Emer; Wolfgang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Emer; Wolfgang.The latest application filed is for "method for adjusting a projection objective".

Company Profile

1.21.24

Emer; Wolfgang - Aalen DE
Emer; Wolfgang - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method For Adjusting A Projection Objective App 20190056670 - Emer; Wolfgang	2019-02-21
Method For Measuring An Angularly Resolved Intensity Distribution And Projection Exposure Apparatus App 20180299787 - EMER; Wolfgang ; et al.	2018-10-18
Method for adjusting a projection objective Grant 10,018,918 - Emer July 10, 2	2018-07-10
Method for measuring an angularly resolved intensity distribution and projection exposure apparatus Grant 9,915,871 - Emer , et al. March 13, 2	2018-03-13
Method For Adjusting A Projection Objective App 20180024440 - Emer; Wolfgang	2018-01-25
Illumination optical unit for projection lithography Grant 9,753,375 - Scholz , et al. September 5, 2	2017-09-05
Method for adjusting a projection objective Grant 9,715,177 - Emer July 25, 2	2017-07-25
System for measuring the image quality of an optical imaging system Grant 9,429,495 - Mengel , et al. August 30, 2	2016-08-30
Method For Measuring An Angularly Resolved Intensity Distribution And Projection Exposure Apparatus App 20160011520 - EMER; Wolfgang ; et al.	2016-01-14
Method for measuring an angularly resolved intensity distribution and projection exposure apparatus Grant 9,081,294 - Emer , et al. July 14, 2	2015-07-14
Illumination Optical Unit For Projection Lithography App 20150015862 - Scholz; Axel ; et al.	2015-01-15
Method For Adjusting A Projection Objective App 20140347647 - Emer; Wolfgang	2014-11-27
System For Measuring The Image Quality Of An Optical Imaging System App 20140347654 - Mengel; Markus ; et al.	2014-11-27
System for measuring the image quality of an optical imaging system Grant 8,823,948 - Mengel , et al. September 2, 2	2014-09-02
Method For Measuring An Angularly Resolved Intensity Distribution And Projection Exposure Apparatus App 20140009764 - EMER; Wolfgang ; et al.	2014-01-09
System For Measuring The Image Quality Of An Optical Imaging System App 20130293869 - Mengel; Markus ; et al.	2013-11-07
System for measuring the image quality of an optical imaging system Grant 8,488,127 - Mengel , et al. July 16, 2	2013-07-16
Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods Grant 8,134,716 - Emer , et al. March 13, 2	2012-03-13
Method For Adjusting A Projection Objective App 20110216303 - EMER; Wolfgang	2011-09-08
Method for adjusting a projection objective Grant 7,965,377 - Emer June 21, 2	2011-06-21
System For Measuring The Image Quality Of An Optical Imaging System App 20100315651 - Mengel; Markus ; et al.	2010-12-16
System for measuring the image quality of an optical imaging system Grant 7,796,274 - Mengel , et al. September 14, 2	2010-09-14
System for measuring the image quality of an optical imaging system Grant 7,760,366 - Mengel , et al. July 20, 2	2010-07-20
System for Measuring the Image Quality of an Optical Imaging System App 20080252876 - Mengel; Markus ; et al.	2008-10-16
Optical measuring apparatus and operating method for imaging error correction in an optical imaging system Grant 7,436,521 - Emer , et al. October 14, 2	2008-10-14
Methods and Apparatus For Measuring Wavefronts and For Determining Scattered Light, and Related Devices and Manufacturing Methods App 20080231840 - Emer; Wolfgang ; et al.	2008-09-25
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry Grant 7,417,745 - Haidner , et al. August 26, 2	2008-08-26
Method For Adjusting A Projection Objective App 20080192220 - Emer; Wolfgang	2008-08-14
System For Measuring The Image Quality Of An Optical Imaging System App 20080180688 - Mengel; Markus ; et al.	2008-07-31
Method for determining distortion and/or image surface Grant 7,400,388 - Emer , et al. July 15, 2	2008-07-15
Method And A Device For Measurement Of Scattered Radiation At An Optical System App 20080116402 - Emer; Wolfgang	2008-05-22
Method for adjusting a projection objective Grant 7,372,545 - Emer May 13, 2	2008-05-13
Device and method for wavefront measurement of an optical imaging system, and a microlithography projection exposure machine Grant 7,268,890 - Emer September 11, 2	2007-09-11
Method of determining optical properties and projection exposure system comprising a wavefront detection system Grant 7,230,220 - Lauer , et al. June 12, 2	2007-06-12
Method for determining wavefront aberrations Grant 7,209,241 - Emer , et al. April 24, 2	2007-04-24
Method of determining optical properties and projection exposure system comprising a wavefront detection system App 20060231731 - Lauer; Steffen ; et al.	2006-10-19
Method for determining wavefront aberrations App 20060164655 - Emer; Wolfgang ; et al.	2006-07-27
Optical measuring apparatus and operating method for an optical imaging system App 20060119838 - Emer; Wolfgang ; et al.	2006-06-08
Method for determining wavefront aberrations Grant 7,019,846 - Emer , et al. March 28, 2	2006-03-28
Method for determining distortion and/or image surface App 20060007429 - Emer; Wolfgang ; et al.	2006-01-12
Method for adjusting a projection objective App 20050231700 - Emer, Wolfgang	2005-10-20
Device and method for wavefront measurement of an optical imaging system, and a microlithography projection exposure machine App 20050200940 - Emer, Wolfgang	2005-09-15
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry App 20050007602 - Haidner, Helmut ; et al.	2005-01-13
Method for determining wavefront aberrations App 20040032579 - Emer, Wolfgang ; et al.	2004-02-19

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