Elster; Thomas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Elster; Thomas.The latest application filed is for "arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns".

Company Profile

0.5.4

Elster; Thomas - Jena DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns Grant 8,148,702 - Doering , et al. April 3, 2	2012-04-03
Arrangement for the Illumination of a Substrate with a Plurality of Individually Shaped Particle Beams for High-Resolution Lithography of Structure Patterns App 20100148087 - Doering; Hans-Joachim ; et al.	2010-06-17
Illumination condenser for a particle optical projection system Grant 7,601,969 - Doering , et al. October 13, 2	2009-10-13
Correction lens system for a particle beam projection device Grant 7,560,713 - Doering , et al. July 14, 2	2009-07-14
Electrostatic deflection system for corpuscular radiation Grant 7,491,946 - Risse , et al. February 17, 2	2009-02-17
Illumination Condenser for a Particle Optical Projection System App 20080035853 - Doering; Hans-Joachim ; et al.	2008-02-14
Correction Lens System for a Particle Beam Projection Device App 20070215812 - Doering; Hans-Joachim ; et al.	2007-09-20
Electrostatic deflection system for corpuscular radiation App 20060192133 - Risse; Stefan ; et al.	2006-08-31
Method and device for exposing a substrate to light Grant 6,600,162 - Hahmann , et al. July 29, 2	2003-07-29

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