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Patent applications and USPTO patent grants for EHRENSPERGER; Damian.The latest application filed is for "system for substrate handling and processing".
Patent | Date |
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System For Substrate Handling And Processing App 20130340939 - EGLI; Christian ;   et al. | 2013-12-26 |
Reduced Pressure Processing Chamber And Exhaust Arrangement App 20130340681 - WAGNER; Philipp ;   et al. | 2013-12-26 |
Plasma Processing System With Movable Chamber Housing Parts App 20130333616 - KLINDWORTH; Markus ;   et al. | 2013-12-19 |
Vacuum processing chamber manufactured by aluminum casting Grant 8,347,941 - Ilinich , et al. January 8, 2 | 2013-01-08 |
Vacuum Processing Chamber Manufactured By Aluminum Casting App 20110209662 - Ilinich; Eduard ;   et al. | 2011-09-01 |
Method For Determining An Overall Leakage Rate Of A Vacuum System And Vacuum System App 20110197659 - Palten; Thomas ;   et al. | 2011-08-18 |
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