loadpatents
Patent applications and USPTO patent grants for Emami; Ramin.The latest application filed is for "wafer cleaning solution for cobalt electroless application".
Patent | Date |
---|---|
Multi-phase polishing pad Grant 8,133,096 - Emami , et al. March 13, 2 | 2012-03-13 |
Vibration damping during chemical mechanical polishing Grant 7,497,767 - Chen , et al. March 3, 2 | 2009-03-03 |
Vibration damping in chemical mechanical polishing system Grant 7,331,847 - Chen , et al. February 19, 2 | 2008-02-19 |
Wafer cleaning solution for cobalt electroless application Grant 7,273,813 - Emami , et al. September 25, 2 | 2007-09-25 |
Pretreatment for electroless deposition Grant 7,256,111 - Lopatin , et al. August 14, 2 | 2007-08-14 |
Planarized copper cleaning for reduced defects Grant 7,104,267 - Emami , et al. September 12, 2 | 2006-09-12 |
Wafer cleaning solution for cobalt electroless application App 20060174912 - Emami; Ramin ;   et al. | 2006-08-10 |
Vibration damping in chemical mechanical polishing system App 20060148387 - Chen; Hung Chih ;   et al. | 2006-07-06 |
High through-put Cu CMP with significantly reduced erosion and dishing Grant 7,041,599 - Li , et al. May 9, 2 | 2006-05-09 |
Vibration damping in a chemical mechanical polishing system Grant 7,014,545 - Chen , et al. March 21, 2 | 2006-03-21 |
Article for polishing semiconductor substrates Grant 7,014,538 - Tietz , et al. March 21, 2 | 2006-03-21 |
Vibration damping during chemical mechanical polishing App 20050245181 - Chen, Hung Chih ;   et al. | 2005-11-03 |
Multi-phase polishing pad App 20050189235 - Emami, Ramin ;   et al. | 2005-09-01 |
Electroless palladium nitrate activation prior to cobalt-alloy deposition App 20050170650 - Fang, Hongbin ;   et al. | 2005-08-04 |
Pretreatment for electroless deposition App 20050164497 - Lopatin, Sergey ;   et al. | 2005-07-28 |
Electroless cobalt alloy deposition process App 20050161338 - Fang, Hongbin ;   et al. | 2005-07-28 |
Multi-phase polishing pad Grant 6,857,941 - Emami , et al. February 22, 2 | 2005-02-22 |
Thermal preconditioning fixed abrasive articles Grant 6,832,948 - Birang , et al. December 21, 2 | 2004-12-21 |
Apparatus and method for edge bead removal Grant 6,786,996 - Emami September 7, 2 | 2004-09-07 |
Vibration damping in a chemical mechanical polishing system App 20040142646 - Chen, Hung Chih ;   et al. | 2004-07-22 |
Fixed abrasive articles App 20040082288 - Tietz, James V. ;   et al. | 2004-04-29 |
Capillary ring Grant 6,708,701 - Emami March 23, 2 | 2004-03-23 |
Vibration damping in a chemical mechanical polishing system Grant 6,676,497 - Chen , et al. January 13, 2 | 2004-01-13 |
Pad cleaning for a CMP system Grant 6,669,538 - Li , et al. December 30, 2 | 2003-12-30 |
Barrier layer buffing after Cu CMP Grant 6,656,842 - Li , et al. December 2, 2 | 2003-12-02 |
In-situ pre-clean for electroplating process App 20030201185 - Bajaj, Rajeev ;   et al. | 2003-10-30 |
Electroplating solution composition control App 20030150734 - Bajaj, Rajeev ;   et al. | 2003-08-14 |
Platen for retaining polishing material Grant 6,592,439 - Li , et al. July 15, 2 | 2003-07-15 |
N2 splash guard for liquid injection on the rotating substrate App 20030070695 - Emami, Ramin ;   et al. | 2003-04-17 |
Apparatus and method for edge bead removal App 20030073309 - Emami, Ramin | 2003-04-17 |
Capillary ring App 20030070755 - Emami, Ramin | 2003-04-17 |
Method for preventing surface corrosion in an edge bead removal process App 20030073320 - Emami, Ramin | 2003-04-17 |
Multi-phase polishing pad App 20020197946 - Emami, Ramin ;   et al. | 2002-12-26 |
Pad Cleaning for a CMP system App 20020090896 - Li, Shijian ;   et al. | 2002-07-11 |
Barrier Layer Buffing After Cu Cmp App 20010055880 - LI, SHIJIAN ;   et al. | 2001-12-27 |
Conditioning fixed abrasive articles Grant 6,322,427 - Li , et al. November 27, 2 | 2001-11-27 |
Wafer edge scrubber and method Grant 6,299,698 - Emami , et al. October 9, 2 | 2001-10-09 |
Planarized copper cleaning for reduced defects App 20010015345 - Emami, Ramin ;   et al. | 2001-08-23 |
High through-put copper CMP with reduced erosion and dishing App 20010004538 - Li, Shijian ;   et al. | 2001-06-21 |
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