Patent | Date |
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Beam profiling speed enhancement for scanned beam implanters Grant 10,483,086 - Ray , et al. Nov | 2019-11-19 |
Ion implantation system having beam angle control in drift and deceleration modes Grant 10,037,877 - Vanderberg , et al. July 31, 2 | 2018-07-31 |
Combined electrostatic lens system for ion implantation Grant 9,679,739 - Eisner , et al. June 13, 2 | 2017-06-13 |
Combined multipole magnet and dipole scanning magnet Grant 9,620,327 - Eisner April 11, 2 | 2017-04-11 |
Beam Profiling Speed Enhancement for Scanned Beam Implanters App 20160189926 - Ray; Andy M. ;   et al. | 2016-06-30 |
Combined Electrostatic Lens System for Ion Implantation App 20160189912 - Eisner; Edward C. ;   et al. | 2016-06-30 |
Systems And Methods For Beam Angle Adjustment In Ion Implanters With Beam Decelaration App 20160189917 - Vanderberg; Bo H. ;   et al. | 2016-06-30 |
Combined Multipole Magnet and Dipole Scanning Magnet App 20160189913 - Eisner; Edward C. | 2016-06-30 |
Beam line design to reduce energy contamination Grant 8,963,107 - Eisner , et al. February 24, 2 | 2015-02-24 |
Methods for beam current modulation by ion source parameter modulation Grant 8,803,110 - Graf , et al. August 12, 2 | 2014-08-12 |
Method and apparatus for improved uniformity control with dynamic beam shaping Grant 8,653,486 - Eisner February 18, 2 | 2014-02-18 |
System and method for ion implantation with improved productivity and uniformity Grant 8,637,838 - Eisner , et al. January 28, 2 | 2014-01-28 |
Beam Line Design To Reduce Energy Contamination App 20130181139 - EISNER; Edward C. ;   et al. | 2013-07-18 |
System And Method For Ion Implantation With Improved Productivity And Uniformity App 20130146760 - Eisner; Edward C. ;   et al. | 2013-06-13 |
Method And Apparatus For Improved Uniformity Control With Dynamic Beam Shaping App 20130099131 - Eisner; Edward C. | 2013-04-25 |
Method and apparatus for improved uniformity control with dynamic beam shaping Grant 8,421,039 - Eisner April 16, 2 | 2013-04-16 |
Uniformity of a scanned ion beam Grant 8,378,313 - Eisner , et al. February 19, 2 | 2013-02-19 |
Method and Apparatus for Improved Uniformity Control with Dynamic Beam Shaping App 20120248324 - Eisner; Edward C. | 2012-10-04 |
Uniformity of a Scanned Ion Beam App 20120248326 - Eisner; Edward C. ;   et al. | 2012-10-04 |
Throughput Enhancement for Scanned Beam Ion Implanters App 20110272567 - Eisner; Edward C. ;   et al. | 2011-11-10 |
Ion implantation with diminished scanning field effects Grant 8,008,636 - Eisner August 30, 2 | 2011-08-30 |
System and method of controlling broad beam uniformity Grant 7,858,955 - Satoh , et al. December 28, 2 | 2010-12-28 |
Ion Implantation With Diminished Scanning Field Effects App 20100155623 - Eisner; Edward C. | 2010-06-24 |
System And Method Of Controlling Broad Beam Uniformity App 20090321657 - Satoh; Shu ;   et al. | 2009-12-31 |
System for magnetic scanning and correction of an ion beam Grant 7,615,763 - Vanderberg , et al. November 10, 2 | 2009-11-10 |
Methods for rapidly switching off an ion beam Grant 7,589,333 - Graf , et al. September 15, 2 | 2009-09-15 |
Throughput enhancement for scanned beam ion implanters Grant 7,566,886 - Eisner , et al. July 28, 2 | 2009-07-28 |
Ion beam scanning control methods and systems for ion implantation uniformity Grant 7,550,751 - Benveniste , et al. June 23, 2 | 2009-06-23 |
Ion implanter with ionization chamber electrode design Grant 7,453,074 - Eisner , et al. November 18, 2 | 2008-11-18 |
Systems and methods for beam angle adjustment in ion implanters Grant 7,399,980 - Vanderberg , et al. July 15, 2 | 2008-07-15 |
Methods for rapidly switching off an ion beam App 20080078955 - Graf; Michael A. ;   et al. | 2008-04-03 |
Methods for beam current modulation by ion source parameter modulation App 20080078957 - Graf; Michael A. ;   et al. | 2008-04-03 |
System for magnetic scanning and correction of an ion beam App 20080067436 - Vanderberg; Bo H. ;   et al. | 2008-03-20 |
Ion beam scanning control methods and systems for ion implantation uniformity App 20080067444 - Benveniste; Victor M. ;   et al. | 2008-03-20 |
Systems and methods for beam angle adjustment in ion implanters App 20080061228 - Vanderberg; Bo H. ;   et al. | 2008-03-13 |
Throughput enhancement for scanned beam ion implanters App 20080035862 - Eisner; Edward C. ;   et al. | 2008-02-14 |
Ion implanter with ionization chamber electrode design App 20070125965 - Eisner; Edward C. ;   et al. | 2007-06-07 |
Systems and methods for beam angle adjustment in ion implanters Grant 7,227,160 - Vanderberg , et al. June 5, 2 | 2007-06-05 |