Elumalai; Karthik

Patent Applications and Registrations

Patent applications and USPTO patent grants for Elumalai; Karthik.The latest application filed is for "shadow ring kit for plasma etch wafer singulation process".

Company Profile

4.9.14

Elumalai; Karthik - Bangalore IN
Elumalai; Karthik - Singapore SG
Elumalai; Karthik - Karnataka IN
Elumalai; Karthik - Bangladore IN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and apparatus for controlling warpage in wafer level packaging processes Grant 11,421,316 - Lianto , et al. August 23, 2	2022-08-23
Shadow Ring Kit For Plasma Etch Wafer Singulation Process App 20220108908 - Elumalai; Karthik ; et al.	2022-04-07
Mainframe-less Wafer Transfer Platform For Wafer Processing Modules App 20220044968 - Thirunavukarasu; Sriskantharajah ; et al.	2022-02-10
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity Grant 11,111,583 - Thirunavukarasu , et al. September 7, 2	2021-09-07
Electrostatic Chuck With Reduced Current Leakage For Hybrid Laser Scribing And Plasma Etch Wafer Singulation Process App 20210175086 - Abhinand; Sai ; et al.	2021-06-10
Methods And Apparatus For Controlling Warpage In Wafer Level Packaging Processes App 20200131624 - LIANTO; PRAYUDI ; et al.	2020-04-30
Next generation warpage measurement system Grant 10,446,423 - Su , et al. Oc	2019-10-15
Methods and apparatus for correcting substrate deformity Grant 10,325,790 - Peh , et al.	2019-06-18
Methods And Apparatus For Correcting Substrate Deformity App 20180218928 - PEH; Eng Sheng ; et al.	2018-08-02
Next Generation Warpage Measurement System App 20180144960 - SU; JUN-LIANG ; et al.	2018-05-24
Substrate Carrier System Utilizing Electrostatic Chucking To Accommodate Substrate Size Heterogeneity App 20180112310 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al.	2018-04-26
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity Grant 9,845,533 - Thirunavukarasu , et al. December 19, 2	2017-12-19
Methods and apparatus for correcting substrate deformity Grant 9,818,624 - Lew , et al. November 14, 2	2017-11-14
Electrostatic carrier for handling substrates for processing Grant 9,740,111 - Sundarrajan , et al. August 22, 2	2017-08-22
Methods And Apparatus For Correcting Substrate Deformity App 20160322234 - LEW; Jen Sern ; et al.	2016-11-03
Reusable substrate carrier Grant 9,478,697 - Thirunavukarasu , et al. October 25, 2	2016-10-25
Substrate Carrier System Utilizing Electrostatic Chucking To Accommodate Substrate Size Heterogeneity App 20160133782 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al.	2016-05-12
Reusable Substrate Carrier App 20160133781 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al.	2016-05-12
Electrostatic Carrier For Handling Substrates For Processing App 20150331337 - Sundarrajan; Arvind ; et al.	2015-11-19
Pedestal Fluid-based Thermal Control App 20150332942 - Peh; Eng Sheng ; et al.	2015-11-19

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