Emoto; Tetsuya
Patent Applications and Registrations
Patent applications and USPTO patent grants for Emoto; Tetsuya.The latest application filed is for "substrate processing apparatus and substrate processing method".
- Emoto; Tetsuya - Kyoto JP
- EMOTO; Tetsuya - Kyoto-shi JP
| Patent | Date |
|---|---|
| Substrate processing apparatus and substrate processing method Grant 10,910,213 - Emoto , et al. February 2, 2 | 2021-02-02 |
| Substrate processing method and substrate processing apparatus Grant 10,843,223 - Tanaka , et al. November 24, 2 | 2020-11-24 |
| Substrate processing method and substrate processing apparatus Grant 10,790,166 - Emoto September 29, 2 | 2020-09-29 |
| Substrate processing method and substrate processing device Grant 10,720,320 - Emoto , et al. | 2020-07-21 |
| Substrate processing method Grant 10,510,528 - Emoto Dec | 2019-12-17 |
| Substrate Processing Apparatus And Substrate Processing Method App 20190148134 - EMOTO; Tetsuya ; et al. | 2019-05-16 |
| Substrate processing apparatus and substrate processing method Grant 10,224,198 - Emoto , et al. | 2019-03-05 |
| Substrate Processing Method And Substrate Processing Apparatus App 20180345315 - TANAKA; Takayoshi ; et al. | 2018-12-06 |
| Substrate Processing Method And Substrate Processing Device App 20180269056 - EMOTO; Tetsuya ; et al. | 2018-09-20 |
| Substrate Processing Method And Substrate Processing Apparatus App 20180247837 - EMOTO; Tetsuya | 2018-08-30 |
| Substrate Processing Apparatus And Substrate Processing Method App 20170182515 - EMOTO; Tetsuya ; et al. | 2017-06-29 |
| Substrate Processing Method App 20160372320 - EMOTO; Tetsuya | 2016-12-22 |
| Substrate processing method Grant 9,455,134 - Kimura , et al. September 27, 2 | 2016-09-27 |
| Substrate treatment method and substrate treatment apparatus Grant 9,259,758 - Emoto , et al. February 16, 2 | 2016-02-16 |
| Substrate Processing Method App 20150179431 - KIMURA; Masahiro ; et al. | 2015-06-25 |
| Substrate processing method Grant 9,005,703 - Kimura , et al. April 14, 2 | 2015-04-14 |
| Substrate Processing Method App 20140283882 - KIMURA; Masahiro ; et al. | 2014-09-25 |
| Substrate processing method Grant 8,821,974 - Kimura , et al. September 2, 2 | 2014-09-02 |
| Substrate Treatment Method And Substrate Treatment Apparatus App 20140065295 - EMOTO; Tetsuya ; et al. | 2014-03-06 |
| Substrate Processing Method And Substrate Processing Apparatus App 20120045581 - KIMURA; Masahiro ; et al. | 2012-02-23 |
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