Elers; Kai-Erik
Patent Applications and Registrations
Patent applications and USPTO patent grants for Elers; Kai-Erik.The latest application filed is for "enhanced thin film deposition".
Company Profile
3.51.43
- Elers; Kai-Erik - Vantaa FI
- Elers; Kai-Erik - Espoo FI
- Elers; Kai-Erik - Helsinki N/A FI
- Elers; Kai-Erik - Phoenix AZ
- Elers; Kai-Erik - Portland OR
Patent Activity
| Patent | Date |
|---|---|
| Enhanced thin film deposition Grant 10,964,534 - Rahtu , et al. March 30, 2 | 2021-03-30 |
| Enhanced Thin Film Deposition App 20190267231 - Rahtu; Antti ; et al. | 2019-08-29 |
| Enhanced thin film deposition Grant 10,297,444 - Rahtu , et al. | 2019-05-21 |
| Enhanced Thin Film Deposition App 20180130666 - Rahtu; Antti ; et al. | 2018-05-10 |
| Enhanced thin film deposition Grant 9,831,094 - Rahtu , et al. November 28, 2 | 2017-11-28 |
| Capacitive cylinder pressure sensor App 20170023440 - Sillanpaa; Teuvo ; et al. | 2017-01-26 |
| Enhanced Thin Film Deposition App 20160118262 - Rahtu; Antti ; et al. | 2016-04-28 |
| Modification of nanoimprint lithography templates by atomic layer deposition Grant 9,217,200 - Haukka , et al. December 22, 2 | 2015-12-22 |
| Enhanced thin film deposition Grant 9,127,351 - Rahtu , et al. September 8, 2 | 2015-09-08 |
| Enhanced thin film deposition Grant 8,993,055 - Rahtu , et al. March 31, 2 | 2015-03-31 |
| Etching high-k materials Grant 8,809,195 - Elers August 19, 2 | 2014-08-19 |
| Method of growing electrical conductors Grant 8,536,058 - Kostamo , et al. September 17, 2 | 2013-09-17 |
| Enhanced Thin Film Deposition App 20130183445 - Rahtu; Antti ; et al. | 2013-07-18 |
| Method of forming non-conformal layers Grant 8,334,218 - Van Nooten , et al. December 18, 2 | 2012-12-18 |
| Plasma-enhanced deposition of metal carbide films Grant 8,268,409 - Elers , et al. September 18, 2 | 2012-09-18 |
| Method Of Growing Electrical Conductors App 20120028474 - Kostamo; Juhana ; et al. | 2012-02-02 |
| Modification Of Nanoimprint Lithography Templates By Atomic Layer Deposition App 20110146568 - Haukka; Suvi P. ; et al. | 2011-06-23 |
| Method of growing electrical conductors Grant 7,955,979 - Kostamo , et al. June 7, 2 | 2011-06-07 |
| Method for depositing nanolaminate thin films on sensitive surfaces Grant 7,749,871 - Elers , et al. July 6, 2 | 2010-07-06 |
| Controlled composition using plasma-enhanced atomic layer deposition Grant 7,727,864 - Elers June 1, 2 | 2010-06-01 |
| Etching High-k Materials App 20100099264 - Elers; Kai-Erik | 2010-04-22 |
| Conformal lining layers for damascene metallization Grant 7,670,944 - Raaijmakers , et al. March 2, 2 | 2010-03-02 |
| Method Of Forming Non-conformal Layers App 20100022099 - Van Nooten; Sebastian E. ; et al. | 2010-01-28 |
| Vapor deposition of metal carbide films Grant 7,611,751 - Elers November 3, 2 | 2009-11-03 |
| Method of forming non-conformal layers Grant 7,608,549 - Van Nooten , et al. October 27, 2 | 2009-10-27 |
| Plasma-enhanced ALD of tantalum nitride films Grant 7,598,170 - Elers October 6, 2 | 2009-10-06 |
| Passivated stoichiometric metal nitride films Grant 7,595,270 - Elers , et al. September 29, 2 | 2009-09-29 |
| Method of growing electrical conductors Grant 7,494,927 - Kostamo , et al. February 24, 2 | 2009-02-24 |
| Production of elemental films using a boron-containing reducing agent Grant 7,485,340 - Elers , et al. February 3, 2 | 2009-02-03 |
| Oxygen bridge structures and methods to form oxygen bridge structures Grant 7,465,658 - Raaijmakers , et al. December 16, 2 | 2008-12-16 |
| Passivated Stoichiometric Metal Nitride Films App 20080182410 - Elers; Kai-Erik ; et al. | 2008-07-31 |
| Plasma-enhanced Ald Of Tantalum Nitride Films App 20080182411 - Elers; Kai-Erik | 2008-07-31 |
| Method Of Growing Electrical Conductors App 20080146042 - Kostamo; Juhana ; et al. | 2008-06-19 |
| Plasma-enhanced Deposition Of Metal Carbide Films App 20080113110 - Elers; Kai-Erik ; et al. | 2008-05-15 |
| Controlled composition using plasma-enhanced atomic layer deposition App 20080102613 - Elers; Kai-Erik | 2008-05-01 |
| Vapor deposition of metal carbide films App 20080102204 - Elers; Kai-Erik | 2008-05-01 |
| Method for depositing nanolaminate thin films on sensitive surfaces Grant 7,329,590 - Elers , et al. February 12, 2 | 2008-02-12 |
| Production of elemental films using a boron-containing reducing agent App 20070190248 - Elers; Kai-Erik ; et al. | 2007-08-16 |
| Process for producing integrated circuits including reduction using gaseous organic compounds Grant 7,241,677 - Soininen , et al. July 10, 2 | 2007-07-10 |
| Enhanced thin film deposition App 20070148350 - Rahtu; Antti ; et al. | 2007-06-28 |
| Conformal lining layers for damascene metallization App 20070096321 - Raaijmakers; Ivo ; et al. | 2007-05-03 |
| Method of forming non-conformal layers App 20070026540 - Nooten; Sebastian E. van ; et al. | 2007-02-01 |
| Production of elemental films using a boron-containing reducing agent Grant 7,144,809 - Elers , et al. December 5, 2 | 2006-12-05 |
| Oxygen bridge structures and methods to form oxygen bridge structures App 20060258150 - Raaijmakers; Ivo ; et al. | 2006-11-16 |
| Conformal lining layers for damascene metallization Grant 7,102,235 - Raaijmakers , et al. September 5, 2 | 2006-09-05 |
| Oxygen bridge structures and methods to form oxygen bridge structures Grant 7,034,397 - Raaijmakers , et al. April 25, 2 | 2006-04-25 |
| Method for depositing nanolaminate thin films on sensitive surfaces App 20060079090 - Elers; Kai-Erik ; et al. | 2006-04-13 |
| Multilayer metallization Grant 7,018,917 - Elers March 28, 2 | 2006-03-28 |
| Process for producing integrated circuits App 20050215053 - Soininen, Pekka Juha ; et al. | 2005-09-29 |
| Process for producing integrated circuits including reduction using gaseous organic compounds Grant 6,921,712 - Soininen , et al. July 26, 2 | 2005-07-26 |
| Method for depositing nanolaminate thin films on sensitive surfaces Grant 6,902,763 - Elers , et al. June 7, 2 | 2005-06-07 |
| Multilayer metallization App 20050110145 - Elers, Kai-Erik | 2005-05-26 |
| Method for depositing nanolaminate thin films on sensitive surfaces App 20050106877 - Elers, Kai-Erik ; et al. | 2005-05-19 |
| Atomic layer deposition reactor App 20050092249 - Kilpela, Olli ; et al. | 2005-05-05 |
| Method of growing electrical conductors Grant 6,887,795 - Soininen , et al. May 3, 2 | 2005-05-03 |
| In situ reduction of copper oxide prior to silicon carbide deposition Grant 6,878,628 - Sophie , et al. April 12, 2 | 2005-04-12 |
| Production of elemental films using a boron-containing reducing agent App 20050064098 - Elers, Kai-Erik ; et al. | 2005-03-24 |
| Method of depositing transition metal nitride thin films Grant 6,863,727 - Elers , et al. March 8, 2 | 2005-03-08 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,852,635 - Satta , et al. February 8, 2 | 2005-02-08 |
| Method of modifying source chemicals in an ALD process App 20050000431 - Elers, Kai-Erik | 2005-01-06 |
| Atomic layer deposition reactor Grant 6,820,570 - Kilpela , et al. November 23, 2 | 2004-11-23 |
| Production of elemental thin films using a boron-containing reducing agent Grant 6,821,889 - Elers , et al. November 23, 2 | 2004-11-23 |
| Deposition of transition metal carbides Grant 6,800,552 - Elers , et al. October 5, 2 | 2004-10-05 |
| Process for growing metal or metal carbide thin films utilizing boron-containing reducing agents Grant 6,794,287 - Saanila , et al. September 21, 2 | 2004-09-21 |
| Method of modifying source chemicals in an ald process Grant 6,767,582 - Elers July 27, 2 | 2004-07-27 |
| Conformal lining layers for damascene metallization App 20040130029 - Raaijmakers, Ivo ; et al. | 2004-07-08 |
| Sealing porous structures Grant 6,759,325 - Raaijmakers , et al. July 6, 2 | 2004-07-06 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes App 20040121616 - Satta, Alessandra ; et al. | 2004-06-24 |
| Oxygen bridge structures and methods to form oxygen bridge structures App 20040092096 - Raaijmakers, Ivo ; et al. | 2004-05-13 |
| Method of making conformal lining layers for damascene metallization Grant 6,727,169 - Raaijmakers , et al. April 27, 2 | 2004-04-27 |
| Process for producing integrated circuits App 20040038529 - Soininen, Pekka Juha ; et al. | 2004-02-26 |
| Metal anneal with oxidation prevention Grant 6,679,951 - Soininen , et al. January 20, 2 | 2004-01-20 |
| Method of growing electrical conductors App 20040005753 - Kostamo, Juhana ; et al. | 2004-01-08 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,664,192 - Satta , et al. December 16, 2 | 2003-12-16 |
| Process for growing metal or metal carbide thin films utilizing boron-containing reducing agents App 20030186495 - Saanila, Ville Antero ; et al. | 2003-10-02 |
| Sealing porous structures App 20030143839 - Raaijmakers, Ivo ; et al. | 2003-07-31 |
| Process for growing metalloid thin films utilizing boron-containing reducing agents Grant 6,599,572 - Saanila , et al. July 29, 2 | 2003-07-29 |
| Method of growing electrical conductors App 20030096468 - Soininen, Pekka J. ; et al. | 2003-05-22 |
| Atomic layer deposition reactor App 20030075273 - Kilpela, Olli ; et al. | 2003-04-24 |
| Deposition of transition metal carbides App 20030031807 - Elers, Kai-Erik ; et al. | 2003-02-13 |
| Method of producing elemental thin films App 20020187256 - Elers, Kai-Erik ; et al. | 2002-12-12 |
| Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH Grant 6,482,740 - Soininen , et al. November 19, 2 | 2002-11-19 |
| Deposition of transition metal carbides Grant 6,482,262 - Elers , et al. November 19, 2 | 2002-11-19 |
| Production of elemental thin films using a boron-containing reducing agent Grant 6,475,276 - Elers , et al. November 5, 2 | 2002-11-05 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes App 20020155722 - Satta, Alessandra ; et al. | 2002-10-24 |
| In situ reduction of copper oxide prior to silicon carbide deposition App 20020098685 - Sophie, Auguste J.L. ; et al. | 2002-07-25 |
| Metal anneal with oxidation prevention App 20020092584 - Soininen, Pekka J. ; et al. | 2002-07-18 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,391,785 - Satta , et al. May 21, 2 | 2002-05-21 |
| Method of growing electrical conductors App 20020004293 - Soininen, Pekka J. ; et al. | 2002-01-10 |
| Process for growing metalloid thin films App 20010009695 - Saanila, Ville Antero ; et al. | 2001-07-26 |
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