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Patent applications and USPTO patent grants for Engel; Horst.The latest application filed is for "method for automatic determination of optical parameters of a layer stack and computer program".
Patent | Date |
---|---|
Method and apparatus for the determination of layer thicknesses Grant 6,826,511 - Mikkelsen , et al. November 30, 2 | 2004-11-30 |
Method for automatic determination of optical parameters of a layer stack and computer program App 20040027580 - Bosser, Hans-Artur ;   et al. | 2004-02-12 |
Optical measurement arrangement, in particular for layer thickness measurement Grant 6,618,154 - Engel , et al. September 9, 2 | 2003-09-09 |
Method for the determination of layer thicknesses App 20030147085 - Mikkelsen, Hakon ;   et al. | 2003-08-07 |
Optical measurement arrangement having an ellipsometer Grant 6,600,560 - Mikkelsen , et al. July 29, 2 | 2003-07-29 |
Optical measurement arrangement having an ellipsometer App 20020027657 - Mikkelsen, Hakon ;   et al. | 2002-03-07 |
Optical measurement arrangement, in particular for layer thickness measurement App 20020003217 - Engel, Horst ;   et al. | 2002-01-10 |
Pressure pad of rubber or rubber-like materials for presses Grant 3,968,282 - Engel July 6, 1 | 1976-07-06 |
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