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Patent applications and USPTO patent grants for ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed.The latest application filed is for "metrology system and method".
Patent | Date |
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Metrology System And Method App 20220283515 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2022-09-08 |
On Chip Wafer Alignment Sensor App 20220268574 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2022-08-25 |
Sensor Apparatus And Method For Lithographic Measurements App 20220179331 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2022-06-09 |
Apparatus For And Method Of Simultaneously Acquiring Parallel Alignment Marks App 20220100109 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2022-03-31 |
Metrology sensor, lithographic apparatus and method for manufacturing devices Grant 11,181,835 - Goorden , et al. November 23, 2 | 2021-11-23 |
Alignment sensor apparatus for process sensitivity compensation Grant 11,175,593 - Huisman , et al. November 16, 2 | 2021-11-16 |
Compact Alignment Sensor Arrangements App 20210318627 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2021-10-14 |
Hybrid Coupling Diffractive Optical Element App 20210173210 - Elazhary; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2021-06-10 |
Metrology Sensor, Lithographic Apparatus and Method for Manufacturing Devices App 20210157248 - GOORDEN; Sebastianus Adrianus ;   et al. | 2021-05-27 |
Alignment Sensor Apparatus for Process Sensivity Compensation App 20210132509 - HUISMAN; Simon Reinald ;   et al. | 2021-05-06 |
Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods thereof App 20210095957 - SWILLAM; Mohamed ;   et al. | 2021-04-01 |
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