| Patent | Date |
|---|
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
Grant 7,604,527 - Elledge October 20, 2 | 2009-10-20 |
Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies
Grant 7,479,206 - Elledge January 20, 2 | 2009-01-20 |
Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
Grant 7,357,695 - Elledge April 15, 2 | 2008-04-15 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
Grant 7,341,502 - Elledge March 11, 2 | 2008-03-11 |
In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging
Grant 7,306,506 - Elledge December 11, 2 | 2007-12-11 |
Methods And Systems For Planarizing Workpieces, E.g., Microelectronic Workpieces
App 20070275637 - Elledge; Jason B. | 2007-11-29 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
Grant 7,258,596 - Elledge , et al. August 21, 2 | 2007-08-21 |
Methods of manufacturing carrier heads for polishing micro-device workpieces
Grant 7,255,630 - Elledge August 14, 2 | 2007-08-14 |
In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging
App 20070161333 - Elledge; Jason B. | 2007-07-12 |
In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging
Grant 7,235,488 - Elledge June 26, 2 | 2007-06-26 |
In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging
Grant 7,201,632 - Elledge April 10, 2 | 2007-04-10 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
Grant 7,182,669 - Elledge February 27, 2 | 2007-02-27 |
Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
App 20070004321 - Elledge; Jason B. | 2007-01-04 |
Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
Grant 7,131,891 - Elledge November 7, 2 | 2006-11-07 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
App 20060228995 - Elledge; Jason B. ; et al. | 2006-10-12 |
Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces
Grant 7,074,114 - Elledge July 11, 2 | 2006-07-11 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
Grant 7,070,478 - Elledge , et al. July 4, 2 | 2006-07-04 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
Grant 7,033,246 - Elledge , et al. April 25, 2 | 2006-04-25 |
Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces
Grant 7,033,251 - Elledge April 25, 2 | 2006-04-25 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
Grant 7,033,248 - Elledge , et al. April 25, 2 | 2006-04-25 |
Anodically-bonded elements for flat panel displays
App 20060073757 - Hoffmann; James J. ; et al. | 2006-04-06 |
Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same
App 20060040588 - Elledge; Jason B. | 2006-02-23 |
Anodically-bonded elements for flat panel displays
Grant 6,981,904 - Hofmann , et al. January 3, 2 | 2006-01-03 |
Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces
App 20050255792 - Elledge, Jason B. | 2005-11-17 |
Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
Grant 6,935,929 - Elledge August 30, 2 | 2005-08-30 |
Apparatus For In-situ Optical Endpointing On Web-format Planarizing Machines In Mechanical Or Chemical-mechanical Planarization Of Microelectronic-device Substrate Assemblies And Methods For Making And Using Same
Grant 6,932,672 - Elledge August 23, 2 | 2005-08-23 |
Apparatus For In-situ Optical Endpointing On Web-format Planarizing Machines In Mechanical Or Chemical-mechanical Planarization Of Microelectronic-device Substrate Assemblies And Methods For Making And Using Same
Grant 6,929,530 - Elledge August 16, 2 | 2005-08-16 |
Methods and systems to detect defects in an end effector for conditioning polishing pads used in polishing micro-device workpieces
Grant 6,918,301 - Elledge July 19, 2 | 2005-07-19 |
Methods and systems for planarizing workpieces, e.g., Microelectronic workpieces
App 20050090105 - Elledge, Jason B. | 2005-04-28 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
Grant 6,872,132 - Elledge , et al. March 29, 2 | 2005-03-29 |
In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging
App 20050051267 - Elledge, Jason B. | 2005-03-10 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
App 20050032461 - Elledge, Jason B. ; et al. | 2005-02-10 |
Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces
App 20050026544 - Elledge, Jason B. | 2005-02-03 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
App 20050026546 - Elledge, Jason B. ; et al. | 2005-02-03 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
App 20050026545 - Elledge, Jason B. ; et al. | 2005-02-03 |
Differential pressure process for fabricating a flat-panel display faceplate with integral spacer support structures
Grant 6,813,904 - Elledge November 9, 2 | 2004-11-09 |
Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
App 20040214514 - Elledge, Jason B. | 2004-10-28 |
Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
App 20040214509 - Elledge, Jason B. | 2004-10-28 |
Systems And Methods For Monitoring Characteristics Of A Polishing Pad Used In Polishing Micro-device Workpieces
App 20040176018 - Elledge, Jason B. ; et al. | 2004-09-09 |
Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces
App 20040142635 - Elledge, Jason B. | 2004-07-22 |
Methods and systems to detect defects in an end effector for conditioning polishing pads used in polishing micro-device workpieces
App 20040089070 - Elledge, Jason B. | 2004-05-13 |
Anodically bonded elements for flat-panel displays
Grant 6,734,619 - Hofmann , et al. May 11, 2 | 2004-05-11 |
Anodically bonded elements for flat-panel displays
Grant 6,716,080 - Hoffman , et al. April 6, 2 | 2004-04-06 |
Anodically-bonded elements for flat panel displays
App 20040058613 - Hofmann, James J. ; et al. | 2004-03-25 |
Differential pressure process for fabricating a flat-panel display face plate with integral spacer support structures
Grant 6,710,537 - Elledge March 23, 2 | 2004-03-23 |
In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging
App 20040043521 - Elledge, Jason B. | 2004-03-04 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
App 20040014396 - Elledge, Jason B. | 2004-01-22 |
Differential pressure process for fabricating a flat-panel display face plate with integral spacer support structures and a face plate produced by such process
Grant 6,664,729 - Elledge December 16, 2 | 2003-12-16 |
Differential pressure process for fabricating a flat-panel display face plate with integral spacer support structures
App 20030205061 - Elledge, Jason B. | 2003-11-06 |
Differential pressure process for fabricating a flat-panel display face plate with integral spacer support structures and a face plate produced by such process
Grant 6,631,627 - Elledge October 14, 2 | 2003-10-14 |
Anodically bonded elements for flat-panel displays
App 20030141806 - Hofmann, James J. ; et al. | 2003-07-31 |
Anodically-bonded elements for flat panel displays
App 20030127966 - Hofmann, James J. ; et al. | 2003-07-10 |
Method of anodically bonding elements for flat panel displays
Grant 6,554,671 - Hofmann , et al. April 29, 2 | 2003-04-29 |
Anodically-bonded elements for flat panel displays
Grant 6,545,406 - Hofmann , et al. April 8, 2 | 2003-04-08 |
Anodically bonded elements for flat-panel display
App 20020193037 - Hofmann, James J. ; et al. | 2002-12-19 |
Differential pressure process for fabricating a flat-panel display face plate with integral spacer support structures
App 20020163297 - Elledge, Jason B. | 2002-11-07 |
Fiber spacers in large area vacuum displays and method for manufacture
App 20020151245 - Hofmann, James J. ; et al. | 2002-10-17 |
Differential pressure process for fabricating a flat-panel display face plate with integral spacer support structures
App 20020108402 - Elledge, Jason B. | 2002-08-15 |
Anodically-bonded elements for flat panel displays
App 20020053870 - Hofmann, James J. ; et al. | 2002-05-09 |
Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates
Grant 6,368,197 - Elledge April 9, 2 | 2002-04-09 |
Fiber spacers in large area vacuum displays and method for manufacture
App 20020031973 - Hofmann, James J. ; et al. | 2002-03-14 |
Anodically-bonded elements for flat panel displays
Grant 6,329,750 - Hofmann , et al. December 11, 2 | 2001-12-11 |
Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same
App 20010044261 - Elledge, Jason B. | 2001-11-22 |
Differential pressure process for fabricating a flat-panel display face plate with integral spacer support structures
App 20010023597 - Elledge, Jason B. | 2001-09-27 |
Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates
App 20010021627 - Elledge, Jason B. | 2001-09-13 |
Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates
App 20010019937 - Elledge, Jason B. | 2001-09-06 |
Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates
Grant 6,244,944 - Elledge June 12, 2 | 2001-06-12 |
Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same
Grant 6,213,845 - Elledge April 10, 2 | 2001-04-10 |
Method of forming flat panel display spacers
Grant 6,165,390 - Elledge , et al. December 26, 2 | 2000-12-26 |
Anodically-bonded elements for flat panel displays
Grant 5,980,349 - Hofmann , et al. November 9, 1 | 1999-11-09 |
Method for forming spacers in flat panel displays using photo-etching
Grant 5,840,201 - Elledge November 24, 1 | 1998-11-24 |
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