EKSTEIN; Claudia
Patent Applications and Registrations
Patent applications and USPTO patent grants for EKSTEIN; Claudia.The latest application filed is for "substrate for an euv-lithography mirror".
- EKSTEIN; Claudia - Ellwangen DE
| Patent | Date |
|---|---|
| Substrate For An Euv-lithography Mirror App 20210149093 - EKSTEIN; Claudia ; et al. | 2021-05-20 |
| Substrate for an EUV-lithography mirror Grant 10,935,704 - Ekstein , et al. March 2, 2 | 2021-03-02 |
| Substrate For An Euv-lithography Mirror App 20170160447 - EKSTEIN; Claudia ; et al. | 2017-06-08 |
| Method and device for connecting an optical element to a frame Grant 9,604,299 - Schoeppach , et al. March 28, 2 | 2017-03-28 |
| Substrate for mirrors for EUV lithography Grant 8,976,927 - Ekstein , et al. March 10, 2 | 2015-03-10 |
| Method And Device For Connecting An Optical Element To A Frame App 20150008215 - Schoeppach; Armin ; et al. | 2015-01-08 |
| Method and device for connecting an optical element to a frame Grant 8,705,006 - Schoeppach , et al. April 22, 2 | 2014-04-22 |
| Substrate For An Euv-lithography Mirror App 20130301151 - EKSTEIN; Claudia ; et al. | 2013-11-14 |
| Substrate For Mirrors For Euv Lithography App 20130170056 - EKSTEIN; Claudia ; et al. | 2013-07-04 |
| Composite structure for microlithography and optical arrangement Grant 7,816,022 - Ekstein , et al. October 19, 2 | 2010-10-19 |
| Method And Device For Connecting An Optical Element To A Frame App 20090244508 - Schoeppach; Armin ; et al. | 2009-10-01 |
| Composite Structure For Microlithography And Optical Arrangement App 20090142615 - EKSTEIN; Claudia ; et al. | 2009-06-04 |
| Arrangement Of Two Connected Bodies App 20080100815 - Holderer; Hubert ; et al. | 2008-05-01 |
| Support structure for temporarily supporting a substrate App 20070285647 - Kwan; Yim-Bun Patrick ; et al. | 2007-12-13 |
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