Elizaga; Larry D.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Elizaga; Larry D..The latest application filed is for "modular microwave source with embedded ground surface".

Company Profile

4.6.12

Elizaga; Larry D. - Tracy CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Modular Microwave Source With Embedded Ground Surface App 20210313153 - AuBuchon; Joseph F. ; et al.	2021-10-07
Modular microwave source with embedded ground surface Grant 11,049,694 - AuBuchon , et al. June 29, 2	2021-06-29
Monolithic Modular Microwave Source With Integrated Process Gas Distribution App 20210098231 - Carducci; James ; et al.	2021-04-01
Modular Microwave Source With Embedded Ground Surface App 20210098236 - AuBuchon; Joseph F. ; et al.	2021-04-01
Monolithic Modular Microwave Source With Integrated Temperature Control App 20210100076 - Carducci; James ; et al.	2021-04-01
Two Channel Cosine-theta Coil Assembly App 20190189330 - FOVELL; RICHARD C. ; et al.	2019-06-20
Temperature controlled chamber liner Grant 9,653,267 - Carducci , et al. May 16, 2	2017-05-16
Temperature Controlled Plasma Processing Chamber Component With Zone Dependent Thermal Efficiences App 20140083978 - Mahadeswaraswamy; Chetan ; et al.	2014-03-27
Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies Grant 8,608,852 - Mahadeswaraswamy , et al. December 17, 2	2013-12-17
Temperature Controlled Chamber Liner App 20130118686 - Carducci; James D. ; et al.	2013-05-16
Temperature Controlled Plasma Processing Chamber Component With Zone Dependent Thermal Efficiencies App 20110303641 - MAHADESWARASWAMY; Chetan ; et al.	2011-12-15
Apparatus For Controlling Temperature Uniformity Of A Showerhead App 20110180233 - BERA; KALLOL ; et al.	2011-07-28
Gas distribution showerhead for semiconductor processing Grant 6,983,892 - Noorbakhsh , et al. January 10, 2	2006-01-10
Gas distribution showerhead for semiconductor processing App 20050173569 - Noorbakhsh, Hamid ; et al.	2005-08-11

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