Ehrmann; Albrecht

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ehrmann; Albrecht.The latest application filed is for "measurement apparatus for measuring a wavefront aberration of an imaging optical system".

Company Profile

2.21.26

Ehrmann; Albrecht - Aalen DE
Ehrmann; Albrecht - Koenigsbronn DE
Ehrmann; Albrecht - Aalen-Ebnat DE
Ehrmann; Albrecht - Krailling DE
Ehrmann; Albrecht - Krailing DE
Ehrmann; Albrecht - Grenchen CH

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Measurement apparatus for measuring a wavefront aberration of an imaging optical system Grant 11,441,970 - Ehrmann , et al. September 13, 2	2022-09-13
Measurement Apparatus For Measuring A Wavefront Aberration Of An Imaging Optical System App 20200003655 - EHRMANN; Albrecht ; et al.	2020-01-02
Microlithographic projection exposure apparatus and measuring device for a projection lens Grant 10,345,710 - Ehrmann , et al. July 9, 2	2019-07-09
Apparatus for determining an optical property of an optical imaging system Grant 10,006,807 - Ehrmann , et al. June 26, 2	2018-06-26
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20170082930 - Ehrmann; Albrecht ; et al.	2017-03-23
Exposure apparatus and measuring device for a projection lens Grant 9,436,095 - Ehrmann , et al. September 6, 2	2016-09-06
System for measuring the image quality of an optical imaging system Grant 9,429,495 - Mengel , et al. August 30, 2	2016-08-30
Apparatus For Determining An Optical Property Of An Optical Imaging System App 20160202118 - EHRMANN; Albrecht ; et al.	2016-07-14
System For Measuring The Image Quality Of An Optical Imaging System App 20140347654 - Mengel; Markus ; et al.	2014-11-27
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 8,836,929 - Wegmann , et al. September 16, 2	2014-09-16
System for measuring the image quality of an optical imaging system Grant 8,823,948 - Mengel , et al. September 2, 2	2014-09-02
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20140022524 - Wegmann; Ulrich ; et al.	2014-01-23
System For Measuring The Image Quality Of An Optical Imaging System App 20130293869 - Mengel; Markus ; et al.	2013-11-07
System for measuring the image quality of an optical imaging system Grant 8,488,127 - Mengel , et al. July 16, 2	2013-07-16
Exposure Apparatus And Measuring Device For A Projection Lens App 20130120723 - Ehrmann; Albrecht ; et al.	2013-05-16
Exposure apparatus and measuring device for a projection lens Grant 8,330,935 - Ehrmann , et al. December 11, 2	2012-12-11
Optical system of a microlithographic projection exposure apparatus Grant 8,212,991 - Dodoc , et al. July 3, 2	2012-07-03
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20120113429 - Wegmann; Ulrich ; et al.	2012-05-10
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 8,120,763 - Wegmann , et al. February 21, 2	2012-02-21
System For Measuring The Image Quality Of An Optical Imaging System App 20100315651 - Mengel; Markus ; et al.	2010-12-16
System for measuring the image quality of an optical imaging system Grant 7,796,274 - Mengel , et al. September 14, 2	2010-09-14
System for measuring the image quality of an optical imaging system Grant 7,760,366 - Mengel , et al. July 20, 2	2010-07-20
Exposure Apparatus And Measuring Device For A Projection Lens App 20100141912 - Ehrmann; Albrecht ; et al.	2010-06-10
Optical System Of A Microlithographic Projection Exposure Apparatus App 20100073655 - Dodoc; Aurelian ; et al.	2010-03-25
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20090257049 - Wegmann; Ulrich ; et al.	2009-10-15
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20090021726 - Wegmann; Ulrich ; et al.	2009-01-22
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20080309894 - Ehrmann; Albrecht ; et al.	2008-12-18
Optical System Of A Microlithographic Projection Exposure Apparatus App 20080309904 - Dodoc; Aurelian ; et al.	2008-12-18
System for Measuring the Image Quality of an Optical Imaging System App 20080252876 - Mengel; Markus ; et al.	2008-10-16
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 7,408,652 - Wegmann , et al. August 5, 2	2008-08-05
System For Measuring The Image Quality Of An Optical Imaging System App 20080180688 - Mengel; Markus ; et al.	2008-07-31
Optical System of a Microlithographic Projection Exposure Apparatus App 20080170217 - Dodoc; Aurelian ; et al.	2008-07-17
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20070070316 - Ehrmann; Albrecht ; et al.	2007-03-29
Device and method for the optical measurement of an optical system, a container therefor, and a microlithography projection exposure machine App 20050243328 - Wegmann, Ulrich ; et al.	2005-11-03
Method of producing large-area membrane masks by dry etching Grant 6,864,182 - Butschke , et al. March 8, 2	2005-03-08
Large-area membrane mask and method for fabricating the mask Grant 6,835,508 - Butschke , et al. December 28, 2	2004-12-28
Method of producing a perforated mask for particle radiation Grant 6,773,854 - Ehrmann , et al. August 10, 2	2004-08-10
Goods transfer station and process for operating such a goods transfer station Grant 6,748,879 - Ehrmann , et al. June 15, 2	2004-06-15
Lithography mask configuration Grant 6,696,206 - Ehrmann February 24, 2	2004-02-24
Method for fabricating positionally exact surface-wide membrane masks Grant 6,696,371 - Butschke , et al. February 24, 2	2004-02-24
Method of producing a perforated mask for particle radiation App 20030059689 - Ehrmann, Albrecht ; et al.	2003-03-27
Goods transfer station and process for operating such a goods transfer station App 20030029695 - Ehrmann, Albrecht ; et al.	2003-02-13
Large-area membrane mask and method for fabricating the mask App 20030031939 - Butschke, Jorg ; et al.	2003-02-13
Method of producing large-area membrane masks by dry etching App 20030003739 - Butschke, Jorg ; et al.	2003-01-02
Method for fabricating positionally exact surface-wide membrane masks App 20020182895 - Butschke, Joerg ; et al.	2002-12-05
Lithography mask configuration App 20020081498 - Ehrmann, Albrecht	2002-06-27

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