Ehrenberg; Tillmann

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ehrenberg; Tillmann.The latest application filed is for "device for measuring or inspecting substrates of the semiconductor industry".

Company Profile

0.4.6

Ehrenberg; Tillmann - Schoeffengrund DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for determining positions of structures on a substrate Grant 7,948,635 - Pietsch , et al. May 24, 2	2011-05-24
Device for measuring or inspecting substrates of the semiconductor industry Grant 7,906,978 - Ehrenberg March 15, 2	2011-03-15
Device for measuring the position of at least one structure on a substrate Grant 7,872,763 - Pietsch , et al. January 18, 2	2011-01-18
Device for measuring positions of structures on a substrate Grant 7,817,262 - Ehrenberg , et al. October 19, 2	2010-10-19
Device for measuring or inspecting substrates of the semiconductor industry App 20090189157 - Ehrenberg; Tillmann	2009-07-30
Apparatus and method for supporting a substrate at a position with high precision App 20090126525 - Pietsch; Katrin ; et al.	2009-05-21
Device for measuring the position of at least one structure on a substrate App 20090128828 - Pietsch; Katrin ; et al.	2009-05-21
Method for determining positions of structures on a substrate App 20090109443 - Pietsch; Katrin ; et al.	2009-04-30
Advancing means for a multi-coordinate measurement table of a coordinate measuring device and method for controlling such an advancing means App 20090013808 - Ehrenberg; Tillmann	2009-01-15
Device for measuring positions of structures on a substrate App 20090002720 - Ehrenberg; Tillmann ; et al.	2009-01-01

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