Eisenmenger; Johannes

Patent Applications and Registrations

Patent applications and USPTO patent grants for Eisenmenger; Johannes.The latest application filed is for "method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus".

Company Profile

2.17.20

Eisenmenger; Johannes - Ulm DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of operating a microlithographic projection apparatus and illumination system of such an apparatus Grant 10,444,631 - Deguenther , et al. Oc	2019-10-15
Method for illuminating an object field of a projection exposure system Grant 10,409,167 - Endres , et al. Sept	2019-09-10
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Grant 10,274,828 - Deguenther , et al.	2019-04-30
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180246415 - Xalter; Stefan ; et al.	2018-08-30
Method Of Operating A Microlithographic Projection Apparatus And Illumination System Of Such An Apparatus App 20180217506 - Deguenther; Markus ; et al.	2018-08-02
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement Grant 10,018,803 - Horn , et al. July 10, 2	2018-07-10
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Grant 9,977,334 - Deguenther , et al. May 22, 2	2018-05-22
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System App 20180129137 - Deguenther; Markus ; et al.	2018-05-10
Optical component Grant 9,915,872 - Eisenmenger March 13, 2	2018-03-13
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Grant 9,910,360 - Deguenther , et al. March 6, 2	2018-03-06
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,897,925 - Xalter , et al. February 20, 2	2018-02-20
Mirror array Grant 9,874,819 - Bieling , et al. January 23, 2	2018-01-23
Device And Method For Controlling Positioning Of Multiple Adjustable Mirror Elements In A Multi-mirror Arrangement App 20170038555 - Horn; Jan ; et al.	2017-02-09
Monitor system for determining orientations of mirror elements and EUV lithography system Grant 9,563,129 - Wangler , et al. February 7, 2	2017-02-07
Optical system for a microlithographic projection exposure apparatus Grant 9,535,331 - Patra , et al. January 3, 2	2017-01-03
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System App 20160357113 - Deguenther; Markus ; et al.	2016-12-08
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System App 20160349624 - Deguenther; Markus ; et al.	2016-12-01
Method For Illuminating An Object Field Of A Projection Exposure System App 20160342094 - Endres; Martin ; et al.	2016-11-24
Mirror Array App 20160342095 - Bieling; Stig ; et al.	2016-11-24
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160266502 - Xalter; Stefan ; et al.	2016-09-15
Optical Component App 20160109807 - Eisenmenger; Johannes	2016-04-21
Optical Component App 20160077442 - Staicu; Adrian ; et al.	2016-03-17
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,239,229 - Xalter , et al. January 19, 2	2016-01-19
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150300807 - Xalter; Stefan ; et al.	2015-10-22
Monitor System For Determining Orientations Of Mirror Elements And Euv Lithography System App 20150198894 - Wangler; Johannes ; et al.	2015-07-16
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,019,475 - Xalter , et al. April 28, 2	2015-04-28
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,013,684 - Xalter , et al. April 21, 2	2015-04-21
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,001,309 - Xalter , et al. April 7, 2	2015-04-07
Optical System For A Microlithographic Projection Exposure Apparatus App 20150029477 - Patra; Michael ; et al.	2015-01-29
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140233006 - Xalter; Stefan ; et al.	2014-08-21
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140226141 - Xalter; Stefan ; et al.	2014-08-14
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 8,339,577 - Xalter , et al. December 25, 2	2012-12-25
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120293784 - Xalter; Stefan ; et al.	2012-11-22
Optical Measurement Apparatus For A Projection Exposure System App 20100079738 - Eisenmenger; Johannes ; et al.	2010-04-01
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100039629 - Xalter; Stefan ; et al.	2010-02-18

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