate field effect transistor with germanium or SiGe channel and manufacturing method for same using gas-cluster ion irradiation App 20060292762 - Borland; John O. ; et al.	2006-12-28
GCIB processing of integrated circuit interconnect structures Grant 7,115,511 - Hautala October 3, 2	2006-10-03
Method of and apparatus for measurement and control of a gas cluster ion beam Grant 7,067,828 - Swenson June 27, 2	2006-06-27
Method and apparatus for improved processing with a gas-cluster ion beam Grant 7,060,989 - Swenson , et al. June 13, 2	2006-06-13
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system Grant 7,060,988 - Mack , et al. June 13, 2	2006-06-13
Copper interconnect wiring and method of forming thereof App 20060105570 - Hautala; John J. ; et al.	2006-05-18
Ionizer and method for gas-cluster ion-beam formation App 20060097185 - Mack; Michael E.	2006-05-11
Method and apparatus for arc suppression in scanned ion beam processing equipment App 20060087244 - Regan; Kenneth P.	2006-04-27
Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation App 20050277246 - Kirkpatrick, Allen R. ; et al.	2005-12-15
Dual damascene integration structure and method for forming improved dual damascene integration structure App 20050272265 - Geffken, Robert M. ; et al.	2005-12-08
Dual damascene integration structure and method for forming improved dual damascene integration structure App 20050272237 - Hautala, John J. ; et al.	2005-12-08
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system App 20050205801 - Mack, Michael E. ; et al.	2005-09-22
Method and apparatus for improved processing with a gas-cluster ion beam App 20050205802 - Swenson, David R. ; et al.	2005-09-22
Formation of ultra-shallow junctions by gas-cluster ion irradiation App 20050202657 - Borland, John O. ; et al.	2005-09-15
Methods of forming doped and un-doped strained semiconductor and semiconductor films by gas-cluster ion irradiation App 20050181621 - Borland, John O. ; et al.	2005-08-18
Gas cluster ion beam size diagnostics and workpiece processing Grant 6,831,272 - Mack , et al. December 14, 2	2004-12-14
Method of and apparatus for measurement and control of a gas cluster ion beam App 20040222389 - Swenson, David R.	2004-11-11
Thermal treatment of fine grain materials in a coarse-grain fluidized bed Grant 6,811,765 - Maiwald , et al. November 2, 2	2004-11-02
GCIB processing to improve interconnection vias and improved interconnection via Grant 6,812,147 - Skinner , et al. November 2, 2	2004-11-02
Adaptive GCIB for smoothing surfaces Grant 6,805,807 - Fenner October 19, 2	2004-10-19
Gas cluster ion beam size diagnostics and workpiece processing Grant 6,770,874 - Dykstra August 3, 2	2004-08-03
GCIB processing of integrated circuit interconnect structures App 20040137733 - Hautala, John J.	2004-07-15
System for and method of gas cluster ion beam processing App 20040113093 - Mack, Michael E.	2004-06-17
System and method for adjusting the properties of a device by GCIB processing Grant 6,750,460 - Greer June 15, 2	2004-06-15
Detector and method for cluster ion beam diagnostics Grant 6,737,643 - Torti , et al. May 18, 2	2004-05-18
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology Grant 6,676,989 - Kirkpatrick , et al. January 13, 2	2004-01-13
Diamond-like carbon film with enhanced adhesion Grant 6,660,340 - Kirkpatrick December 9, 2	2003-12-09
Charging control and dosimetry system for gas cluster ion beam Grant 6,646,277 - Mack , et al. November 11, 2	2003-11-11
Gas cluster ion beam low mass ion filter Grant 6,635,883 - Torti , et al. October 21, 2	2003-10-21
Ionizer for gas cluster ion beam formation Grant 6,629,508 - Dykstra October 7, 2	2003-10-07
Enhanced etching/smoothing of dielectric surfaces Grant 6,624,081 - Dykstra , et al. September 23, 2	2003-09-23
Method and apparatus for smoothing thin conductive films by gas cluster ion beam Grant 6,613,240 - Skinner , et al. September 2, 2	2003-09-02
Apparatus and method for reduced particulate generation during workpiece handling Grant 6,595,506 - Zide , et al. July 22, 2	2003-07-22
GCIB processing to improve interconnection vias and improved interconnection via App 20030073314 - Skinner, Wesley J. ; et al.	2003-04-17
System and method for improving thin films by gas cluster ion beam processing Grant 6,537,606 - Allen , et al. March 25, 2	2003-03-25
Interface control for film deposition by gas-cluster ion-beam processing Grant 6,498,107 - Fenner December 24, 2	2002-12-24
Method and system for improving the effectiveness of artificial hip joints by the application of gas cluster ion beam technology Grant 6,491,800 - Kirkpatrick , et al. December 10, 2	2002-12-10
Gas cluster ion beam smoother apparatus Grant 6,486,478 - Libby , et al. November 26, 2	2002-11-26
Adaptive GCIB for smoothing surfaces App 20020139772 - Fenner, David B.	2002-10-03
Charging control and dosimetry system for gas cluster ion beam App 20020130275 - Mack, Michael E. ; et al.	2002-09-19
Method for forming carbonaceous hard film Grant 6,416,820 - Yamada , et al. July 9, 2	2002-07-09
Gas cluster ion beam size diagnostics and workpiece processing App 20020070361 - Mack, Michael E. ; et al.	2002-06-13
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology App 20020051846 - Kirkpatrick, Allen R. ; et al.	2002-05-02
Adaptive GCIB for smoothing surfaces Grant 6,375,790 - Fenner April 23, 2	2002-04-23
Gas cluster ion beam size diagnostics and workpiece processing App 20020036261 - Dykstra, Jerald P.	2002-03-28
Method and system for improving the effectiveness of intraocular lenses by the application of gas cluster ion beam technology App 20020017454 - Kirkpatrick, Allen R.	2002-02-14
Method and system for improving the effectiveness of artificial hip joints by the application of gas cluster ion beam technology App 20020017455 - Kirkpatrick, Allen R. ; et al.	2002-02-14
Surface planarization of high temperature superconductors App 20020006877 - Chu, Wei-Kan ; et al.	2002-01-17
Enhanced etching/smoothing of dielectric surfaces Grant 6,331,227 - Dykstra , et al. December 18, 2	2001-12-18
Diamond films and method of growing diamond films on nondiamond substrates Grant 5,082,359 - Kirkpatrick January 21, 1	1992-01-21

Company Registrations

NCAGE Code	0GHF7	EPION CORPORATION
CAGE Code	0GHF7	EPION CORPORATION
DUNS	114221583	EPION CORPORATION
SEC	0001065785	EPION CORP

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